<div dir="ltr"><div><div class="gmail_default" style="font-family:georgia,serif;font-size:small">We use pure N2 on our ICP-PECVD tool, you can see the recipes and film properties here:</div><div class="gmail_default" style="font-family:georgia,serif;font-size:small"><a href="https://wiki.nanofab.ucsb.edu/wiki/PECVD_Recipes#ICP-PECVD_.28Unaxis_VLR.29">https://wiki.nanofab.ucsb.edu/wiki/PECVD_Recipes#ICP-PECVD_.28Unaxis_VLR.29</a></div><br clear="all"></div><div><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><font face="georgia, serif" size="4">-- Demis </font><font face="georgia, serif" size="1">(<a href="https://wiki.nanotech.ucsb.edu/wiki/Demis_D._John" target="_blank">contact info</a>)</font><div><i style="font-family:"times new roman",serif">Reminder</i><span style="font-family:"times new roman",serif">: The NanoFab has a </span><a href="https://wiki.nanotech.ucsb.edu/wiki/Frequently_Asked_Questions#Publications_acknowledging_the_Nanofab" style="font-family:"times new roman",serif" target="_blank">publications policy</a><font face="georgia, serif" size="4"><br></font></div></div></div></div><br></div><br><div class="gmail_quote gmail_quote_container"><div dir="ltr" class="gmail_attr">On Mon, Jan 6, 2025 at 5:09 PM Joseph Losby <<a href="mailto:joseph.losby@ucalgary.ca">joseph.losby@ucalgary.ca</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div class="msg-4891304137718921719">




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Hello, </div>
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For those of you that operate a ICP chemical vapor deposition system for silicon nitride, do you use NH3 as one of your process gases or is N2 sufficient?   My understanding is that the disassociation efficiency of N2 is much higher in ICP systems, so NH3 may
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Cheers,</div>
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Joe</div>
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<p style="text-align:left;margin:0px"><span style="font-family:Calibri,Calibri_EmbeddedFont,Calibri_MSFontService,sans-serif;font-size:10pt;color:rgb(214,0,28);line-height:17px"><b>Joseph Losby, PhD</b></span></p>
<p style="text-align:left;margin:0px"><span style="font-family:Calibri,Calibri_EmbeddedFont,Calibri_MSFontService,sans-serif;font-size:13.3333px;color:rgb(0,0,0);background-color:rgb(255,255,255);line-height:17px"><b>Manager, qLab Operations</b></span></p>
<p style="text-align:left;margin:0px"><span style="font-family:Calibri,Calibri_EmbeddedFont,Calibri_MSFontService,sans-serif;font-size:10pt;color:rgb(0,0,0);line-height:17px"><b><a href="mailto:joseph.losby@ucalgary.ca" target="_blank">joseph.losby@ucalgary.ca</a></b></span></p>
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<p style="text-align:left;margin:0px"><span style="font-family:"Segoe UI","Segoe UI Web",Arial,Verdana,sans-serif;font-size:12px;color:rgb(0,0,0)"><a href="https://io.ucalgary.ca/quantum-city" id="m_-4891304137718921719OWAd47432ce-b5fd-81ae-167c-218736a7993f" title="https://io.ucalgary.ca/quantum-city" style="text-decoration:none;margin-top:0px;margin-bottom:0px" target="_blank"><img id="m_-4891304137718921719imageSelected0_0" width="214" height="71" style="width: 214px; height: 71px; margin: 0px;" src="cid:ii_1943e5e479ca3a9b94c1"></a></span><span style="font-family:Calibri,Calibri_EmbeddedFont,Calibri_MSFontService,sans-serif;font-size:12pt;color:rgb(0,0,0);line-height:19px"> </span></p>
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