<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=windows-1256">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Aptos;}
@font-face
{font-family:inherit;}
@font-face
{font-family:"Source Sans Pro";}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
font-size:10.0pt;
font-family:"Aptos",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#467886;
text-decoration:underline;}
p.MsoListParagraph, li.MsoListParagraph, div.MsoListParagraph
{mso-style-priority:34;
margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:.5in;
font-size:10.0pt;
font-family:"Aptos",sans-serif;}
span.EmailStyle22
{mso-style-type:personal-compose;
font-family:"Aptos",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;
mso-ligatures:none;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
/* List Definitions */
@list l0
{mso-list-id:510606986;
mso-list-template-ids:-740772500;}
@list l1
{mso-list-id:980505590;
mso-list-type:hybrid;
mso-list-template-ids:661580688 67698703 67698713 67698715 67698703 67698713 67698715 67698703 67698713 67698715;}
@list l1:level1
{mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l1:level2
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l1:level3
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l1:level4
{mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l1:level5
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l1:level6
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l1:level7
{mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l1:level8
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l1:level9
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
ol
{margin-bottom:0in;}
ul
{margin-bottom:0in;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="#467886" vlink="#96607D" style="word-wrap:break-word">
<div class="WordSection1">
<p class="MsoNormal"><span style="font-size:11.0pt">Hi Ben,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">At Ohio State, we have started evaluating SU-8 3000 and another one (need verify with the engineer on the project) for an external customer. So far, they were ok for our needs, which were just sidewall passivation
for devices. I realize that isn’t super helpful, but we are in the same boat as you are, trying to determine which way to go.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">The alternate source that I am aware of is
<a href="https://www.kemlab.com/">KemLab</a> in Mass. Jeremy Golden (Jeremy Golden
<a href="mailto:jgolden@kemlab.com">jgolden@kemlab.com</a>) is the General Manager (and I believe co-founder). He is a resist chemist and was for years at Microchem in charge of SU-8 and PMMA, among other things. We had a lengthy discussion about the options
for SU-8. I highly recommend talking to him about alternatives. He’s great to deal with and explains the chemistry, challenges, etc. We asked Kayaku for information and they just sent me all the data sheets and SDS, with no other information or recommendations.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">The main issue I believe is that none of the alternatives, neither from KemLab nor Kayaku, can cover all thickness ranges with one formulation yet. My guess is that is because of the surfactant, which is also
my guess why the 2000 series is going away. So, unlike the 2000 series there will likely be a different solution for thin, moderate, thick films.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">We only stock 2005 for our users, but we have numerous users that buy their own thicker and thinner SU-8. We also use it both on our contact aligners and our MLA150, so we are interested in how the alternatives
behave at 365-375nm or 405nm. I’d love to hear what others are doing and any data you’d be willing to share.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Best,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Aimee Bross Price<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Manager, Nanofabrication<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">The Ohio State University <o:p>
