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Hello Joe,<br>
<br>
Fiji is a PE-ALD system as compared to Savannah which is a thermal
ALD, both from Veeco. My experience with Fiji system is highly
positive, although it may be a bit more than you need.<br>
I can recommend ANRIC, their small table top systems (we have
AT-410) are great for what you need, i.e. only Al2O3 deposition.
They even have a smaller system now which I've seen during recent
ALD 2024 conference, neat, table-top, probably the smallest
commercial ALD you can get. <br>
Both Arradiance and Anric systems are similar, small foot-print
table-top systems, they have a kalrez o-ring sealed door, which is
part of the deposition chamber, meaning you should replace that
o-ring from time to time, and if you often thermally cycle it to
higher deposition temperatures (>200 °C), it's more often than
not otherwise it wouldn't seal well. Also, the foreline between the
chamber and the filter, including the pneumatic isolation valve,
isn't heated, meaning it would need dissasembly and cleaning the
Al2O3 powder with KOH or NaOH on a regular basis (quite often, our
experience was every 1-2 um of film deposited). I modified our Anric
system for heated foreline and heated valve and we have no such
issues since then but such a rebuild is something you may want to
omit. <br>
<br>
The Veeco systems on the other hand are really more robust. Not sure
how door is handled on the Savannah thermal ALD system, but on the
Fiji PE-ALD it was a bit further from the chamber ~ 15 cm, equipped
with an inert gas curtain to prevent deposition on the o-ring which
sealed the door. The Veeco solution has an isolation valve below the
chamber and the vapour trap (steel mesh) both heated, which helps to
prevent condensation and prolonges the service interval
significantly. Also, this is a much bigger machine, typically 8"
chamber and definitely not a table-top solution.<br>
<br>
Cheers,<br>
Boris<br>
<br>
<div class="moz-cite-prefix">On 06/09/2024 14:37, Moreau, Justin
wrote:<br>
</div>
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<p class="MsoNormal"><span
style="font-family:"Aptos",sans-serif">Hi Joe<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-family:"Aptos",sans-serif">At UMass
Lowell we have a Cambridge (Veeco) Figi F200 ALD. It’s a bit
larger than the Savannah.<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-family:"Aptos",sans-serif">Its been
here about 12y and had very little downtime. The support we
get from Veeco service and applications is very good.<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-family:"Aptos",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span
style="font-family:"Aptos",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span
style="font-family:"Aptos",sans-serif"><o:p> </o:p></span></p>
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style="font-family:"Aptos",sans-serif"><o:p> </o:p></span></p>
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style="font-family:"Aptos",sans-serif"><o:p> </o:p></span></p>
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style="font-family:"Aptos",sans-serif"><o:p> </o:p></span></p>
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width="70" valign="top">
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style="margin-bottom:0in;line-height:normal"><span
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style="font-size:10.5pt;font-family:"Helvetica",sans-serif;color:black"><img
style="width:.7291in;height:.625in"
id="Picture_x0020_1660416511"
src="cid:part1.cJql0tHN.nJ18hwhC@savba.sk"
alt="University of Massachusetts Lowell" class=""
width="70" height="60" border="0"></span><span
style="font-size:10.5pt;font-family:"Helvetica",sans-serif;color:black"><o:p></o:p></span></p>
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<table class="MsoNormalTable"
style="width:397.5pt;border-collapse:collapse"
width="530" cellspacing="0" cellpadding="0" border="0">
<tbody>
<tr>
<td
style="border:none;border-bottom:solid #CCCCCC 1.0pt;padding:8.25pt 0in 12.75pt 0in"
valign="top">
<p class="MsoNormal"
style="margin-bottom:0in;line-height:normal"><b><span
style="font-size:10.5pt;font-family:"Helvetica",sans-serif;color:black;mso-ligatures:standardcontextual">Justin
Moreau<o:p></o:p></span></b></p>
<p class="MsoNormal"
style="margin-bottom:0in;line-height:normal"><i><span
style="font-size:10.5pt;font-family:"Times New Roman",serif;color:black;mso-ligatures:standardcontextual">Director,
Nanofabrication Core<o:p></o:p></span></i></p>
</td>
<td
style="border:none;border-bottom:solid #CCCCCC 1.0pt;padding:8.25pt 0in 12.75pt 0in"
valign="top">
<p class="MsoNormal"
style="margin-bottom:0in;text-align:right;line-height:normal"
align="right">
<span
style="font-size:10.5pt;font-family:"Times New Roman",serif;color:black;text-transform:uppercase;mso-ligatures:standardcontextual">CORE
RESEARCH FACILITIES<o:p></o:p></span></p>
<p class="MsoNormal"
style="margin-bottom:0in;text-align:right;line-height:normal"
align="right">
<span
style="font-size:10.5pt;font-family:"Times New Roman",serif;color:black;mso-ligatures:standardcontextual">ETIC<o:p></o:p></span></p>
</td>
</tr>
