<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=utf-8">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
font-size:12.0pt;
font-family:"Times New Roman",serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#0563C1;
text-decoration:underline;}
p.MsoListParagraph, li.MsoListParagraph, div.MsoListParagraph
{mso-style-priority:34;
margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:.5in;
font-size:12.0pt;
font-family:"Times New Roman",serif;}
span.EmailStyle23
{mso-style-type:personal-reply;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
/* List Definitions */
@list l0
{mso-list-id:733115789;
mso-list-template-ids:-333279496;}
@list l0:level1
{mso-level-tab-stop:.5in;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level2
{mso-level-tab-stop:1.0in;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level3
{mso-level-tab-stop:1.5in;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level4
{mso-level-tab-stop:2.0in;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level5
{mso-level-tab-stop:2.5in;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level6
{mso-level-tab-stop:3.0in;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level7
{mso-level-tab-stop:3.5in;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level8
{mso-level-tab-stop:4.0in;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level9
{mso-level-tab-stop:4.5in;
mso-level-number-position:left;
text-indent:-.25in;}
@list l1
{mso-list-id:1734356133;
mso-list-type:hybrid;
mso-list-template-ids:-626459312 67502095 67502105 67502107 67502095 67502105 67502107 67502095 67502105 67502107;}
@list l1:level1
{mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l1:level2
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l1:level3
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l1:level4
{mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l1:level5
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l1:level6
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l1:level7
{mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l1:level8
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l1:level9
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
ol
{margin-bottom:0in;}
ul
{margin-bottom:0in;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="#0563C1" vlink="#954F72" style="word-wrap:break-word">
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">For case with low atmospheric gasses, you may want to investigate sub-atmospheric regulators. The use of those regulators in your gas cabinets may help with the delivery of
low-pressure gasses that tend to condense while being delivered to the process. At worst, a sub atmospheric regulator may add some stability when low vapor pressure gasses are being used in a process. HMNTL has a bottle heater that we are no longer using
from our old PLCVD. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#002060;text-transform:uppercase">Deon D. Collins<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#002060;text-transform:uppercase"><o:p> </o:p></span></b></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#002060"><br>
<i>Director of Facilities<o:p></o:p></i></span></p>
<p class="MsoNormal"><i><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#002060">The Grainger College Of Engineering UIUC</span></i><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#002060"><br>
</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#002060">Holonyak Micro & Nanotechnology Lab</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><br>
</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#13294B">208 N Wright St Rm. 1114 | MC-249</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><br>
</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#13294B">Urbana, IL 61801</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><br>
</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#13294B">217-300-7531 |
</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><a href="mailto:deonc69@illinois.edu">deonc69@illinois.edu</a><br>
<br>
<br>
</span><a href="http://illinois.edu/"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;text-decoration:none"><img border="0" width="119" height="21" style="width:1.2395in;height:.2187in" id="Picture_x0020_1" src="cid:image001.png@01DB47D5.97D16410"></span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><br>
<br>
</span><i><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#666666">Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject
to public disclosure. </span></i><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#002060"><o:p></o:p></span></p>
<p class="MsoNormal"><u><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p><span style="text-decoration:none"> </span></o:p></span></u></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#A3238B">Life begins at the end of your comfort zone.
<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#A3238B"> Propeck Amanda<o:p></o:p></span></b></p>
</div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
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<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Leif Steen Johansen<br>
<b>Sent:</b> Thursday, December 5, 2024 8:20 AM<br>
<b>To:</b> Chiara Gionco <c.gionco@inrim.it>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Management and handling of Dichloro Silane<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Hello Chiara,
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">At DTU Nanolab we have the following DCS setup:<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<ol style="margin-top:0in" start="1" type="1">
<li class="MsoListParagraph" style="color:#1F497D;margin-left:0in;mso-list:l1 level1 lfo2">
<span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Distance Between Gas Cabinet and Instrument:
<o:p></o:p></span></li><ol style="margin-top:0in" start="1" type="a">
<li class="MsoListParagraph" style="color:#1F497D;margin-left:0in;mso-list:l1 level2 lfo2">
<span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Ca. 50 meters from gas bunker to tool. Unpractical, but a safety requirement.<o:p></o:p></span></li></ol>
<li class="MsoListParagraph" style="color:#1F497D;margin-left:0in;mso-list:l1 level1 lfo2">
<span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Gas Line Configuration:
<o:p></o:p></span></li><ol style="margin-top:0in" start="1" type="a">
<li class="MsoListParagraph" style="color:#1F497D;margin-left:0in;mso-list:l1 level2 lfo2">
<span style="font-size:11.0pt;font-family:"Calibri",sans-serif">The gas is run in double walled tubes. The outer tube’s pressure is monitored.<o:p></o:p></span></li><li class="MsoListParagraph" style="color:#1F497D;margin-left:0in;mso-list:l1 level2 lfo2">
<span style="font-size:11.0pt;font-family:"Calibri",sans-serif">All pipes are orbital welded ASTM 316L steel, electro polished to a roughness < 0.25µm (10 µInches). This is a specialist job you can’t trust your local plumber to perform.
<o:p></o:p></span></li><li class="MsoListParagraph" style="color:#1F497D;margin-left:0in;mso-list:l1 level2 lfo2">
<span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Bottle and lines are heated and insulated. Our gas pipes run through low temperature environments, ca. 0-5 deg C (32 to 41 deg F) in the winter. This is a challenge. Loss of heating causes gas
condensation, which can be tricky to get rid of. <o:p></o:p></span></li></ol>
<li class="MsoListParagraph" style="color:#1F497D;margin-left:0in;mso-list:l1 level1 lfo2">
<span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Issues related to the DCS gas line:
<o:p></o:p></span></li><ol style="margin-top:0in" start="1" type="a">
<li class="MsoListParagraph" style="color:#1F497D;margin-left:0in;mso-list:l1 level2 lfo2">
<span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Proper leak testing of the gas line is vital. Make sure that there are no leaks, as they can ruin the gas line and harm people.<o:p></o:p></span></li><li class="MsoListParagraph" style="color:#1F497D;margin-left:0in;mso-list:l1 level2 lfo2">
<span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Perform 80-120 of pump/purges with a dry inert gas (nitrogen) before introducing the DCS in order to prevent reaction with trace moist and oxygen.
