<div dir="auto">According to the Lesker table:</div><div dir="auto"><div><a href="https://www.lesker.com/newweb/deposition_materials/materialdepositionchart.cfm?pgid=0&mobile">https://www.lesker.com/newweb/deposition_materials/materialdepositionchart.cfm?pgid=0&mobile</a></div><div dir="auto"><br></div><div><span style="font-family:arial,helvetica,sans-serif;font-size:16px;font-weight:400;letter-spacing:normal;text-align:left;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;text-decoration:none;float:none;display:inline!important;background-color:rgb(220,238,255);color:rgb(33,37,41)"><i style="font-family:arial,helvetica,sans-serif">Alloys with W/Ta/Mo</i></span></div>Which explains the “melted” walls. </div><div dir="auto"><br></div><div dir="auto"><strong style="font-family:arial,helvetica,sans-serif;font-size:16px;color:rgb(33,37,41)">E-Beam Performance:</strong><span style="font-family:arial,helvetica,sans-serif;font-size:16px;float:none;display:inline!important;color:rgb(33,37,41)">Excellent</span><br></div><div dir="auto"><div><strong style="font-weight:bold;font-family:arial,helvetica,sans-serif;font-size:16px;font-style:normal;letter-spacing:normal;text-align:left;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;text-decoration:none;color:rgb(33,37,41)">Liner Material:</strong><span style="font-family:arial,helvetica,sans-serif;font-size:16px;font-style:normal;font-weight:400;letter-spacing:normal;text-align:left;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;text-decoration:none;float:none;display:inline!important;color:rgb(33,37,41)">FABMATE</span><sup style="font-size:12px;line-height:0;vertical-align:baseline;font-family:arial,helvetica,sans-serif;font-style:normal;font-weight:400;letter-spacing:normal;text-align:left;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;text-decoration:none;color:rgb(33,37,41)">®</sup><span style="font-family:arial,helvetica,sans-serif;font-size:16px;font-style:normal;font-weight:400;letter-spacing:normal;text-align:left;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;text-decoration:none;float:none;display:inline!important;color:rgb(33,37,41)">‡, Copper</span></div>(I think Fabmate is graphite if I remember correctly.)</div><div dir="auto"><br></div><div dir="auto">What rates are you evaporating at, and how does the soak time look? </div><div dir="auto">I prefer something like a 1-2min ramp up to temp, and the %power at Soak 1 should be equivalent to something like ~1-2Å/sec. </div><div dir="auto">Then cool down to a power that produces ~0Å/sec (eg. 0.1) but is still hot, before the shutter opens.  </div><div dir="auto">To get the graphite crucible working, Maybe try lower rates eg. 1-2Å/sec.</div><div dir="auto"><br></div><div dir="auto">I hope that helps. </div><div dir="auto"><br clear="all"><div dir="auto"><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><font face="georgia, serif" size="4" style="font-family:georgia,serif;color:rgb(0,0,0)">-- Demis </font><font face="georgia, serif" size="1" style="font-family:georgia,serif;color:rgb(0,0,0)">(<a href="https://wiki.nanotech.ucsb.edu/wiki/Demis_D._John" target="_blank" style="font-family:georgia,serif">contact info</a>)</font><div><i style="font-family:"times new roman",serif">Reminder</i><span style="font-family:"times new roman",serif">: The NanoFab has a </span><a href="https://wiki.nanotech.ucsb.edu/wiki/Frequently_Asked_Questions#Publications_acknowledging_the_Nanofab" style="font-family:"times new roman",serif" target="_blank">publications policy</a><font face="georgia, serif" size="4" style="font-family:georgia,serif;color:rgb(0,0,0)"><br></font></div></div></div></div></div><div><br></div><div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Wed, Dec 4, 2024 at 05:36 shokoofe haghighi <<a href="mailto:shokoofe_haghighi@yahoo.com">shokoofe_haghighi@yahoo.com</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left-width:1px;border-left-style:solid;padding-left:1ex;border-left-color:rgb(204,204,204)"><div><div style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif;font-size:13px"><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif">Hi, hope you are having good days, </div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif"><br></div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif">this is Haghighi, working on metallization by a PVD, using thermal and Ebeam evaporation. </div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif"><br></div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif">I have some issues choosing the right liner for Ni Ebeam evaporating, hope you find time to guide me through it.  </div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif">We have tested graphite, glassy carbon coated graphite, Al2O3, Mo, W and Cu liners so far. </div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif">    Graphite liner just broke after first run from the border line of Ni surface. <span style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif"><span style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif;color:rgb(0,0,0)">Glassy carbon coated graphite was more or less the same,</span></span></div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif">    Al2O3 endured for 4-5 runs before breaking but there were cracks on it,  </div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif">    Mo liner totally melted and some kind of alloy was produced,<br></div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif">    W and Cu endured but their internal walls were some how melted and we can't be sure about pureness of evaporated Ni and final produced thin films.<br></div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif"><br></div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif">do you have any other suggestions? </div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif"><br></div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif"><br></div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif">high voltage: 6.1 KV</div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif">emission current: 3 - 5 A</div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif"><br></div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif">    <br></div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif">Thanks for your time and attention in advance, I hope you kindly find time and consider replying me,  </div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif"><br></div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif">Dr. Haghighi</div><div dir="ltr" style="font-family:"Helvetica Neue",Helvetica,Arial,sans-serif"><br></div></div></div>_______________________________________________<br>
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