</o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Nanotech West Lab<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Institute for Materials Research<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">1381 Kinnear Road<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Suite 100<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Columbus, OH 43212<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">614-292-2753<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#C00000;mso-ligatures:standardcontextual"><a href="mailto:Price.798@osu.edu"><span style="color:#C00000">Price.798@osu.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#C00000;mso-ligatures:standardcontextual">Nanotech.osu.edu<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#3F4443;mso-ligatures:standardcontextual">Pronouns: she/her/hers<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual"><o:p> </o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:11.0pt;color:#333F48;border:none windowtext 1.0pt;padding:0in;mso-ligatures:standardcontextual">Conference Chair, 67<sup>th</sup> International Conference on Electron, Ion, Photon Beam Technology
and Nanofabrication (EIPBN)<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:11.0pt;color:#333F48;border:none windowtext 1.0pt;padding:0in;mso-ligatures:standardcontextual">La Jolla, California May 28-31, 2024</span><span style="font-size:11.0pt;color:#222222;mso-ligatures:standardcontextual"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:11.0pt;color:#333F48;border:none windowtext 1.0pt;padding:0in;mso-ligatures:standardcontextual">| </span><span style="font-size:11.0pt;color:#222222;mso-ligatures:standardcontextual"><a href="https://eipbn.org/" target="_blank"><span style="color:#1155CC">https://eipbn.org</span></a> </span><span style="font-size:11.0pt;color:#333F48;border:none windowtext 1.0pt;padding:0in;mso-ligatures:standardcontextual">| </span><span style="font-size:11.0pt;color:#222222;mso-ligatures:standardcontextual"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Schmidt, Benjamin Willis<br>
<b>Sent:</b> Wednesday, October 23, 2024 4:39 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] SU-8 distributors (Kayaku ending SU-8 2000 series early 2025)<o:p></o:p></span></p>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p class="MsoNormal" style="mso-line-height-alt:.75pt"><span style="font-size:1.0pt;color:white">Hello labnetwork, I have two questions: We recently received notice from Kayaku Advanced Materials they would stop distribution of SU-8 2000 series resists in early
2025. Is anyone aware of alternate suppliers? They have recommended new options<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal" style="mso-line-height-alt:.75pt"><span style="font-size:1.0pt;color:white"><o:p></o:p></span></p>
</div>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual">Hello labnetwork,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual">I have two questions:<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual"><o:p> </o:p></span></p>
<ol style="margin-top:0in" start="1" type="1">
<li class="MsoListParagraph" style="margin-left:0in;mso-list:l1 level1 lfo3"><span style="font-size:11.0pt;mso-ligatures:standardcontextual">We recently received notice from Kayaku Advanced Materials they would stop distribution of SU-8 2000 series resists
in early 2025. Is anyone aware of alternate suppliers?<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0in;mso-list:l1 level1 lfo3"><span style="font-size:11.0pt;mso-ligatures:standardcontextual">They have recommended new options based on desired thickness: <10 um (SU-8 3000, SU-8 TF 6000 series), 10 – 50 um (SU-8