<o:p></o:p></span></li></ol>
<li class="MsoListParagraph" style="color:#1F497D;margin-left:0in;mso-list:l1 level1 lfo2">
<span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Safety Measures:<o:p></o:p></span></li><ol style="margin-top:0in" start="1" type="a">
<li class="MsoListParagraph" style="color:#1F497D;margin-left:0in;mso-list:l1 level2 lfo2">
<span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Gas monitoring at the bottle cabinet and at points of use (LPCVD furnaces).
<o:p></o:p></span></li><li class="MsoListParagraph" style="color:#1F497D;margin-left:0in;mso-list:l1 level2 lfo2">
<span style="font-size:11.0pt;font-family:"Calibri",sans-serif">All non-welded fittings should be in ventilated enclosures with gas monitoring.
<o:p></o:p></span></li><li class="MsoListParagraph" style="color:#1F497D;margin-left:0in;mso-list:l1 level2 lfo2">
<span style="font-size:11.0pt;font-family:"Calibri",sans-serif">In case of detected gas or pressure change in the outer pipe wall, the gas alarm system automatically shuts down bottle and lines and evacuates the affected area by an audible alarm.
<o:p></o:p></span></li></ol>
</ol>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Hope this was helpful.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Best regards,
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Leif<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="DA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="line-height:120%"><b><span style="font-family:"Arial",sans-serif;color:black">Leif Steen Johansen<o:p></o:p></span></b></p>
</td>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black">Head of Operations, Ph.D.<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black"> <o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black">Dir. +45 45 25 57 13<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black">Mob. +45 25 34 89 92<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black"><a href="mailto:lesjo@dtu.dk"><span style="color:black">lesjo@dtu.dk</span></a>
<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black">Ørsteds Plads, Byg. 347<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black">Building 347<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black">2800 Lyngby<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black"><a href="https://urldefense.com/v3/__https:/www.dtu.dk/english__;!!DZ3fjg!5LSGZQEEKYamJpOqr51gKSSKDSu8y8ij0sfiN8FVg4Dyb5LImec-65pYSj8sp76Rxz-5uEStkmZXUgcd9A$"><span style="color:black">www.dtu.dk/english</span></a>
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="DA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Chiara Gionco<br>
<b>Sent:</b> 26. november 2024 14:39<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Management and handling of Dichloro Silane<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p><span lang="DA" style="color:black">Dear labnetwork,<o:p></o:p></span></p>
<p><span lang="DA" style="color:black">I'm Chiara Gionco, and I am a researcher at INRiM, the Italian Institute of Metrology and I'm part of the Managing Committee of our new Cleanroom facility, shared with Politecnico di Torino and Università degli Studi di
Torino.<o:p></o:p></span></p>
<p><span lang="DA" style="color:black">We are in the process of acquiring gas facilities to support an LPCVD system (Tystar MiniTytan 1600) in our cleanroom, and I would greatly appreciate any feedback regarding the management and handling of Dichloro Silane.<o:p></o:p></span></p>
<p><span lang="DA" style="color:black">To ensure the best practices for our installation, I would like to inquire about how DCS is handled at your institute. Specifically, I am interested in the following:<o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;margin-left:47.25pt;text-indent:-.25in;mso-list:l0 level1 lfo4">
<![if !supportLists]><span lang="DA" style="color:black"><span style="mso-list:Ignore">1.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><strong><span lang="DA" style="color:black">Distance Between Gas Cabinet and Instrument:</span></strong><span lang="DA" style="color:black"> How far is the gas cabinet located from the LPCVD system?<o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;margin-left:47.25pt;text-indent:-.25in;mso-list:l0 level1 lfo4">
<![if !supportLists]><span lang="DA" style="color:black"><span style="mso-list:Ignore">2.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><strong><span lang="DA" style="color:black">Gas Line Configuration:</span></strong><span lang="DA" style="color:black"> Is the gas line and the bottle heated, and if so, what specifications are followed for heating it?<o:p></o:p></span></p>
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<![if !supportLists]><span lang="DA" style="color:black"><span style="mso-list:Ignore">3.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><b><span lang="DA" style="color:black">Issues related to the DCS gas line</span></b><span lang="DA" style="color:black">: Are there any common issues related to the DCS gas line after installation? What are your solutions?<o:p></o:p></span></p>
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<![if !supportLists]><span lang="DA" style="color:black"><span style="mso-list:Ignore">4.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><strong><span lang="DA" style="color:black">Safety Measures:</span></strong><span lang="DA" style="color:black"> Are there any additional precautions or setups you would recommend to ensure safe and efficient operation?<o:p></o:p></span></p>
<p><span lang="DA" style="color:black">Thank you very much for your time and assistance. <o:p></o:p></span></p>
<p><span lang="DA" style="color:black">Best regards,<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="DA" style="color:#888888">Chiara Gionco, Ph.D.</span><span lang="DA"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="DA" style="color:#888888">Researcher<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="DA" style="color:#888888">011-3919 214<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="DA" style="color:#888888">Italian National Metrology Institute (INRiM)<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="DA" style="color:#888888">Strada delle Cacce 91, 10135, Torino (Italy)<o:p></o:p></span></p>
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