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Hi Dan,</div>
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We also have a separate PDMS room with special protocols, training, and access restrictions. It's sort of an "all purpose" room for messy processes that may affect tools in the main cleanroom. We also forbid it in the main cleanroom.</div>
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That said, in my industry past, I used to run PDMS in the same small room as my litho steps and didn't have any issues. But I was the only person working in the room and I wiped every surface and vacuumed every day. It can be done but I can't imagine it working
in a busy shared space.</div>
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Regards,</div>
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Michael</div>
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Michael Robles (He/Him)</div>
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Senior Photolithography Process Engineer</div>
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Stanford Nanofabrication Facility (SNF)</div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Kyle Keenan <kckeenan@seas.upenn.edu><br>
<b>Sent:</b> Wednesday, September 4, 2024 11:59 AM<br>
<b>To:</b> Dan P. Woodie <daniel.woodie@princeton.edu><br>
<b>Cc:</b> Fab Network <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] PDMS processing - separate lab?</font>
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<div>Hi Dan,</div>
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<div>Short answer for us: we have a newly dedicated space for this in a remote part of the cleanroom. There are special protocols for using this space (special disposable gloves, blue sticky mats, signage) to minimize the impact on adjacent spaces, as well
as the rest of the cleanroom. <br>
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<div>Best,</div>
<div>Kyle<br>
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<div dir="ltr" class="x_gmail_attr">On Wed, Sep 4, 2024 at 2:52 PM Dan P. Woodie <<a href="mailto:daniel.woodie@princeton.edu">daniel.woodie@princeton.edu</a>> wrote:<br>
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<p class="x_MsoNormal">Lab Network,<u></u><u></u></p>
<p class="x_MsoNormal"><u></u> <u></u></p>
<p class="x_MsoNormal">I am curious how many fabs allow PDMS mixing in their main cleanrooms and how many require that work done in separate isolated spaces or noncleanroom labs. My experience has been that they can be in the same space if careful glove protocols
are used to avoid spreading the unpolymerized precursors around the facility, but I am interested in other’s experiences. Thanks for the shared knowledge.<u></u><u></u></p>
<p class="x_MsoNormal"><u></u> <u></u></p>
<p class="x_MsoNormal">Dan<u></u><u></u></p>
<p class="x_MsoNormal"><u></u> <u></u></p>
<p class="x_MsoNormal">Daniel Woodie<u></u><u></u></p>
<p class="x_MsoNormal">Director, Micro/Nano Fabrication Center, Princeton Materials Institute<u></u><u></u></p>
<p class="x_MsoNormal">Princeton University<u></u><u></u></p>
<p class="x_MsoNormal">155 Andlinger Center<u></u><u></u></p>
<p class="x_MsoNormal">86 Olden St<u></u><u></u></p>
<p class="x_MsoNormal">Princeton, NJ 08540<u></u><u></u></p>
<p class="x_MsoNormal"><u></u> <u></u></p>
<p class="x_MsoNormal">(609)258-5922 (office)<u></u><u></u></p>
<p class="x_MsoNormal">(607)227-2993 (cell)<u></u><u></u></p>
<p class="x_MsoNormal"><a href="mailto:daniel.woodie@princeton.edu" target="_blank">daniel.woodie@princeton.edu</a><u></u><u></u></p>
<p class="x_MsoNormal"><a href="https://urldefense.com/v3/__https://mnfc.princeton.edu/__;!!IBzWLUs!RIQyUlg3VITVgCvRMG_LaZS5r3x23wcF4Zguzt_ANezoxyGVohfMt2jaiZkdrydiuaLvloUine4mMdLKOlbmAZ5xxfaP1TVxpg$" target="_blank">mnfc.princeton.edu</a><u></u><u></u></p>
<p class="x_MsoNormal"><a href="https://urldefense.com/v3/__http://www.linkedin.com/in/danielpwoodie/__;!!IBzWLUs!RIQyUlg3VITVgCvRMG_LaZS5r3x23wcF4Zguzt_ANezoxyGVohfMt2jaiZkdrydiuaLvloUine4mMdLKOlbmAZ5xxfZnkzO8lg$" target="_blank">www.linkedin.com/in/danielpwoodie</a><u></u><u></u></p>
<p class="x_MsoNormal"><u></u> <u></u></p>
<p class="x_MsoNormal"><u></u> <u></u></p>
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<div>Kyle Keenan</div>
<div><br>
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<div>Senior Manager - Laboratory Operations<br>
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<div>Quattrone Nanofabrication Facility</div>
<div>University of Pennsylvania</div>
<div>P: 215-898-7560</div>
<div>F: 215-573-4925<br>
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