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Hello, </div>
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For those of you that operate a ICP chemical vapor deposition system for silicon nitride, do you use NH3 as one of your process gases or is N2 sufficient? My understanding is that the disassociation efficiency of N2 is much higher in ICP systems, so NH3 may
not be necessary. </div>
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Cheers,</div>
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Joe</div>
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<p style="text-align: left; margin: 0px;"><span style="font-family: Calibri, Calibri_EmbeddedFont, Calibri_MSFontService, sans-serif; font-size: 10pt; color: rgb(214, 0, 28); line-height: 17px;"><b>Joseph Losby, PhD</b></span></p>
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<p style="text-align: left; margin: 0px;"><span style="font-family: "Segoe UI", "Segoe UI Web", Arial, Verdana, sans-serif; font-size: 12px; color: rgb(0, 0, 0);"><a href="https://io.ucalgary.ca/quantum-city" id="OWAd47432ce-b5fd-81ae-167c-218736a7993f" class="OWAAutoLink" title="https://io.ucalgary.ca/quantum-city" style="text-decoration: none; margin-top: 0px; margin-bottom: 0px;"><img id="imageSelected0_0" width="214" height="71" style="width: 214px; height: 71px; margin: 0px;" data-outlook-trace="F:1|T:1" src="cid:f9192b33-9107-4363-ac9b-dca9a86ab527"></a></span><span style="font-family: Calibri, Calibri_EmbeddedFont, Calibri_MSFontService, sans-serif; font-size: 12pt; color: rgb(0, 0, 0); line-height: 19px;"> </span></p>
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