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<p class="MsoNormal"><span style="font-family:"Aptos",sans-serif">Hi Joe<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Aptos",sans-serif">At UMass Lowell we have a Cambridge (Veeco) Figi F200 ALD. It’s a bit larger than the Savannah.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Aptos",sans-serif">Its been here about 12y and had very little downtime. The support we get from Veeco service and applications is very good.<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif;color:black;mso-ligatures:standardcontextual"><a href="https://www.linkedin.com/company/umass-lowell-core-research-facilities/"></a></span><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif;color:black"><img border="0" width="70" height="60" style="width:.7291in;height:.625in" id="Picture_x0020_1660416511" src="cid:image001.png@01DB0035.AC24A130" alt="University of Massachusetts Lowell"></span><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><b><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif;color:black;mso-ligatures:standardcontextual">Justin Moreau<o:p></o:p></span></b></p>
<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><i><span style="font-size:10.5pt;font-family:"Times New Roman",serif;color:black;mso-ligatures:standardcontextual">Director, Nanofabrication Core<o:p></o:p></span></i></p>
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<span style="font-size:10.5pt;font-family:"Times New Roman",serif;color:black;text-transform:uppercase;mso-ligatures:standardcontextual">CORE RESEARCH FACILITIES<o:p></o:p></span></p>
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<span style="font-size:10.5pt;font-family:"Times New Roman",serif;color:black;mso-ligatures:standardcontextual">ETIC<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:18.0pt"><b><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black;mso-ligatures:standardcontextual">E:</span></b><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black;mso-ligatures:standardcontextual"> <a href="mailto:Justin_Moreau@uml.edu"><span style="color:black;text-decoration:none">Justin_Moreau@uml.edu</span></a>
<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:0in;line-height:18.0pt"><b><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black;mso-ligatures:standardcontextual">T:</span></b><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black;mso-ligatures:standardcontextual"> 978-934-3615
<b>M: </b>978-337-8148<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><span style="font-family:"Aptos",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><a href="https://www.linkedin.com/company/umass-lowell-core-research-facilities/"><span style="font-family:"Aptos",sans-serif;color:windowtext;text-decoration:none"><img border="0" width="114" height="45" style="width:1.1875in;height:.4722in" id="Picture_x0020_2" src="cid:image002.jpg@01DB0035.AC24A130"></span></a><span style="font-family:"Aptos",sans-serif;mso-ligatures:standardcontextual">
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Mac Hathaway<br>
<b>Sent:</b> Thursday, September 5, 2024 4:25 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Small footprint ALD system for Al2O3<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal" style="mso-line-height-alt:.75pt"><span style="font-size:1.0pt;color:white">Hi Joe, Mac here, at Harvard CNS. We've been using two Savannahs for coming up on 17 years here. They are pretty robust and have served us well. We also have an
Arradiance Gemstar which we've also had for a number of years. If I had to choose<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt;line-height:normal"><span style="font-family:"Times New Roman",serif">Hi Joe,<br>
<br>
Mac here, at Harvard CNS.<br>
<br>
We've been using two Savannahs for coming up on 17 years here. They are pretty robust and have served us well.<br>
<br>
We also have an Arradiance Gemstar which we've also had for a number of years.<br>
<br>
If I had to choose between them, I'd go with the Arradiance, but they are both pretty solid.<br>
<br>
<br>
Mac<br>
<br>
