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<div dir="auto">You may also consider power requirements - in your case A604 consumes 2 kW, and HRS050 can disperse 5 kW, do a workable pair. </div>
<div dir="auto">Last but not the least, extra heat load for building HVAC systems may be a problem. Even in winter, if you add more local heat it may become a problem as cooling is likely turned off for the season. Moreso in summer. </div>
<div dir="auto">When talking to HVAC people, be prepared to use "BTU per hour" units, 1 BTU/HR is 0.3 W. </div>
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<div dir="auto">Mike</div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Samantha Roberts <sroberts@gc.cuny.edu><br>
<b>Sent:</b> Thursday, December 26, 2024 1:14:51 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Local cooling of large rough pumps</font>
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Hello Labnetwork --</div>
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I hope you have had been having a good holiday! </div>
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I have a situation where our main facility chiller is offline and for reason beyond our control may be offline for some time. We do not have a facility-scale backup chiller 🙁. <br>
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Has anyone implemented local cooling solutions for their plasma tool rough pumps? </div>
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One idea might be to have several individual smaller air cooled<a href="https://www.smcelectric.com/products/smc-spnhrs050an20/?srsltid=AfmBOooeEziJMZnHJXZuusTW5CAROr0mVf6TMwfapY0K72tJPtqaUb_o" id="LPlnk649677" title="https://www.smcelectric.com/products/smc-spnhrs050an20/?srsltid=AfmBOooeEziJMZnHJXZuusTW5CAROr0mVf6TMwfapY0K72tJPtqaUb_o"> SMC-HRS-050
type chillers</a> (or the like) each cooling a single Pfeiffer pump (Such as is used for ICPs and PECVD pumps). </div>
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However, I am not certain of what the critical values are to be satisfied, and how to determine if this is even feasible. I am currently looking at the water temperature and flow requirements for the pump at the moment, but do not know if these are the only
considerations. <br>
<br>
If anyone has implemented individual cooling solution for pumps the size of <a href="https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7" title="https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7">
Pfeiffer pumps A604</a><a href="https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7" title="https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7" style="text-decoration:none">
</a>or <a href="https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je" title="https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je">
A124</a><a href="https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je" title="https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je" style="text-decoration:none">
</a>I would love to hear what specific chillers you have used and what your experience of this has been. <br>
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Thanks – and happy new year! <br>
<br>
Best<br>
Sam</div>
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