<div dir="auto">I found out that we actually evap in the copper Hearth for at least one of our systems - as others mentioned, just melting directly with no liner. <br clear="all"><br clear="all"><div><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><font face="georgia, serif" size="4" style="font-family:georgia,serif;color:rgb(0,0,0)">-- Demis </font><font face="georgia, serif" size="1" style="font-family:georgia,serif;color:rgb(0,0,0)">(<a href="https://wiki.nanotech.ucsb.edu/wiki/Demis_D._John" target="_blank" style="font-family:georgia,serif">contact info</a>)</font><div><i style="font-family:"times new roman",serif">Reminder</i><span style="font-family:"times new roman",serif">: The NanoFab has a </span><a href="https://wiki.nanotech.ucsb.edu/wiki/Frequently_Asked_Questions#Publications_acknowledging_the_Nanofab" style="font-family:"times new roman",serif" target="_blank">publications policy</a><font face="georgia, serif" size="4" style="font-family:georgia,serif;color:rgb(0,0,0)"><br></font></div></div></div></div></div><div><br></div><div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Wed, Dec 4, 2024 at 16:26 Jeff Salzmann <<a href="mailto:jks7@buffalo.edu">jks7@buffalo.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left-width:1px;border-left-style:solid;padding-left:1ex;border-left-color:rgb(204,204,204)">





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<p class="MsoNormal"><span style="font-size:12pt">Haghighi,<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:12pt"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-size:12pt">This is my collection of failed crucibles used to evaporate Ni.
<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:12pt"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-size:12pt">We decided on graphite, because copper was worse. We limit our deposition rate to 0.2</span><span style="font-size:10.5pt;font-family:Arial,sans-serif;background:repeat rgb(248,249,250);color:black">
</span><span style="font-size:12pt">Å/sec to help extend the lifespan of the crucibles. They still fail after 2-3 depositions.<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:12pt"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-size:12pt">Regards,<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:12pt">Jeff<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:12pt"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-size:12pt"><u></u> <u></u></span></p>
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<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">Jeff Salzmann</span><span style="font-size:11pt;color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">Assistant Professor of Research</span><span style="font-size:11pt;color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">Cleanroom Manager, Shared Instrumentation Laboratories</span><span style="font-size:11pt;color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">School of Engineering and Applied Sciences</span><span style="font-size:11pt;color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">University at Buffalo</span><span style="font-size:11pt;color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">114A Davis Hall</span><span style="font-size:11pt;color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">Buffalo, NY 14260</span><span style="font-size:11pt;color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">Tel: 716.645.2584</span><span style="font-size:11pt;color:black"><u></u><u></u></span></p>
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<p class="MsoNormal"><span style="font-size:12pt"><u></u> <u></u></span></p>
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<p class="MsoNormal" style="margin-bottom:12pt"><b><span style="font-size:12pt;color:black">From:
</span></b><span style="font-size:12pt;color:black">labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>> on behalf of Bernhard Reineke <<a href="mailto:bernhard.reineke@uni-paderborn.de" target="_blank">bernhard.reineke@uni-paderborn.de</a>><br>
<b>Date: </b>Wednesday, December 4, 2024 at 11:46<br>
<b>To: </b>shokoofe haghighi <<a href="mailto:shokoofe_haghighi@yahoo.com" target="_blank">shokoofe_haghighi@yahoo.com</a>>, <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a> <<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a>><br>
<b>Subject: </b>Re: [labnetwork] question about Liner for Ni Ebeam Evaporation<u></u><u></u></span></p>
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<span style="font-size:12pt;font-family:wf_segoe-ui_normal,serif;color:black">You don't often get email from <a href="mailto:bernhard.reineke@uni-paderborn.de" target="_blank" style="font-family:wf_segoe-ui_normal,serif">bernhard.reineke@uni-paderborn.de</a>.
