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<p class="MsoNormal">Good morning David,<o:p></o:p></p>
<p class="MsoNormal">We didn’t know that KLA supported parts for this old etcher. We have limited documentation on the tool, and the CD ROM that we have is no longer readable. It runs on Windows NT.<o:p></o:p></p>
<p class="MsoNormal">Thank you for the suggestion!<o:p></o:p></p>
<p class="MsoNormal">Nathan<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b><span style="font-family:"Calibri",sans-serif;mso-ligatures:none">From:</span></b><span style="font-family:"Calibri",sans-serif;mso-ligatures:none"> LaFleur, David W <dlafleur@cns.fas.harvard.edu>
<br>
<b>Sent:</b> Friday, December 13, 2024 8:01 AM<br>
<b>To:</b> Nathan Aultman <naultman@creol.ucf.edu>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] STS mechanical clamp "fingers"<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Hi Nathan,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Did you reach out to KLA? They own the STS name and that’s who I get my parts from. My fingers are a little different from yours but the same basic design. KLA still sells them to us.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Regards,<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:black;mso-ligatures:none">David LaFleur<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:black;mso-ligatures:none">Equipment Engineer <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:black;mso-ligatures:none">CNS, Harvard University<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:black;mso-ligatures:none">11 Oxford St.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:black;mso-ligatures:none">Cambridge, Ma. 02138<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:black;mso-ligatures:none"><o:p> </o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b><span style="font-size:12.0pt;font-family:"Calibri",sans-serif;color:black;mso-ligatures:none">From:
</span></b><span style="font-size:12.0pt;font-family:"Calibri",sans-serif;color:black;mso-ligatures:none">"<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>" <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
on behalf of Nathan Aultman <<a href="mailto:naultman@creol.ucf.edu">naultman@creol.ucf.edu</a>><br>
<b>Date: </b>Thursday, December 12, 2024 at 7:54 PM</span><span style="font-size:12.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none"> KLA still sells them<span style="color:black"><br>
<b>To: </b>"<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>" <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br>
<b>Subject: </b>[labnetwork] STS mechanical clamp "fingers"<o:p></o:p></span></span></p>
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<p class="MsoNormal">Hello labnetwork,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Are they any STS labs out there that can suggest where to obtain replacement wafer clamp “fingers?” Are there any labs that have made their own replacements?<o:p></o:p></p>
<p class="MsoNormal">Thank you in advance.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif;mso-ligatures:none">Nathan C. Aultman<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif;mso-ligatures:none">University of Central Florida<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif;mso-ligatures:none">407-823-6852<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif;mso-ligatures:none"><a href="mailto:naultman@creol.ucf.edu"><span style="color:#0563C1">naultman@creol.ucf.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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