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<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US">Hi Joseph,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US">What’s your definition of high quality SiN?<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US">In autumn 2023 we installed an
<a href="https://plasma.oxinst.com/products/pecvd/plasmapro-100-pecvd">OIPT PlasmaPro 100 PECVD</a> (process chamber same as PlasmaPro 80 but with loadlock).<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US">Been a tremendous success (course I’m a little biased(!)). Tool uptime at 98% and we have done almost 500 user jobs.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US">Probably revealing too much but here are our “JWNC approved” processes:<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-fareast-language:EN-US"><img border="0" width="869" height="325" style="width:9.052in;height:3.3854in" id="Picture_x0020_1" src="cid:image005.png@01DB167D.193701C0"></span><span style="font-size:11.0pt;mso-fareast-language:EN-US"><o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:4.0pt"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Cheers,<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:6.0pt"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">James<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-top:2.0pt"><span style="font-size:11.0pt;font-family:"Helvetica",sans-serif;color:#1E2142">Dr. James Paul Grant</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="margin-top:2.0pt"><span style="font-size:11.0pt;font-family:"Helvetica",sans-serif;color:#1E2142">Research Engineer in Plasma Processing</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="margin-top:2.0pt"><b><i><span style="font-size:11.0pt;font-family:"Helvetica",sans-serif;color:#005C8A">Plasma Processing Group</span></i></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="margin-top:2.0pt"><span style="font-size:11.0pt;font-family:"Helvetica",sans-serif;color:#003865"><a href="mailto:james.grant@glasgow.ac.uk">james.grant@glasgow.ac.uk</a></span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
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<img border="0" width="362" height="51" style="width:3.7708in;height:.5312in" id="Picture_x0020_444013495" src="cid:image001.png@01DB167C.91848AE0"><o:p></o:p></span></p>
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</span><span style="font-size:8.0pt;font-family:ArialMT;color:#005C8A;mso-ligatures:standardcontextual"><a href="http://www.jwnc.gla.ac.uk/"><span style="color:#005C8A">www.JWNC.gla.ac.uk</span></a></span><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129;mso-ligatures:standardcontextual"><br>
</span><img border="0" width="10" height="10" style="width:.1041in;height:.1041in" id="Picture_x0020_2" src="cid:image002.png@01DB167C.91848AE0"><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129;mso-ligatures:standardcontextual">
</span><span style="font-size:8.0pt;font-family:ArialMT;color:#005C8A;mso-ligatures:standardcontextual"><a href="http://linkedin.com/company/JWNC"><span style="color:#005C8A">LinkedIn.com/company/JWNC</span></a></span><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129;mso-ligatures:standardcontextual"><br>
</span><img border="0" width="10" height="10" style="width:.1041in;height:.1041in" id="Picture_x0020_3" src="cid:image003.png@01DB167C.91848AE0"><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129;mso-ligatures:standardcontextual">
</span><span style="font-size:8.0pt;font-family:ArialMT;color:#005C8A;mso-ligatures:standardcontextual"><a href="https://twitter.com/uofg_jwnc"><span style="color:#005C8A">@UofG_JWNC</span></a></span><span style="mso-ligatures:standardcontextual"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Joseph Losby<br>
<b>Sent:</b> 04 October 2024 03:00<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Small footprint PECVD for silicon nitride<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;color:black">Hi everyone,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;color:black">We are looking for a smaller footprint PECVD tool strictly for the deposition of high quality SiN films. Would you have any recommendations or other advice? Some options are the Oxford PlasmaPro
80 and Trion Orion systems. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;color:black">Cheers,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;color:black">Joe<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;color:black"><o:p> </o:p></span></p>
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<p style="background:white"><b><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#D6001C">Joseph Losby, PhD</span></b><o:p></o:p></p>
<p style="background:white"><b><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:black;background:white">Manager, qLab Operations</span></b><o:p></o:p></p>
<p style="background:white"><b><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:black"><a href="mailto:joseph.losby@ucalgary.ca">joseph.losby@ucalgary.ca</a></span></b><o:p></o:p></p>
<p style="background:white"><o:p> </o:p></p>
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<p style="background:white"><span style="color:black"><a href="https://io.ucalgary.ca/quantum-city" title=""https://io.ucalgary.ca/quantum-city""><span style="font-size:9.0pt;font-family:"Segoe UI",sans-serif;text-decoration:none"><img border="0" width="214" height="71" style="width:2.2291in;height:.7395in" id="imageSelected0_0" src="cid:image004.jpg@01DB167C.91848AE0"></span></a></span><span style="font-family:"Calibri",sans-serif;color:black"> </span><o:p></o:p></p>
<p style="background:white"><b><u><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#D6001C;background:white"><a href="https://web-eur.cvent.com/event/57a389bc-f435-4ee8-86b5-0cc1c880b687/regProcessStep1" title="https://web-eur.cvent.com/event/57a389bc-f435-4ee8-86b5-0cc1c880b687/regProcessStep1">Join
us October 2-3, 2024 at the Telus Convention Centre</a> for qConnect 2024</span></u></b><o:p></o:p></p>
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