<a href="https://aka.ms/LearnAboutSenderIdentification" target="_blank" style="font-family:wf_segoe-ui_normal,serif">Learn why this is important</a>
</span><span style="font-size:12pt;font-family:wf_segoe-ui_normal,serif"><u style="font-family:wf_segoe-ui_normal,serif"></u><u style="font-family:wf_segoe-ui_normal,serif"></u></span></p>
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<p class="MsoNormal"><span style="font-size:12pt">Hi Haghighi,<br>
<br>
we tried this once, same result. All liners will crack. Lesker has some recommendations on Ebeam evaporation of Ni: slow power ramp up and down (works well to prevent cracking for ~2-4 Runs, with fabmate). A Cu liner should work better but we never tested that.<br>
<br>
<a href="https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=ni1" target="_blank">https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=ni1</a><br>
<br>
Best,<br>
<br>
Bernhard <u></u><u></u></span></p>
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<p class="MsoNormal"><b><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">Von:</span></b><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank" style="font-family:Calibri,sans-serif">labnetwork-bounces@mtl.mit.edu</a>> im Auftrag von shokoofe
 haghighi <<a href="mailto:shokoofe_haghighi@yahoo.com" target="_blank" style="font-family:Calibri,sans-serif">shokoofe_haghighi@yahoo.com</a>><br>
<b style="font-family:Calibri,sans-serif">Gesendet:</b> Mittwoch, 4. Dezember 2024 10:35:19<br>
<b style="font-family:Calibri,sans-serif">An:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank" style="font-family:Calibri,sans-serif">labnetwork@mtl.mit.edu</a><br>
<b style="font-family:Calibri,sans-serif">Betreff:</b> [labnetwork] question about Liner for Ni Ebeam Evaporation</span><span style="font-size:12pt">
<u></u><u></u></span></p>
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<p class="MsoNormal"><span style="font-size:12pt"> <u></u><u></u></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue"">Hi, hope you are having good days, <u style="font-family:"Helvetica Neue""></u><u style="font-family:"Helvetica Neue""></u></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue"">this is Haghighi, working on metallization by a PVD, using thermal and Ebeam evaporation. <u style="font-family:"Helvetica Neue""></u><u style="font-family:"Helvetica Neue""></u></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue"">I have some issues choosing the right liner for Ni Ebeam evaporating, hope you find time to guide me through it.  <u style="font-family:"Helvetica Neue""></u><u style="font-family:"Helvetica Neue""></u></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue"">We have tested graphite, glassy carbon coated graphite, Al2O3, Mo, W and Cu liners so far. <u style="font-family:"Helvetica Neue""></u><u style="font-family:"Helvetica Neue""></u></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue"">    Graphite liner just broke after first run from the border line of Ni surface. <span style="font-family:"Helvetica Neue";color:black">Glassy carbon coated graphite was more or less the same,</span><u style="font-family:"Helvetica Neue""></u><u style="font-family:"Helvetica Neue""></u></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue"">    Al2O3 endured for 4-5 runs before breaking but there were cracks on it,  <u style="font-family:"Helvetica Neue""></u><u style="font-family:"Helvetica Neue""></u></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue"">    Mo liner totally melted and some kind of alloy was produced,<u style="font-family:"Helvetica Neue""></u><u style="font-family:"Helvetica Neue""></u></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue"">    W and Cu endured but their internal walls were some how melted and we can't be sure about pureness of evaporated Ni and final produced thin films.<u style="font-family:"Helvetica Neue""></u><u style="font-family:"Helvetica Neue""></u></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue"">do you have any other suggestions? <u style="font-family:"Helvetica Neue""></u><u style="font-family:"Helvetica Neue""></u></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue""><u style="font-family:"Helvetica Neue""></u> <u style="font-family:"Helvetica Neue""></u></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue"">high voltage: 6.1 KV<u style="font-family:"Helvetica Neue""></u><u style="font-family:"Helvetica Neue""></u></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue"">emission current: 3 - 5 A<u style="font-family:"Helvetica Neue""></u><u style="font-family:"Helvetica Neue""></u></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue"">    <u style="font-family:"Helvetica Neue""></u><u style="font-family:"Helvetica Neue""></u></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue"">Thanks for your time and attention in advance, I hope you kindly find time and consider replying me,  <u style="font-family:"Helvetica Neue""></u><u style="font-family:"Helvetica Neue""></u></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue"">Dr. Haghighi<u style="font-family:"Helvetica Neue""></u><u style="font-family:"Helvetica Neue""></u></span></p>
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