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<td colspan="2"
style="padding:12.75pt 0in 0in 0in" valign="top">
<p class="MsoNormal"
style="margin-bottom:0in;line-height:18.0pt"><b><span
style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black;mso-ligatures:standardcontextual">E:</span></b><span
style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black;mso-ligatures:standardcontextual"> <a
href="mailto:Justin_Moreau@uml.edu"
moz-do-not-send="true"><span
style="color:black;text-decoration:none">Justin_Moreau@uml.edu</span></a>
<o:p></o:p></span></p>
<p class="MsoNormal"
style="margin-bottom:0in;line-height:18.0pt"><b><span
style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black;mso-ligatures:standardcontextual">T:</span></b><span
style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black;mso-ligatures:standardcontextual"> 978-934-3615
<b>M: </b>978-337-8148<o:p></o:p></span></p>
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style="margin-bottom:0in;line-height:normal"><span
style="font-family:"Aptos",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"
style="margin-bottom:0in;line-height:normal"><a
href="https://www.linkedin.com/company/umass-lowell-core-research-facilities/"
moz-do-not-send="true"><span
style="font-family:"Aptos",sans-serif;color:windowtext;text-decoration:none"><img
style="width:1.1875in;height:.4722in"
id="Picture_x0020_2"
src="cid:part2.uGQ2XXFS.8f1gsBWU@savba.sk" class=""
width="114" height="45" border="0"></span></a><span
style="font-family:"Aptos",sans-serif;mso-ligatures:standardcontextual">
<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-family:"Aptos",sans-serif"><o:p> </o:p></span></p>
<div
style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"
style="margin-bottom:0in;line-height:normal"><b>From:</b>
labnetwork <a class="moz-txt-link-rfc2396E" href="mailto:labnetwork-bounces@mtl.mit.edu"><labnetwork-bounces@mtl.mit.edu></a>
<b>On Behalf Of </b>Mac Hathaway<br>
<b>Sent:</b> Thursday, September 5, 2024 4:25 PM<br>
<b>To:</b> <a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] Small footprint ALD system
for Al2O3<o:p></o:p></p>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p class="MsoNormal" style="mso-line-height-alt:.75pt"><span
style="font-size:1.0pt;color:white">Hi Joe, Mac here, at
Harvard CNS. We've been using two Savannahs for coming up
on 17 years here. They are pretty robust and have served
us well. We also have an Arradiance Gemstar which we've
also had for a number of years. If I had to choose<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal" style="mso-line-height-alt:.75pt"><span
style="font-size:1.0pt;color:white"></span><span
style="font-size:1.0pt;font-family:"Aptos",sans-serif;color:white"><o:p></o:p></span></p>
</div>
<p class="MsoNormal"
style="margin-bottom:12.0pt;line-height:normal"><span
style="font-family:"Times New Roman",serif">Hi
Joe,<br>
<br>
Mac here, at Harvard CNS.<br>
<br>
We've been using two Savannahs for coming up on 17 years
here. They are pretty robust and have served us well.<br>
<br>
We also have an Arradiance Gemstar which we've also had for
a number of years.<br>
<br>
If I had to choose between them, I'd go with the Arradiance,
but they are both pretty solid.<br>
<br>
<br>
Mac<br>
<br>
</span><span style="font-size:12.0pt"><o:p></o:p></span></p>
<div>
<p class="MsoNormal" style="margin-bottom:0in"><span
style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman",serif">Mac
Hathaway</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in"><span
style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman",serif">Senior
Process and Systems Engineer</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in"><span
style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman",serif">Harvard
Center for Nanoscale Systems</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in"><span
style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman",serif">11
Oxford St.</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in"><span
style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman",serif">Cambridge,
MA 02138</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in"><span
style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman",serif">617-495-9012</span><o:p></o:p></p>
<p class="MsoNormal"
style="margin-bottom:0in;line-height:normal"><span
style="font-size:12.0pt;font-family:"Times New Roman",serif"> </span><o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"
style="margin-bottom:0in;line-height:normal"><span
style="font-size:12.0pt;font-family:"Aptos",sans-serif">On
9/5/2024 2:57 PM, Joseph Losby wrote:<o:p></o:p></span></p>
</div>
<blockquote style="margin-top:5.0pt;margin-bottom:5.0pt">
<div>
<p class="MsoNormal"
style="margin-bottom:0in;line-height:normal"><span
style="font-family:"Aptos",sans-serif;color:black">Hello,<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"
style="margin-bottom:0in;line-height:normal"><span
style="font-family:"Aptos",sans-serif;color:black"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"
style="margin-bottom:0in;line-height:normal"><span
style="font-family:"Aptos",sans-serif;color:black">Does anyone
have a recommendation for a small footprint ALD system?
