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Hi Haghighi,<br>
<br>
we tried this once, same result. All liners will crack. Lesker has some recommendations on Ebeam evaporation of Ni: slow power ramp up and down (works well to prevent cracking for ~2-4 Runs, with fabmate). A Cu liner should work better but we never tested that.<br>
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https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=ni1<br>
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Best,<br>
<br>
Bernhard
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>Von:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> im Auftrag von shokoofe haghighi <shokoofe_haghighi@yahoo.com><br>
<b>Gesendet:</b> Mittwoch, 4. Dezember 2024 10:35:19<br>
<b>An:</b> labnetwork@mtl.mit.edu<br>
<b>Betreff:</b> [labnetwork] question about Liner for Ni Ebeam Evaporation</font>
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<div dir="ltr" data-setdir="false">Hi, hope you are having good days, </div>
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<div dir="ltr" data-setdir="false">this is Haghighi, working on metallization by a PVD, using thermal and Ebeam evaporation. </div>
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<div dir="ltr" data-setdir="false">I have some issues choosing the right liner for Ni Ebeam evaporating, hope you find time to guide me through it. </div>
<div dir="ltr" data-setdir="false">We have tested graphite, glassy carbon coated graphite, Al2O3, Mo, W and Cu liners so far. </div>
<div dir="ltr" data-setdir="false"> Graphite liner just broke after first run from the border line of Ni surface. <span><span style="color: rgb(0, 0, 0); font-family: "Helvetica Neue", Helvetica, Arial, sans-serif;">Glassy carbon coated graphite was more
or less the same,</span></span></div>
<div dir="ltr" data-setdir="false"> Al2O3 endured for 4-5 runs before breaking but there were cracks on it, </div>
<div dir="ltr" data-setdir="false"> Mo liner totally melted and some kind of alloy was produced,<br>
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<div dir="ltr" data-setdir="false"> W and Cu endured but their internal walls were some how melted and we can't be sure about pureness of evaporated Ni and final produced thin films.<br>
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<div dir="ltr" data-setdir="false">do you have any other suggestions? </div>
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<div dir="ltr" data-setdir="false">high voltage: 6.1 KV</div>
<div dir="ltr" data-setdir="false">emission current: 3 - 5 A</div>
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<div dir="ltr" data-setdir="false">Thanks for your time and attention in advance, I hope you kindly find time and consider replying me, </div>
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<div dir="ltr" data-setdir="false">Dr. Haghighi</div>
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