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Why would you want a chemical abatement for evaporator??<br>
All those things you mention do not have significant vapor pressure at room temperature, and might only be a problem as fine dust.</div>
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If anything, abrasive damage to the pump from those particles may be a concern, depending on pump type.</div>
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I would consider particle traps before and/or after the pump. if desired. Running exhaust through an air purifier type of filter may be a cheaper one.<br>
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Thanks</div>
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mike</div>
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<p style="margin: 0px; font-family: Calibri, sans-serif; font-size: 11pt;"><span style="color: black;">Michael Yakimov</span></p>
<p style="margin: 0px; font-family: Calibri, sans-serif; font-size: 11pt;"><span style="color: black;">Research scientist</span></p>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of James Grant <James.Grant@glasgow.ac.uk><br>
<b>Sent:</b> Monday, December 16, 2024 4:49 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Abatement for E-Beam Evaporation of Metal Oxides</font>
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<p class="x_MsoNormal">Hello,</p>
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<p class="x_MsoNormal">Been enjoying the recent debate around electron beam evaporation of metals. Lots of food for thought.</p>
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<p class="x_MsoNormal">I have another question centred around electron beam evaporation of metal oxides such as TiO2, SiO2, MoO3 and V2O5. We are curious how others are abating these materials? At the moment the exhaust from our process chamber backing pump
is sent directly into our mezzanine which is, um well, not at all good. We are looking to tie in with dry bed chemisorption system that is used for a few of our etch tools but we were told by the abatement system vendor that it may not be possible.</p>
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<p class="x_MsoNormal">Could people please share how they are abating their metal oxide evaporator systems?</p>
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<p class="x_MsoNormal" style="margin-bottom:4.0pt"><span style="font-family:"Calibri",sans-serif">Cheers,</span></p>
<p class="x_MsoNormal" style="margin-bottom:6.0pt"><span style="font-family:"Calibri",sans-serif">James</span></p>
<p class="x_MsoNormal" style="margin-top:2.0pt"><span style="font-family:"Helvetica",sans-serif; color:#1E2142">Dr. James Paul Grant</span><span style="font-family:"Calibri",sans-serif"></span></p>
<p class="x_MsoNormal" style="margin-top:2.0pt"><i><span style="font-family:"Helvetica",sans-serif; color:#1E2142">JWNC Head of Research Technology</span></i></p>
<p class="x_MsoNormal" style="margin-top:2.0pt"><i><span style="font-family:"Helvetica",sans-serif; color:#1E2142">Engineering and Process Team</span></i><i><span style="font-family:"Calibri",sans-serif"></span></i></p>
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