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<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Hello Chiara,
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">At DTU Nanolab we have the following DCS setup:<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-18.0pt;mso-list:l1 level1 lfo2"><![if !supportLists]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><span style="mso-list:Ignore">1.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Distance Between Gas Cabinet and Instrument:
<o:p></o:p></span></p>
<p class="MsoListParagraph" style="margin-left:72.0pt;text-indent:-18.0pt;mso-list:l1 level2 lfo2">
<![if !supportLists]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><span style="mso-list:Ignore">a.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Ca. 50 meters from gas bunker to tool. Unpractical, but a safety requirement.<o:p></o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-18.0pt;mso-list:l1 level1 lfo2"><![if !supportLists]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><span style="mso-list:Ignore">2.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Gas Line Configuration:
<o:p></o:p></span></p>
<p class="MsoListParagraph" style="margin-left:72.0pt;text-indent:-18.0pt;mso-list:l1 level2 lfo2">
<![if !supportLists]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><span style="mso-list:Ignore">a.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">The gas is run in double walled tubes. The outer tube’s pressure is monitored.<o:p></o:p></span></p>
<p class="MsoListParagraph" style="margin-left:72.0pt;text-indent:-18.0pt;mso-list:l1 level2 lfo2">
<![if !supportLists]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><span style="mso-list:Ignore">b.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">All pipes are orbital welded ASTM 316L steel, electro polished to a roughness < 0.25µm (10 µInches). This is
a specialist job you can’t trust your local plumber to perform. <o:p></o:p></span></p>
<p class="MsoListParagraph" style="margin-left:72.0pt;text-indent:-18.0pt;mso-list:l1 level2 lfo2">
<![if !supportLists]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><span style="mso-list:Ignore">c.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Bottle and lines are heated and insulated. Our gas pipes run through low temperature environments, ca. 0-5 deg
C (32 to 41 deg F) in the winter. This is a challenge. Loss of heating causes gas condensation, which can be tricky to get rid of.
<o:p></o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-18.0pt;mso-list:l1 level1 lfo2"><![if !supportLists]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><span style="mso-list:Ignore">3.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Issues related to the DCS gas line:
<o:p></o:p></span></p>
<p class="MsoListParagraph" style="margin-left:72.0pt;text-indent:-18.0pt;mso-list:l1 level2 lfo2">
<![if !supportLists]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><span style="mso-list:Ignore">a.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Proper leak testing of the gas line is vital. Make sure that there are no leaks, as they can ruin the gas line
and harm people.<o:p></o:p></span></p>
<p class="MsoListParagraph" style="margin-left:72.0pt;text-indent:-18.0pt;mso-list:l1 level2 lfo2">
<![if !supportLists]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><span style="mso-list:Ignore">b.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Perform 80-120 of pump/purges with a dry inert gas (nitrogen) before introducing the DCS in order to prevent
reaction with trace moist and oxygen. <o:p></o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-18.0pt;mso-list:l1 level1 lfo2"><![if !supportLists]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><span style="mso-list:Ignore">4.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Safety Measures:<o:p></o:p></span></p>
<p class="MsoListParagraph" style="margin-left:72.0pt;text-indent:-18.0pt;mso-list:l1 level2 lfo2">
<![if !supportLists]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><span style="mso-list:Ignore">a.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Gas monitoring at the bottle cabinet and at points of use (LPCVD furnaces).
<o:p></o:p></span></p>
<p class="MsoListParagraph" style="margin-left:72.0pt;text-indent:-18.0pt;mso-list:l1 level2 lfo2">
<![if !supportLists]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><span style="mso-list:Ignore">b.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">All non-welded fittings should be in ventilated enclosures with gas monitoring.
<o:p></o:p></span></p>
<p class="MsoListParagraph" style="margin-left:72.0pt;text-indent:-18.0pt;mso-list:l1 level2 lfo2">
<![if !supportLists]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><span style="mso-list:Ignore">c.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">In case of detected gas or pressure change in the outer pipe wall, the gas alarm system automatically shuts
down bottle and lines and evacuates the affected area by an audible alarm. <o:p>
</o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Hope this was helpful.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Best regards,
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Leif<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="line-height:120%"><b><span style="font-family:"Arial",sans-serif;color:black">Leif Steen Johansen</span></b><b><span style="font-family:"Arial",sans-serif;color:black"><o:p></o:p></span></b></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span lang="EN-US" style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black">Head of Operations, Ph.D.<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span lang="EN-US" style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black"> <o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black">Dir. +45 45 25 57 13<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black">Mob. +45 25 34 89 92<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black"><a href="mailto:lesjo@dtu.dk"><span style="color:black">lesjo@dtu.dk</span></a>
<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black">Ørsteds Plads, Byg. 347<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black">Building 347<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black">2800 Lyngby<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black"><a href="https://www.dtu.dk/english"><span style="color:black">www.dtu.dk/english</span></a>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Chiara Gionco<br>
<b>Sent:</b> 26. november 2024 14:39<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Management and handling of Dichloro Silane<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<div>
<p><span style="color:black">Dear labnetwork,<o:p></o:p></span></p>
<p><span style="color:black">I'm Chiara Gionco, and I am a researcher at INRiM, the Italian Institute of Metrology and I'm part of the Managing Committee of our new Cleanroom facility, shared with Politecnico di Torino and Università degli Studi di Torino.<o:p></o:p></span></p>
<p><span style="color:black">We are in the process of acquiring gas facilities to support an LPCVD system (Tystar MiniTytan 1600) in our cleanroom, and I would greatly appreciate any feedback regarding the management and handling of Dichloro Silane.<o:p></o:p></span></p>
<p><span style="color:black">To ensure the best practices for our installation, I would like to inquire about how DCS is handled at your institute. Specifically, I am interested in the following:<o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;margin-left:47.25pt;text-indent:-18.0pt;mso-list:l0 level1 lfo1">
<![if !supportLists]><span style="color:black"><span style="mso-list:Ignore">1.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><strong><span style="color:black">Distance Between Gas Cabinet and Instrument:</span></strong><span style="color:black"> How far is the gas cabinet located from the LPCVD system?<o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;margin-left:47.25pt;text-indent:-18.0pt;mso-list:l0 level1 lfo1">
<![if !supportLists]><span style="color:black"><span style="mso-list:Ignore">2.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><strong><span style="color:black">Gas Line Configuration:</span></strong><span style="color:black"> Is the gas line and the bottle heated, and if so, what specifications are followed for heating it?<o:p></o:p></span></p>
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<![if !supportLists]><span style="color:black"><span style="mso-list:Ignore">3.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><b><span style="color:black">Issues related to the DCS gas line</span></b><span style="color:black">: Are there any common issues related to the DCS gas line after installation? What are your solutions?<o:p></o:p></span></p>
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</span></span></span><![endif]><strong><span style="color:black">Safety Measures:</span></strong><span style="color:black"> Are there any additional precautions or setups you would recommend to ensure safe and efficient operation?<o:p></o:p></span></p>
<p><span style="color:black">Thank you very much for your time and assistance. <o:p></o:p></span></p>
<p><span style="color:black">Best regards,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#888888">Chiara Gionco, Ph.D.</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="color:#888888">Researcher<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#888888">011-3919 214<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#888888">Italian National Metrology Institute (INRiM)<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#888888">Strada delle Cacce 91, 10135, Torino (Italy)<o:p></o:p></span></p>
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