<!DOCTYPE html>
<html>
  <head>
    <meta http-equiv="Content-Type" content="text/html; charset=UTF-8">
  </head>
  <body>
    <p>We have a SI500 etcher since late 2020 and use mostly fluorine
      chemistry for diamond and silicon etching, although the machine is
      specified to be Cl-compatible. The machine seems quite robust and
      delivers very consistent performance over time. We had very little
      trouble, even when moving the machine from a preliminary lab
      installation (done by Sentech) to the final operational place,
      where only the input chamber reaches through the clean-room wall.
      Almost all problems we had turned out to be due to our limited
      previous experience (i.e. user errors). The company always
      supported us promptly and efficiently, we have zero complaints
      there. This included "live" and offline remote technical
      assistance as well as recipe support. <br>
    </p>
    <p>HTH, Wolfgang Harneit<br>
    </p>
    <div class="moz-cite-prefix">On 18.11.24 08:38, Golan Tanami wrote:<br>
    </div>
    <blockquote type="cite"
cite="mid:PAXPR10MB506986FDD811DF06F91D3BA6DE272@PAXPR10MB5069.EURPRD10.PROD.OUTLOOK.COM">
      <meta http-equiv="Content-Type" content="text/html; charset=UTF-8">
      <meta name="Generator"
        content="Microsoft Word 15 (filtered medium)">
      <!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]-->
      <style>@font-face
        {font-family:Wingdings;
        panose-1:5 0 0 0 0 0 0 0 0 0;}@font-face
        {font-family:"Cambria Math";
        panose-1:2 4 5 3 5 4 6 3 2 4;}@font-face
        {font-family:Calibri;
        panose-1:2 15 5 2 2 2 4 3 2 4;}p.MsoNormal, li.MsoNormal, div.MsoNormal
        {margin:0cm;
        font-size:11.0pt;
        font-family:"Calibri",sans-serif;
        mso-ligatures:standardcontextual;
        mso-fareast-language:EN-US;}span.EmailStyle17
        {mso-style-type:personal-compose;
        font-family:"Arial",sans-serif;
        color:#0070C0;}.MsoChpDefault
        {mso-style-type:export-only;
        font-size:11.0pt;
        mso-fareast-language:EN-US;}div.WordSection1
        {page:WordSection1;}ol
        {margin-bottom:0cm;}ul
        {margin-bottom:0cm;}</style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
      <div class="WordSection1">
        <p class="MsoNormal"><span lang="EN-US"
style="font-family:"Arial",sans-serif;color:#0070C0">Dear
            Labnetwork,
            <o:p></o:p></span></p>
        <p class="MsoNormal"><span lang="EN-US"
style="font-family:"Arial",sans-serif;color:#0070C0"><o:p> </o:p></span></p>
        <p class="MsoNormal"><span lang="EN-US"
style="font-family:"Arial",sans-serif;color:#0070C0">I was
            wondering if any of you has an experience with these tools
            (SI500 and SI500 D).
            <o:p></o:p></span></p>
        <p class="MsoNormal"><span lang="EN-US"
style="font-family:"Arial",sans-serif;color:#0070C0">More
            specifically, please relate to their long-term reliability
            and their remote-support service in case needed.<o:p></o:p></span></p>
        <p class="MsoNormal"><span lang="EN-US"
style="font-family:"Arial",sans-serif;color:#0070C0"><o:p> </o:p></span></p>
        <p class="MsoNormal"><span lang="EN-US"
style="font-family:"Arial",sans-serif;color:#0070C0">Best
            regards,<o:p></o:p></span></p>
        <p class="MsoNormal"><span lang="EN-US"
style="font-family:"Arial",sans-serif;color:#0070C0"><o:p> </o:p></span></p>
        <p class="MsoNormal"><span lang="EN-US"
style="font-family:"Arial",sans-serif;color:#0070C0">Golan.<o:p></o:p></span></p>
        <p class="MsoNormal"><span lang="EN-US"
style="font-family:"Arial",sans-serif;color:#0070C0"><o:p> </o:p></span></p>
        <p class="MsoNormal"><span lang="EN-US"
style="font-family:"Arial",sans-serif;color:#0070C0"><o:p> </o:p></span></p>
        <p class="MsoNormal"><span lang="EN-US"
style="font-family:"Arial",sans-serif;color:#0070C0"><o:p> </o:p></span></p>
        <table class="MsoNormalTable" border="0" cellspacing="0"
          cellpadding="0" style="border-collapse:collapse">
