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</o:shapelayout></xml><![endif]--></head><body lang=EN-US link="#0563C1" vlink="#954F72"><div class=WordSection1><p class=MsoNormal>Russ,<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Regarding photoresists, most DNQ-Novolak materials age well. However, nLOF is chemically amplified and does not unless refrigerated. If the AZ1505 is the reversing type, that capability also deteriorates. SU-8 is likely not good. 300MIF and KWIK Strip should be OK, and SU-8 developer is PGME/PGMEA so should be fine.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><div><p class=MsoNormal>Garry J. Bordonaro<o:p></o:p></p><p class=MsoNormal>Microlithographic Engineer<o:p></o:p></p><p class=MsoNormal>Cornell NanoScale Facility<o:p></o:p></p><p class=MsoNormal>250 Duffield Hall<o:p></o:p></p><p class=MsoNormal>343 Campus Road<o:p></o:p></p><p class=MsoNormal>Ithaca NY 14853-2700<o:p></o:p></p><p class=MsoNormal>(607) 254-4936<o:p></o:p></p><p class=MsoNormal><a href="mailto:bordonaro@cnf.cornell.edu"><span style='color:blue'>bordonaro@cnf.cornell.edu</span></a><o:p></o:p></p><p class=MsoNormal><a href="http://www.cnf.cornell.edu/"><span style='color:blue'>http://www.cnf.cornell.edu/</span></a><o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Please acknowledge CNF in your publications:<o:p></o:p></p><p class=MsoNormal>"This work was performed in part at the Cornell NanoScale Science & Technology Facility (CNF), a member of the National Nanotechnology Coordinated Infrastructure (NNCI), which is supported by the National Science Foundation (Grant NNCI-2025233)."<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><o:p> </o:p></p></div><p class=MsoNormal><o:p> </o:p></p><div><div style='border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>On Behalf Of </b>Russ Renzas<br><b>Sent:</b> Tuesday, December 10, 2024 3:36 PM<br><b>To:</b> labnetwork@mtl.mit.edu<br><b>Subject:</b> [labnetwork] Academic fab chemical starter recs<o:p></o:p></p></div></div><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Setting up the fab at University of Nevada, Reno – looking for recs on a relatively generic “starter kit” of chemicals and photoresists, etc. Also, any recommendations on US-based vendors to buy from. <o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>I do have some older stuff that’s mostly unused from an aborted attempt at getting this fab running two years ago with one part-time grad student, but a lot of it is expired. Much of it was bought in quantities that make no sense (e.g. one giant bottle of one specific type of PR and a 4x4L of KOH). <o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Right now we have:<o:p></o:p></p><ul style='margin-top:0in' type=disc><li class=MsoListParagraph style='margin-left:0in;mso-list:l1 level1 lfo3'>Acetone, IPA of course. <o:p></o:p></li><li class=MsoListParagraph style='margin-left:0in;mso-list:l1 level1 lfo3'>HMDS: expired 2023. Still unused, but thinking this should be replaced.<o:p></o:p></li><li class=MsoListParagraph style='margin-left:0in;mso-list:l1 level1 lfo3'>Sulfuric acid and H2O2, expired 2022. Thinking I should keep the expired sulfuric acid for “general use”, get rid of the expired H2O2, and replace with Nano-Strip.<o:p></o:p></li><li class=MsoListParagraph style='margin-left:0in;mso-list:l1 level1 lfo3'>Nitric acid.<o:p></o:p></li><li class=MsoListParagraph style='margin-left:0in;mso-list:l1 level1 lfo3'>Aluminum etchant Type A.<o:p></o:p></li><li class=MsoListParagraph style='margin-left:0in;mso-list:l1 level1 lfo3'>BOE 7:1, expired 12/22. I’d imagine this is fine?<o:p></o:p></li><li class=MsoListParagraph style='margin-left:0in;mso-list:l1 level1 lfo3'>HF, no expiration<o:p></o:p></li><li class=MsoListParagraph style='margin-left:0in;mso-list:l1 level1 lfo3'>KOH: expired Aug. 23, probably fine. <o:p></o:p></li></ul><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Photoresists & related:<o:p></o:p></p><ul style='margin-top:0in' type=disc><li class=MsoListParagraph style='margin-left:0in;mso-list:l1 level1 lfo3'>AZ 1505, expired 2022. Probably fine? Are there other positive resists I should be starting out with instead?<o:p></o:p></li><li class=MsoListParagraph style='margin-left:0in;mso-list:l1 level1 lfo3'>AZ NLOF 2020, expired 2023. Probably fine?<o:p></o:p></li><li class=MsoListParagraph style='margin-left:0in;mso-list:l1 level1 lfo3'>AZ 300 MIF Developer, expired 2023. Is it preferable to replace with a non-TMAH developer such as AZ 351B for safety?<o:p></o:p></li><li class=MsoListParagraph style='margin-left:0in;mso-list:l1 level1 lfo3'>AZ KWIK Strip Remover: expired 2023. Seems fine? Is NMP just as well?<o:p></o:p></li><li class=MsoListParagraph style='margin-left:0in;mso-list:l1 level1 lfo3'>SU-8 100 & developer: expired, but I think I can ignore this until somebody actually needs it.<o:p></o:p></li></ul><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>I have a few interested users and my own research to support once we’re “operational” in 3-4 months, but for the immediate right-now I’m focused on creating a handful of relatively generic SOPs that I can use to get us off the ground, qualify tools, etc. Love how many SOPs are on the academic fab websites out there! Now to go figure out how to get my maskless aligner off the pallet. <o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Thanks!<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Russ<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Russ Renzas, Ph.D.<o:p></o:p></p><p class=MsoNormal>Director, Davidson Foundation Cleanroom<o:p></o:p></p><p class=MsoNormal>College of Engineering<o:p></o:p></p><p class=MsoNormal>University of Nevada, Reno<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p></div></body></html>