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Corial tool from Plasma Therm.</div>
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Christophe</div>
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<span style="font-family: Arial, sans-serif; font-size: 12pt; color: rgb(31, 73, 125);"><b><i>Christophe Clément</i></b></span></p>
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<span style="font-family: Arial, sans-serif; font-size: 10pt; color: gray;"><b>Professionnel de recherche</b></span></p>
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<span style="font-family: Arial, sans-serif; font-size: 8pt; color: gray;">Laboratoire de microfabrication (LMF)</span></p>
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<span style="font-family: Arial, sans-serif; font-size: 8pt; color: gray;">Groupe des Couches Minces (GCM)
</span><span style="font-family: Arial, sans-serif; font-size: 8pt; color: rgb(5, 99, 193);"><u><a href="http://www.gcmlab.ca/" data-auth="NotApplicable" data-linkindex="0" style="color: rgb(5, 99, 193); margin: 0px;">www.gcmlab.ca</a></u></span></p>
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<span style="font-family: Arial, sans-serif; font-size: 8pt; color: gray;">Ecole Polytechnique de Montréal
<u><a href="http://www.polymtl.ca/" data-auth="NotApplicable" data-linkindex="1" style="color: gray; margin: 0px;">www.polymtl.ca</a></u></span></p>
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<span style="font-family: Arial, sans-serif; font-size: 8pt; color: gray;">Département de génie physique</span></p>
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<span style="font-family: Wingdings; font-size: 10pt; color: rgb(31, 73, 125);">*</span><span style="font-family: Arial, sans-serif; font-size: 8pt; color: rgb(51, 51, 51);"> </span><span style="font-family: Arial, sans-serif; font-size: 8pt; color: gray;">2900
Boulevard Edouard Monpetit</span></p>
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<span style="font-family: Arial, sans-serif; font-size: 8pt; color: gray;">Pavillon JAB<br>
Campus de l'Université de Montréal<br>
Montréal (Québec) H3T 1J4</span></p>
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</span><span style="font-family: Wingdings; font-size: 10pt; color: rgb(31, 73, 125);">8</span><span style="font-family: Arial, sans-serif; font-size: 8pt; color: rgb(51, 51, 51);"> </span><span style="font-family: Arial, sans-serif; font-size: 8pt; color: blue;"><u><a href="mailto:christophe.clement@polymtl.ca" data-linkindex="2" style="color: blue; margin: 0px;">christophe.clement@polymtl.ca</a></u></span></p>
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<span style="font-family: Wingdings; font-size: 10pt; color: rgb(31, 73, 125);">(</span><span style="font-family: Arial, sans-serif; font-size: 8pt; color: rgb(51, 51, 51);"> </span><span style="font-family: Arial, sans-serif; font-size: 8pt; color: gray;">514
340 4711 #2417</span></p>
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<span style="font-family: Arial, sans-serif; font-size: 8pt; color: gray;">Fax : 514 340 5195</span></p>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>De :</b> Joseph Losby <joseph.losby@ucalgary.ca><br>
<b>Envoyé :</b> 3 octobre 2024 21:59<br>
<b>À :</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Objet :</b> [labnetwork] Small footprint PECVD for silicon nitride</font>
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Hi everyone,</div>
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We are looking for a smaller footprint PECVD tool strictly for the deposition of high quality SiN films. Would you have any recommendations or other advice? Some options are the Oxford PlasmaPro 80 and Trion Orion systems. </div>
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Cheers,</div>
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Joe</div>
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<p style="text-align:left; margin:0px"><span style="font-family:Calibri,Calibri_EmbeddedFont,Calibri_MSFontService,sans-serif; font-size:10pt; color:rgb(214,0,28); line-height:17px"><b>Joseph Losby, PhD</b></span></p>
<p style="text-align:left; margin:0px"><span style="font-family:Calibri,Calibri_EmbeddedFont,Calibri_MSFontService,sans-serif; font-size:13.3333px; color:rgb(0,0,0); background-color:rgb(255,255,255); line-height:17px"><b>Manager, qLab Operations</b></span></p>
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<p style="text-align:left; margin:0px"><span style="font-family:"Segoe UI","Segoe UI Web",Arial,Verdana,sans-serif; font-size:12px; color:rgb(0,0,0)"><a href="https://io.ucalgary.ca/quantum-city" title="https://io.ucalgary.ca/quantum-city" style="text-decoration:none; margin-top:0px; margin-bottom:0px"><img id="x_imageSelected0_0" width="214" height="71" style="width:214px; height:71px; margin:0px" data-outlook-trace="F:2|T:2" src="cid:da3c294b-25cf-4201-a7e8-5a7dd00ddd79"></a></span><span style="font-family:Calibri,Calibri_EmbeddedFont,Calibri_MSFontService,sans-serif; font-size:12pt; color:rgb(0,0,0); line-height:19px"> </span></p>
<p style="text-align:left; margin:0px"><span style="font-family:Calibri,sans-serif; font-size:10pt; color:rgb(214,0,28); background-color:white; line-height:19px"><b><u><a href="https://web-eur.cvent.com/event/57a389bc-f435-4ee8-86b5-0cc1c880b687/regProcessStep1" title="https://web-eur.cvent.com/event/57a389bc-f435-4ee8-86b5-0cc1c880b687/regProcessStep1" style="margin-top:0px; margin-bottom:0px">Join
us October 2-3, 2024 at the Telus Convention Centre</a> for qConnect 2024</u></b></span></p>
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