</span><span style="font-size:12.0pt"><o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:0in"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman",serif">Mac Hathaway</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman",serif">Senior Process and Systems Engineer</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman",serif">Harvard Center for Nanoscale Systems</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman",serif">11 Oxford St.</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman",serif">Cambridge, MA 02138</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman",serif">617-495-9012</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif"> </span><o:p></o:p></p>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><span style="font-size:12.0pt;font-family:"Aptos",sans-serif">On 9/5/2024 2:57 PM, Joseph Losby wrote:<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><span style="font-family:"Aptos",sans-serif;color:black">Hello,<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><span style="font-family:"Aptos",sans-serif;color:black">Does anyone have a recommendation for a small footprint ALD system? We are looking to deposit Al2O3 only. <o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><span style="font-family:"Aptos",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><span style="font-family:"Aptos",sans-serif;color:black">Any thoughts on the
<a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__www.veeco.com_products_savannah-2Dthermal-2Dald-2Dfor-2Drd_&d=DwMFAw&c=WO-RGvefibhHBZq3fL85hQ&r=TEMLD8-VsxCGtcVzmvpT5GFNSczskEKHzW6aYlttmIY&m=ODSXhzqSu__Z1FHJg-7TQfKRqo9i0kcS2MgRPzn_eQVgDFmbsKFIXyaFbLJ6BYbr&s=3uO21TSwUeJjjrZLOq5YHs4pDHwCs614Va9VNHaMtRE&e=" title="https://www.veeco.com/products/savannah-thermal-ald-for-rd/">
Veeco Savannah</a>? <o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><span style="font-family:"Aptos",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><span style="font-family:"Aptos",sans-serif;color:black">Cheers,<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><span style="font-family:"Aptos",sans-serif;color:black">Joe<o:p></o:p></span></p>
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<p style="background:white"><b><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#D6001C">Joseph Losby, PhD</span></b><o:p></o:p></p>
<p style="background:white"><b><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:black;background:white">Manager, qLab Operations</span></b><o:p></o:p></p>
<p style="background:white"><b><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:black"><a href="mailto:joseph.losby@ucalgary.ca">joseph.losby@ucalgary.ca</a></span></b><o:p></o:p></p>
<p style="background:white"><o:p> </o:p></p>
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<p style="background:white"><span style="color:black"><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__io.ucalgary.ca_quantum-2Dcity&d=DwMFAw&c=WO-RGvefibhHBZq3fL85hQ&r=TEMLD8-VsxCGtcVzmvpT5GFNSczskEKHzW6aYlttmIY&m=ODSXhzqSu__Z1FHJg-7TQfKRqo9i0kcS2MgRPzn_eQVgDFmbsKFIXyaFbLJ6BYbr&s=cOQPxDtBMiTg5VpQsGKtbLGhlFAunY_obF5KjVOepR8&e=" title=""https://io.ucalgary.ca/quantum-city""><span style="font-size:9.0pt;font-family:"Segoe UI",sans-serif;text-decoration:none"><img border="0" width="214" height="71" style="width:2.2291in;height:.743in" id="imageSelected0_0" src="cid:image003.jpg@01DB0035.AC24A130"></span></a></span><span style="font-family:"Calibri",sans-serif;color:black"> </span><o:p></o:p></p>
<p style="background:white"><b><u><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#D6001C;background:white"><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__web-2Deur.cvent.com_event_57a389bc-2Df435-2D4ee8-2D86b5-2D0cc1c880b687_regProcessStep1&d=DwMFAw&c=WO-RGvefibhHBZq3fL85hQ&r=TEMLD8-VsxCGtcVzmvpT5GFNSczskEKHzW6aYlttmIY&m=ODSXhzqSu__Z1FHJg-7TQfKRqo9i0kcS2MgRPzn_eQVgDFmbsKFIXyaFbLJ6BYbr&s=kqznWXZVACjHsO5Vns8Vz69gK2uNZo7cROQX7PUWubQ&e=" title="https://web-eur.cvent.com/event/57a389bc-f435-4ee8-86b5-0cc1c880b687/regProcessStep1">Join
us October 2-3, 2024 at the Telus Convention Centre</a> for qConnect 2024</span></u></b><o:p></o:p></p>
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<o:p></o:p></span></p>
<pre>_______________________________________________<o:p></o:p></pre>
<pre>labnetwork mailing list<o:p></o:p></pre>
<pre><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><o:p></o:p></pre>
<pre><a href="https://urldefense.com/v3/__https:/mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!NcNAlj2UIVkjDA!96fnjGTFDS4hpND2SkCWSxOHJkHcuJVJ91rZN8rNouisi7XloMfftZ68OleweTuCPvctAezsXwaoQYt1qjI6_ixLj-ZeJG8$">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></pre>
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