We are looking to deposit Al2O3 only. <o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"
style="margin-bottom:0in;line-height:normal"><span
style="font-family:"Aptos",sans-serif;color:black"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"
style="margin-bottom:0in;line-height:normal"><span
style="font-family:"Aptos",sans-serif;color:black">Any
thoughts on the
<a
href="https://urldefense.proofpoint.com/v2/url?u=https-3A__www.veeco.com_products_savannah-2Dthermal-2Dald-2Dfor-2Drd_&d=DwMFAw&c=WO-RGvefibhHBZq3fL85hQ&r=TEMLD8-VsxCGtcVzmvpT5GFNSczskEKHzW6aYlttmIY&m=ODSXhzqSu__Z1FHJg-7TQfKRqo9i0kcS2MgRPzn_eQVgDFmbsKFIXyaFbLJ6BYbr&s=3uO21TSwUeJjjrZLOq5YHs4pDHwCs614Va9VNHaMtRE&e="
title="https://www.veeco.com/products/savannah-thermal-ald-for-rd/"
moz-do-not-send="true">
Veeco Savannah</a>? <o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"
style="margin-bottom:0in;line-height:normal"><span
style="font-family:"Aptos",sans-serif;color:black"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"
style="margin-bottom:0in;line-height:normal"><span
style="font-family:"Aptos",sans-serif;color:black">Cheers,<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"
style="margin-bottom:0in;line-height:normal"><span
style="font-family:"Aptos",sans-serif;color:black">Joe<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"
style="margin-bottom:0in;line-height:normal"><span
style="font-family:"Aptos",sans-serif;color:black"><o:p> </o:p></span></p>
</div>
<div id="Signature">
<div>
<p style="background:white"><b><span
style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#D6001C">Joseph
Losby, PhD</span></b><o:p></o:p></p>
<p style="background:white"><b><span
style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:black;background:white">Manager,
qLab Operations</span></b><o:p></o:p></p>
<p style="background:white"><b><span
style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:black"><a
href="mailto:joseph.losby@ucalgary.ca"
moz-do-not-send="true"
class="moz-txt-link-freetext">joseph.losby@ucalgary.ca</a></span></b><o:p></o:p></p>
<p style="background:white"><o:p> </o:p></p>
</div>
<div>
<p style="background:white"><span style="color:black"><a
href="https://urldefense.proofpoint.com/v2/url?u=https-3A__io.ucalgary.ca_quantum-2Dcity&d=DwMFAw&c=WO-RGvefibhHBZq3fL85hQ&r=TEMLD8-VsxCGtcVzmvpT5GFNSczskEKHzW6aYlttmIY&m=ODSXhzqSu__Z1FHJg-7TQfKRqo9i0kcS2MgRPzn_eQVgDFmbsKFIXyaFbLJ6BYbr&s=cOQPxDtBMiTg5VpQsGKtbLGhlFAunY_obF5KjVOepR8&e="
title=""https://io.ucalgary.ca/quantum-city""
moz-do-not-send="true"><span
style="font-size:9.0pt;font-family:"Segoe UI",sans-serif;text-decoration:none"><img
style="width:2.2291in;height:.743in"
id="imageSelected0_0"
src="cid:part3.uKjcqgX1.o1UkcL9L@savba.sk"
class="" width="214" height="71" border="0"></span></a></span><span
style="font-family:"Calibri",sans-serif;color:black"> </span><o:p></o:p></p>
<p style="background:white"><b><u><span
style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#D6001C;background:white"><a
href="https://urldefense.proofpoint.com/v2/url?u=https-3A__web-2Deur.cvent.com_event_57a389bc-2Df435-2D4ee8-2D86b5-2D0cc1c880b687_regProcessStep1&d=DwMFAw&c=WO-RGvefibhHBZq3fL85hQ&r=TEMLD8-VsxCGtcVzmvpT5GFNSczskEKHzW6aYlttmIY&m=ODSXhzqSu__Z1FHJg-7TQfKRqo9i0kcS2MgRPzn_eQVgDFmbsKFIXyaFbLJ6BYbr&s=kqznWXZVACjHsO5Vns8Vz69gK2uNZo7cROQX7PUWubQ&e="
title="https://web-eur.cvent.com/event/57a389bc-f435-4ee8-86b5-0cc1c880b687/regProcessStep1"
moz-do-not-send="true">Join us October 2-3, 2024
at the Telus Convention Centre</a> for qConnect
2024</span></u></b><o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"
style="margin-bottom:0in;line-height:normal"><span
style="font-size:12.0pt;font-family:"Aptos",sans-serif"><br>
<br>
<o:p></o:p></span></p>
<pre>_______________________________________________<o:p></o:p></pre>
<pre>labnetwork mailing list<o:p></o:p></pre>
<pre><a href="mailto:labnetwork@mtl.mit.edu"
moz-do-not-send="true" class="moz-txt-link-freetext">labnetwork@mtl.mit.edu</a><o:p></o:p></pre>
<pre><a
href="https://urldefense.com/v3/__https:/mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!NcNAlj2UIVkjDA!96fnjGTFDS4hpND2SkCWSxOHJkHcuJVJ91rZN8rNouisi7XloMfftZ68OleweTuCPvctAezsXwaoQYt1qjI6_ixLj-ZeJG8$"
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<fieldset class="moz-mime-attachment-header"></fieldset>
<pre class="moz-quote-pre" wrap="">_______________________________________________
labnetwork mailing list
<a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>
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