3000 series), >50 um (SU-8 XFT75, SU-8 XFT100). Does anyone have experience with these in comparison to the 2000 series? We assume we would need to redo our recipes but hoped to get some general insight from others.<o:p></o:p></span></li></ol>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual">Lastly, I used nanobot.chat to find a previous thread in the labnetwork archives from 2021. Is there a way to reply directly to that thread to keep the conversation together?
I couldn’t find anything so that’s why I’m starting a fresh one now.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual"><a href="https://urldefense.com/v3/__https:/mtl.mit.edu/pipermail/labnetwork/2021-January/004537.html__;!!KGKeukY!07qLgW2jcUyrxsz0UVSyCrIxeV9HIAs6bro2cpqVxwlqGUAXuDJSwvS6Wsb2MKISabPMmpSxulSUJLJTQ5QeYyKRcZPE4znzDA$">https://mtl.mit.edu/pipermail/labnetwork/2021-January/004537.html</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual">Thanks for your help,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual">Ben<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual"><o:p> </o:p></span></p>
<table class="MsoNormalTable" border="0" cellspacing="0" cellpadding="0" width="100%" style="width:100.0%;background:white;border-collapse:collapse">
<tbody>
<tr>
<td width="115" valign="top" style="width:86.25pt;border:none;border-right:solid #D8AB4C 1.0pt;padding:0in 0in 0in 0in">
<p class="MsoNormal" style="line-height:105%"><span style="font-size:10.5pt;line-height:105%;font-family:inherit;color:black"><img border="0" width="100" height="100" style="width:1.0416in;height:1.0416in" id="Picture_x0020_6" src="cid:image001.png@01DB25F7.0C5EA280" alt="Vanderbilt"></span><span style="font-size:12.0pt;line-height:105%;font-family:"Source Sans Pro",sans-serif;color:#222222"><o:p></o:p></span></p>
</td>
<td width="15" style="width:11.25pt;padding:0in 0in 0in 0in">
<p class="MsoNormal" style="line-height:105%"><span style="font-size:12.0pt;line-height:105%;font-family:"Source Sans Pro",sans-serif;color:#222222;mso-ligatures:standardcontextual"> <o:p></o:p></span></p>
</td>
<td valign="top" style="padding:0in 0in 0in 0in">
<p class="MsoNormal" style="line-height:105%"><span style="font-size:13.5pt;line-height:105%;font-family:inherit;color:black;border:none windowtext 1.0pt;padding:0in;mso-ligatures:standardcontextual">Ben W. Schmidt, Ph.D.<o:p></o:p></span></p>
<p class="MsoNormal" style="line-height:105%"><span style="font-size:10.5pt;line-height:105%;font-family:inherit;color:black;mso-ligatures:standardcontextual">Cleanroom Manager<br>
Vanderbilt Institute of Nanoscale Science and Engineering<o:p></o:p></span></p>
<p class="MsoNormal" style="line-height:105%"><span style="font-size:10.5pt;line-height:105%;font-family:inherit;color:black;mso-ligatures:standardcontextual">Vanderbilt University, Nashville, TN
<span style="border:none windowtext 1.0pt;padding:0in"><br>
615.875.9294 | <a href="mailto:ben.schmidt@vanderbilt.edu"><span style="color:#946E24">ben.schmidt@vanderbilt.edu</span></a> | </span></span><span style="font-size:11.0pt;line-height:105%;color:black;mso-ligatures:standardcontextual"><a href="https://urldefense.com/v3/__https:/www.vanderbilt.edu/vinse/__;!!KGKeukY!07qLgW2jcUyrxsz0UVSyCrIxeV9HIAs6bro2cpqVxwlqGUAXuDJSwvS6Wsb2MKISabPMmpSxulSUJLJTQ5QeYyKRcZOiJtPYWA$"><span style="font-size:10.5pt;line-height:105%;font-family:inherit;color:#946E24;border:none windowtext 1.0pt;padding:0in">vu.edu/vinse</span></a></span><span style="font-size:11.0pt;line-height:105%;mso-ligatures:standardcontextual"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:black;mso-ligatures:standardcontextual"><a href="https://urldefense.com/v3/__https:/outlook.office.com/bookwithme/user/4be23d791b054cfab7650ff91ba047e2@Vanderbilt.Edu?anonymous&ep=pcard__;!!KGKeukY!07qLgW2jcUyrxsz0UVSyCrIxeV9HIAs6bro2cpqVxwlqGUAXuDJSwvS6Wsb2MKISabPMmpSxulSUJLJTQ5QeYyKRcZOjLhItGg$"><span style="color:#0563C1">Book
