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<p class="MsoNormal"><span style="font-size:11.0pt">Early days of MIT.nano, while the central PCW distribution was being replaced, we installed a half dozen air cooled Thermo TF7500 chillers up on the fan deck to serve groups of tools (essentially a mini chiller
system). They can cool up to 7.5kW @ 20GPM/~60F supply…We filled with RO water, and it worked well for us > 2 years.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Happy to discuss in detail if you have questions email/call me.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="background:white"><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Nicholas Menounos, </span></b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">PE, LEED AP</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">Associate Director of Infrastructure</span><span style="font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#212121"> </span></b><span style="font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#212121">MIT.nano</span></b><span style="font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">Massachusetts Institute of Technology</span></b><span style="font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">77 Massachusetts Ave, Bldg 12-5007</span><span style="font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">Cambridge, MA 02139</span><span style="font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">Cell: </span><span style="color:black;mso-ligatures:standardcontextual"><a href="tel:+15089320938"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;mso-ligatures:none">(508)
932-0938</span></a></span><span style="font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">Office: </span><span style="color:black;mso-ligatures:standardcontextual"><a href="tel:+16172537234"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;mso-ligatures:none">(617)
253-7234</span></a></span><span style="font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">Email: </span><span style="mso-ligatures:standardcontextual"><a href="mailto:Menounos@mit.edu"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;mso-ligatures:none">Menounos@mit.edu</span></a><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Samantha Roberts<br>
<b>Sent:</b> Thursday, December 26, 2024 1:15 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Local cooling of large rough pumps<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;color:black">Hello Labnetwork --<o:p></o:p></span></p>
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I hope you have had been having a good holiday! <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;color:black"> <br>
I have a situation where our main facility chiller is offline and for reason beyond our control may be offline for some time. We do not have a facility-scale backup chiller
</span><span style="font-size:11.0pt;font-family:"Segoe UI Emoji",sans-serif;color:black">🙁</span><span style="font-size:11.0pt;color:black">. <br>
<br>
Has anyone implemented local cooling solutions for their plasma tool rough pumps? <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;color:black">One idea might be to have several individual smaller air cooled<a href="https://www.smcelectric.com/products/smc-spnhrs050an20/?srsltid=AfmBOooeEziJMZnHJXZuusTW5CAROr0mVf6TMwfapY0K72tJPtqaUb_o" title="https://www.smcelectric.com/products/smc-spnhrs050an20/?srsltid=AfmBOooeEziJMZnHJXZuusTW5CAROr0mVf6TMwfapY0K72tJPtqaUb_o"> SMC-HRS-050
type chillers</a> (or the like) each cooling a single Pfeiffer pump (Such as is used for ICPs and PECVD pumps). <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;color:black"><br>
However, I am not certain of what the critical values are to be satisfied, and how to determine if this is even feasible. I am currently looking at the water temperature and flow requirements for the pump at the moment, but do not know if these are the only
considerations. <br>
<br>
If anyone has implemented individual cooling solution for pumps the size of <a href="https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7" title="https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7">
Pfeiffer pumps A604</a><a href="https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7" title="https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7"><span style="text-decoration:none">
</span></a>or <a href="https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je" title="https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je">
A124</a><a href="https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je" title="https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je"><span style="text-decoration:none">
</span></a>I would love to hear what specific chillers you have used and what your experience of this has been. <br>
<br>
Thanks – and happy new year! <br>
<br>
Best<br>
Sam<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:#666666">____________________________________<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:#666666">Samantha Roberts PhD<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:#666666">ASRC Nanofabrication Facility Director<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:#666666">City University of New York<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:#666666"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:#666666"><img border="0" width="293" height="67" style="width:3.0486in;height:.7013in" id="image_0" src="cid:image001.png@01DB59D6.AD10E2C0"></span><span style="font-family:"Calibri",sans-serif;color:#666666"><o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><i><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black;background:white">Catalyzing Change, Celebrating Gains: </span></i><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><i><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black;background:white">A decade of visionary science for the public good.</span></i><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"><o:p></o:p></span></p>
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