<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
font-size:11.0pt;
font-family:"Calibri",sans-serif;
mso-ligatures:standardcontextual;}
span.EmailStyle17
{mso-style-type:personal-compose;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-family:"Calibri",sans-serif;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="#0563C1" vlink="#954F72" style="word-wrap:break-word">
<div class="WordSection1">
<p class="MsoNormal">Hello,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I have a student that is looking to deposit dense amorphous silicon films. Previously he used the CHA at 25 A/s. Unfortunately, my CHA is getting more and more expensive to repair. Does anyone else have any suggestions on alternative methods
or tools? <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p class="MsoNormal" style="background:white"><i><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D;mso-ligatures:none">Best,</span></i><b><span style="color:#13294B;text-transform:uppercase;mso-ligatures:none"><o:p></o:p></span></b></p>
<p class="MsoNormal" style="background:white"><b><span style="color:#13294B;text-transform:uppercase;mso-ligatures:none">Tucson Richelson</span></b><span style="color:black;mso-ligatures:none"><br>
</span><i><span style="color:#13294B;mso-ligatures:none">Cleanroom Engineer</span></i><span style="color:black;mso-ligatures:none"><br>
<br>
</span><span style="color:#13294B;mso-ligatures:none">The Grainger College of Engineering</span><span style="color:black;mso-ligatures:none"><br>
</span><span style="color:#13294B;mso-ligatures:none">Holonyak Micro and Nanotechnology Lab</span><span style="color:black;mso-ligatures:none"><br>
<br>
</span><span style="color:#13294B;mso-ligatures:none">Room 2118 </span><span style="color:black;mso-ligatures:none"><br>
</span><span style="color:#13294B;mso-ligatures:none">208 N Wright St</span><span style="color:black;mso-ligatures:none"><br>
</span><span style="color:#13294B;mso-ligatures:none">Urbana, IL 61801</span><span style="color:black;mso-ligatures:none"><br>
<a href="mailto:tucsonr@illinois.edu"><span style="color:blue">tucsonr@illinois.edu</span></a></span><span style="mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#242424;mso-ligatures:none">Office: +1 (217) 244-5138<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#242424;mso-ligatures:none">Web: <a href="http://mntl.illinois.edu/"><span style="color:#0563C1">http://mntl.illinois.edu/</span></a></span><span style="mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal">Schedule training: <a href="https://book.ms/b/Training2@uillinoisedu.onmicrosoft.com">
<span style="color:blue">https://book.ms/b/Training2@uillinoisedu.onmicrosoft.com</span></a><o:p></o:p></p>
<p class="MsoNormal">Give me feedback: <a href="https://forms.office.com/r/GawstR26J7">
<span style="color:blue">https://forms.office.com/r/GawstR26J7</span></a><o:p></o:p></p>
<p class="MsoNormal" style="background:white"><span style="color:black;mso-ligatures:none"> <br>
</span><span style="color:black"><a href="http://illinois.edu/"><span style="color:black;text-decoration:none"><img border="0" width="180" height="34" style="width:1.875in;height:.3541in" id="Picture_x0020_1" src="cid:image001.png@01DB3452.A4BD8CD0" alt="University of Illinois Urbana-Champaign wordmark"></span></a></span><span style="color:black;mso-ligatures:none"><br>
<br>
</span><i><span style="color:#666666;mso-ligatures:none">Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.</span></i><i><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D;mso-ligatures:none"><o:p></o:p></span></i></p>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
</body>
</html>