time with Schmidt, Benjamin Willis </span></a></span><span style="font-size:11.0pt;mso-ligatures:standardcontextual"><o:p></o:p></span></p>
<p class="MsoNormal" style="line-height:105%"><span style="font-size:10.5pt;line-height:105%;font-family:inherit;color:black;border:none windowtext 1.0pt;padding:0in;mso-ligatures:standardcontextual"><br>
</span><span style="color:black"><a href="https://urldefense.com/v3/__https:/twitter.com/VanderbiltVinse__;!!KGKeukY!07qLgW2jcUyrxsz0UVSyCrIxeV9HIAs6bro2cpqVxwlqGUAXuDJSwvS6Wsb2MKISabPMmpSxulSUJLJTQ5QeYyKRcZPz5vhK6g$"><span style="font-size:10.5pt;line-height:105%;font-family:inherit;color:blue;border:none windowtext 1.0pt;padding:0in;text-decoration:none"><img border="0" width="24" height="24" style="width:.25in;height:.25in" id="Picture_x0020_5" src="cid:image002.png@01DB25F7.0C5EA280" alt="Twitter"></span></a></span><span style="font-size:10.5pt;line-height:105%;font-family:inherit;color:black;border:none windowtext 1.0pt;padding:0in;mso-ligatures:standardcontextual"> </span><span style="color:black"><a href="https://urldefense.com/v3/__https:/www.facebook.com/VINSE.Vanderbilt__;!!KGKeukY!07qLgW2jcUyrxsz0UVSyCrIxeV9HIAs6bro2cpqVxwlqGUAXuDJSwvS6Wsb2MKISabPMmpSxulSUJLJTQ5QeYyKRcZOtiJgsig$"><span style="font-size:10.5pt;line-height:105%;font-family:inherit;color:blue;border:none windowtext 1.0pt;padding:0in;text-decoration:none"><img border="0" width="24" height="24" style="width:.25in;height:.25in" id="Picture_x0020_4" src="cid:image003.png@01DB25F7.0C5EA280" alt="Facebook"></span></a></span><span style="font-size:10.5pt;line-height:105%;font-family:inherit;color:black;border:none windowtext 1.0pt;padding:0in;mso-ligatures:standardcontextual"> </span><span style="color:black"><a href="https://urldefense.com/v3/__https:/www.instagram.com/vinsetagram/__;!!KGKeukY!07qLgW2jcUyrxsz0UVSyCrIxeV9HIAs6bro2cpqVxwlqGUAXuDJSwvS6Wsb2MKISabPMmpSxulSUJLJTQ5QeYyKRcZPBVtBacw$"><span style="font-size:10.5pt;line-height:105%;font-family:inherit;color:blue;border:none windowtext 1.0pt;padding:0in;text-decoration:none"><img border="0" width="24" height="24" style="width:.25in;height:.25in" id="Picture_x0020_3" src="cid:image004.png@01DB25F7.0C5EA280" alt="Instagram"></span></a></span><span style="font-size:10.5pt;line-height:105%;font-family:inherit;color:black;border:none windowtext 1.0pt;padding:0in;mso-ligatures:standardcontextual"> </span><span style="color:black"><a href="https://urldefense.com/v3/__https:/www.linkedin.com/company/vinse/__;!!KGKeukY!07qLgW2jcUyrxsz0UVSyCrIxeV9HIAs6bro2cpqVxwlqGUAXuDJSwvS6Wsb2MKISabPMmpSxulSUJLJTQ5QeYyKRcZNC3CDVEQ$"><span style="font-size:10.5pt;line-height:105%;font-family:inherit;color:blue;border:none windowtext 1.0pt;padding:0in;text-decoration:none"><img border="0" width="24" height="24" style="width:.25in;height:.25in" id="Picture_x0020_2" src="cid:image005.png@01DB25F7.0C5EA280" alt="LinkedIn"></span></a></span><span style="font-size:10.5pt;line-height:105%;font-family:inherit;color:black;border:none windowtext 1.0pt;padding:0in;mso-ligatures:standardcontextual"> </span><span style="color:black"><a href="https://urldefense.com/v3/__https:/www.youtube.com/playlist?list=PLB1EPeYUwa4mwVbt2dweqUzD8Xy2ZWgeT__;!!KGKeukY!07qLgW2jcUyrxsz0UVSyCrIxeV9HIAs6bro2cpqVxwlqGUAXuDJSwvS6Wsb2MKISabPMmpSxulSUJLJTQ5QeYyKRcZOijLiArA$"><span style="font-size:10.5pt;line-height:105%;font-family:inherit;color:blue;border:none windowtext 1.0pt;padding:0in;text-decoration:none"><img border="0" width="24" height="24" style="width:.25in;height:.25in" id="Picture_x0020_1" src="cid:image006.png@01DB25F7.0C5EA280" alt="YouTube"></span></a></span><span style="font-size:12.0pt;line-height:105%;font-family:"Source Sans Pro",sans-serif;color:#222222;mso-ligatures:standardcontextual"><o:p></o:p></span></p>
</td>
</tr>
</tbody>
</table>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual"><o:p> </o:p></span></p>
</div>
</body>
</html>