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<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Hi Chiara.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Our gas cabinet is located inside the lab service bay right beside the LPCVD system.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">The cylinder is a UF size (~ 6”x19”).<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">This was setup installed in 1993, not sure if regulations have changed since then.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Rob<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> Chiara Gionco <c.gionco@inrim.it>
<br>
<b>Sent:</b> December 5, 2024 3:53 AM<br>
<b>To:</b> Robert Vandusen <RobertVandusen@cunet.carleton.ca><br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Management and handling of Dichloro Silane<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:11.0pt"><span style="font-size:10.0pt;color:black">[External Email]<o:p></o:p></span></p>
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<p class="MsoNormal">Hi Robert, <o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">that is indeed helpful. Can I ask you if the cabinet is inside or outside the building?<o:p></o:p></p>
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<p class="MsoNormal">Thanks,<o:p></o:p></p>
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<p class="MsoNormal"><span style="color:#888888">Chiara Gionco, Ph.D.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#888888">Researcher<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#888888">011-3919 214<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#888888">Italian National Metrology Institute (INRiM)<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#888888">Strada delle Cacce 91, 10135, Torino (Italy)<o:p></o:p></span></p>
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<p class="MsoNormal">On Tue, 26 Nov 2024 at 18:39, Robert Vandusen <<a href="mailto:RobertVandusen@cunet.carleton.ca">RobertVandusen@cunet.carleton.ca</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Hi Chiara.<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">At our facility we use DCS for our LPCVD silicon nitride process.<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Our gas cabinet is ~ 15 feet away from the system. We use unheated ¼” OD (1/8 ID) SS gas lines to feed the Nitride tube nupro valve which is on the bottle side of the MFC.<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">We set the pressure at the bottle regulator to 5-7 psi (there is a note that DCS liquifies at 9.6psi).<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Also since we do not use our LPCVD nitride process every day (maybe once or twice a week) we purge out the DCS MFC after every run and flow N2 through it while in standby mode.<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">This helps to prolong the MFC life. The N2 is pumped out and the MFC is leakchecked before introducing the DCS for the next run.<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Before this procedure we were going through several MFCs/ year.<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Hope this helps.<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif"> </span><span style="font-size:10.0pt;font-family:"Helvetica",sans-serif"> Robert Vandusen<br>
Microfabrication Cleanlab Facility Manager<br>
Electronics Department<br>
Carleton University<br>
room: 4184 Mackenzie Building<br>
613-520-2600 ext 5761<br>
<a href="mailto:Robert_vandusen@cunet.carleton.ca" target="_blank"><span style="color:purple">Robert_vandusen@cunet.carleton.ca</span></a></span><o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Chiara Gionco<br>
<b>Sent:</b> November 26, 2024 8:39 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Management and handling of Dichloro Silane</span><o:p></o:p></p>
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<span style="font-size:10.0pt;color:black">[External Email]</span><o:p></o:p></p>
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<p><span style="color:black">Dear labnetwork,</span><o:p></o:p></p>
<p><span style="color:black">I'm Chiara Gionco, and I am a researcher at INRiM, the Italian Institute of Metrology and I'm part of the Managing Committee of our new Cleanroom facility, shared with Politecnico di Torino and Università degli Studi di Torino.</span><o:p></o:p></p>
<p><span style="color:black">We are in the process of acquiring gas facilities to support an LPCVD system (Tystar MiniTytan 1600) in our cleanroom, and I would greatly appreciate any feedback regarding the management and handling of Dichloro Silane.</span><o:p></o:p></p>
<p><span style="color:black">To ensure the best practices for our installation, I would like to inquire about how DCS is handled at your institute. Specifically, I am interested in the following:</span><o:p></o:p></p>
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<span style="color:black">1.</span><span style="font-size:7.0pt;font-family:"Times New Roman",serif;color:black">
</span><strong><span style="font-family:"Calibri",sans-serif;color:black">Distance Between Gas Cabinet and Instrument:</span></strong><span style="color:black"> How far is the gas cabinet located from the LPCVD system?</span><o:p></o:p></p>
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<span style="color:black">2.</span><span style="font-size:7.0pt;font-family:"Times New Roman",serif;color:black">
</span><strong><span style="font-family:"Calibri",sans-serif;color:black">Gas Line Configuration:</span></strong><span style="color:black"> Is the gas line and the bottle heated, and if so, what specifications are followed for heating it?</span><o:p></o:p></p>
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<span style="color:black">3.</span><span style="font-size:7.0pt;font-family:"Times New Roman",serif;color:black">
</span><b><span style="color:black">Issues related to the DCS gas line</span></b><span style="color:black">: Are there any common issues related to the DCS gas line after installation? What are your solutions?</span><o:p></o:p></p>
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<span style="color:black">4.</span><span style="font-size:7.0pt;font-family:"Times New Roman",serif;color:black">
</span><strong><span style="font-family:"Calibri",sans-serif;color:black">Safety Measures:</span></strong><span style="color:black"> Are there any additional precautions or setups you would recommend to ensure safe and efficient operation?</span><o:p></o:p></p>
<p><span style="color:black">Thank you very much for your time and assistance. </span><o:p></o:p></p>
<p><span style="color:black">Best regards,</span><o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:#888888">Chiara Gionco, Ph.D.</span><o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:#888888">011-3919 214</span><o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:#888888">Italian National Metrology Institute (INRiM)</span><o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:#888888">Strada delle Cacce 91, 10135, Torino (Italy)</span><o:p></o:p></p>
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