          <tbody>
            <tr>
              <td width="85" valign="top"
                style="width:63.55pt;padding:0cm 5.4pt 0cm 5.4pt">
                <p class="MsoNormal"><span
style="font-size:12.0pt;color:#1F497D;mso-fareast-language:#2000"><img
                      width="81" height="90"
                      style="width:.8437in;height:.9375in"
                      id="Picture_x0020_3"
                      src="cid:part1.ywO1Zk1g.wDaTwpoI@uos.de" class=""></span><span
                    style="color:#1F497D;mso-fareast-language:#2000"><o:p></o:p></span></p>
              </td>
              <td width="468" valign="top"
                style="width:351.25pt;padding:0cm 5.4pt 0cm 5.4pt">
                <p class="MsoNormal"><b><span
style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-fareast-language:#2000">Golan
                      A. Tanami, PhD</span></b><span
style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-fareast-language:#2000">
                    <b>| </b>Head of the Unit for Nanofabrication (UNF)<o:p></o:p></span></p>
                <p class="MsoNormal"><b><span lang="HE" dir="RTL"
style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black;mso-fareast-language:#2000"><o:p> </o:p></span></b></p>
                <p class="MsoNormal"><b><span
style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-fareast-language:#2000">Center
                      for Nanoscience and Nanotechnology<span lang="HE"
                        dir="RTL"><o:p></o:p></span></span></b></p>
                <p class="MsoNormal"><span
style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-fareast-language:#2000">Edmond
                    J. Safra Campus<span lang="HE" dir="RTL"><br>
                    </span>The Hebrew University of Jerusalem<span
                      lang="HE" dir="RTL"><br>
                    </span>T +972.2.6584179 | M +972.50.9891111</span><span
                    lang="HE" dir="RTL"
style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:#2000"><br>
                  </span><span lang="HE" dir="RTL"
style="font-size:12.0pt;font-family:"Arial",sans-serif;color:#1F497D;mso-fareast-language:#2000"><a
                      href="mailto:golant@savion.huji.ac.il"
                      moz-do-not-send="true"><span lang="EN-US"
                        dir="LTR"
style="font-family:"Calibri",sans-serif;color:blue">golant</span><span
                        lang="EN-US" dir="LTR"
                        style="font-size:10.0pt;color:blue">@savion.huji.ac.il</span></a></span><span
                    lang="EN-US"
style="font-size:12.0pt;font-family:"Arial",sans-serif;color:#1F497D;mso-fareast-language:#2000"><o:p></o:p></span></p>
                <p class="MsoNormal"><span lang="EN-US"
                    style="color:#1F497D;mso-fareast-language:#2000">Website:
                    <a href="https://nano.huji.ac.il/UNF"
                      moz-do-not-send="true"><span style="color:blue">https://nano.huji.ac.il/UNF</span></a><o:p></o:p></span></p>
              </td>
            </tr>
          </tbody>
        </table>
        <p class="MsoNormal"><span lang="EN-US"
            style="color:#0070C0;mso-fareast-language:#2000"><o:p> </o:p></span></p>
        <p class="MsoNormal"><span lang="en-IL"><o:p> </o:p></span></p>
      </div>
      <br>
      <fieldset class="moz-mime-attachment-header"></fieldset>
      <pre wrap="" class="moz-quote-pre">_______________________________________________
labnetwork mailing list
<a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>
<a class="moz-txt-link-freetext" href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a>
</pre>
    </blockquote>
    <pre class="moz-signature" cols="72">-- 
Prof. Dr. Wolfgang Harneit
Universität Osnabrück, Fachbereich Mathematik/Informatik/Physik
Institut für Physik, Barbarastr. 7, 49076 Osnabrück, Germany
<a class="moz-txt-link-abbreviated" href="http://www.quantum-spintronics.de">www.quantum-spintronics.de</a>, <a class="moz-txt-link-abbreviated" href="http://www.molecular-spintronics.de">www.molecular-spintronics.de</a></pre>
  </body>
</html>