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Hello Labnetwork --</div>
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I hope you have had been having a good holiday! </div>
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I have a situation where our main facility chiller is offline and for reason beyond our control may be offline for some time. We do not have a facility-scale backup chiller 🙁. <br>
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Has anyone implemented local cooling solutions for their plasma tool rough pumps? </div>
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One idea might be to have several individual smaller air cooled<a href="https://www.smcelectric.com/products/smc-spnhrs050an20/?srsltid=AfmBOooeEziJMZnHJXZuusTW5CAROr0mVf6TMwfapY0K72tJPtqaUb_o" id="LPlnk649677" title="https://www.smcelectric.com/products/smc-spnhrs050an20/?srsltid=AfmBOooeEziJMZnHJXZuusTW5CAROr0mVf6TMwfapY0K72tJPtqaUb_o"> SMC-HRS-050
type chillers</a> (or the like) each cooling a single Pfeiffer pump (Such as is used for ICPs and PECVD pumps). </div>
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However, I am not certain of what the critical values are to be satisfied, and how to determine if this is even feasible. I am currently looking at the water temperature and flow requirements for the pump at the moment, but do not know if these are the only
considerations. <br>
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If anyone has implemented individual cooling solution for pumps the size of <a href="https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7" title="https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7">
Pfeiffer pumps A604</a><a href="https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7" title="https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7" style="text-decoration: none;">
</a>or <a href="https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je" title="https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je">
A124</a><a href="https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je" title="https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je" style="text-decoration: none;">
</a>I would love to hear what specific chillers you have used and what your experience of this has been. <br>
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Thanks – and happy new year! <br>
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Best<br>
Sam</div>
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