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<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:Helvetica;
panose-1:2 11 6 4 2 2 2 2 2 4;}
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Aptos;}
@font-face
{font-family:ArialMT;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0cm;
font-size:11.0pt;
font-family:"Aptos",sans-serif;
mso-ligatures:standardcontextual;
mso-fareast-language:EN-US;}
span.EmailStyle17
{mso-style-type:personal-compose;
font-family:"Aptos",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:11.0pt;
mso-fareast-language:EN-US;}
@page WordSection1
{size:612.0pt 792.0pt;
margin:72.0pt 72.0pt 72.0pt 72.0pt;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
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<p class="MsoNormal">Hello,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Been enjoying the recent debate around electron beam evaporation of metals. Lots of food for thought.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I have another question centred around electron beam evaporation of metal oxides such as TiO2, SiO2, MoO3 and V2O5. We are curious how others are abating these materials? At the moment the exhaust from our process chamber backing pump is
sent directly into our mezzanine which is, um well, not at all good. We are looking to tie in with dry bed chemisorption system that is used for a few of our etch tools but we were told by the abatement system vendor that it may not be possible.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Could people please share how they are abating their metal oxide evaporator systems?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal" style="margin-bottom:4.0pt"><span style="font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB">Cheers,<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:6.0pt"><span style="font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB">James<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-top:2.0pt"><span style="font-family:"Helvetica",sans-serif;color:#1E2142;mso-ligatures:none;mso-fareast-language:EN-GB">Dr. James Paul Grant</span><span style="font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="margin-top:2.0pt"><i><span style="font-family:"Helvetica",sans-serif;color:#1E2142;mso-ligatures:none;mso-fareast-language:EN-GB">JWNC Head of Research Technology<o:p></o:p></span></i></p>
<p class="MsoNormal" style="margin-top:2.0pt"><i><span style="font-family:"Helvetica",sans-serif;color:#1E2142;mso-ligatures:none;mso-fareast-language:EN-GB">Engineering and Process Team</span></i><i><span style="font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB"><o:p></o:p></span></i></p>
<p class="MsoNormal" style="margin-top:2.0pt"><span style="font-family:"Helvetica",sans-serif;color:#003865;mso-ligatures:none;mso-fareast-language:EN-GB"><a href="mailto:james.grant@glasgow.ac.uk"><span style="color:blue">james.grant@glasgow.ac.uk</span></a></span><span style="font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;margin-bottom:4.0pt"><span style="font-family:"Calibri",sans-serif;mso-ligatures:none;mso-fareast-language:EN-GB">
<img border="0" width="362" height="51" style="width:3.7708in;height:.5312in" id="Picture_x0020_1" src="cid:image001.png@01DB4F96.E673F790"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:8.0pt;font-family:ArialMT;color:red;mso-fareast-language:EN-GB">
</span><span style="font-size:8.0pt;font-family:ArialMT;color:#005C8A;mso-fareast-language:EN-GB"><a href="http://www.jwnc.gla.ac.uk/"><span style="color:#005C8A">www.JWNC.gla.ac.uk</span></a></span><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129;mso-fareast-language:EN-GB"><br>
</span><span style="font-size:12.0pt;mso-fareast-language:EN-GB"><img border="0" width="10" height="10" style="width:.1041in;height:.1041in" id="Picture_x0020_2" src="cid:image002.png@01DB4F96.E673F790"></span><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129;mso-fareast-language:EN-GB">
</span><span style="font-size:8.0pt;font-family:ArialMT;color:#005C8A;mso-fareast-language:EN-GB"><a href="LinkedIn.com/company/JWNC"><span style="color:#005C8A">LinkedIn.com/company/JWNC</span></a></span><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129;mso-fareast-language:EN-GB"><br>
</span><span style="font-size:12.0pt;mso-fareast-language:EN-GB"><img border="0" width="10" height="10" style="width:.1041in;height:.1041in" id="Picture_x0020_3" src="cid:image003.png@01DB4F96.E673F790"></span><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129;mso-fareast-language:EN-GB">
</span><span style="font-size:8.0pt;font-family:ArialMT;color:#005C8A;mso-fareast-language:EN-GB"><a href="https://twitter.com/uofg_jwnc"><span style="color:#005C8A">@UofG_JWNC</span></a></span><span style="font-size:12.0pt;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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