<div dir="ltr">I'll second that statement.  We've been much happier with the nLOF 2000 series.  NH3 is always great, but time consuming.  <div>The 2000 series is still a bit touchy, the calibration of the hotplate matters, but sidewall slope is very controllable and can be optically confirmed fairly easily with the thicker materials.  Not as easily as LOR, but obvious enough to be able to train beginners.</div><div>I've gotten the impression that there's something magical about 5214 though when choosing a resist as a carbon cap for high temp annealing of SiC, but I don't know if that's just voodoo.  Very limited personal experience here.</div><div>Thanks,</div><div>Greg</div></div><br><div class="gmail_quote gmail_quote_container"><div dir="ltr" class="gmail_attr">On Tue, Jan 7, 2025 at 4:04 PM Garry J. Bordonaro <<a href="mailto:bordonaro@cnf.cornell.edu">bordonaro@cnf.cornell.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div class="msg-1822297875531477138"><div lang="EN-US"><div class="m_-1822297875531477138WordSection1"><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">I should also mention that the IR capabilities of 5214 are marginal and deteriorate with time.  We use AZ nLOF2020 for IR applications, or a NH3 process.<u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif"><u></u> <u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif"><u></u> <u></u></span></p><div><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">Garry J. Bordonaro<u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">Microlithographic Engineer<u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">Cornell NanoScale Facility<u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">250 Duffield Hall<u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">343 Campus Road<u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">Ithaca NY 14853-2700<u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">(607) 254-4936<u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif"><a href="mailto:bordonaro@cnf.cornell.edu" target="_blank"><span style="color:blue">bordonaro@cnf.cornell.edu</span></a><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif"><a href="http://www.cnf.cornell.edu/" target="_blank"><span style="color:blue">http://www.cnf.cornell.edu/</span></a><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif"><u></u> <u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">Please acknowledge CNF in your publications:<u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif">"This work was performed in part at the Cornell NanoScale Science & Technology Facility (CNF), a member of the National Nanotechnology Coordinated Infrastructure (NNCI), which is supported by the National Science Foundation (Grant NNCI-2025233)."<u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif"><u></u> <u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif"><u></u> <u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif"><u></u> <u></u></span></p></div><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif"><u></u> <u></u></span></p><div><div style="border-right:none;border-bottom:none;border-left:none;border-top:1pt solid rgb(225,225,225);padding:3pt 0in 0in"><p class="MsoNormal"><b><span style="font-size:11pt;font-family:Calibri,sans-serif">From:</span></b><span style="font-size:11pt;font-family:Calibri,sans-serif"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>> <b>On Behalf Of </b>Jeff Salzmann<br><b>Sent:</b> Tuesday, January 7, 2025 10:34 AM<br><b>To:</b> Fab Network <<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a>><br><b>Subject:</b> [labnetwork] Vendors for AZ 5214IR resist?<u></u><u></u></span></p></div></div><p class="MsoNormal"><u></u> <u></u></p><p class="MsoNormal">Hope you can save me some frustrations here- I’m looking to source a vendor that sells AZ 5214IR resist. Any recommendations?<u></u><u></u></p><p class="MsoNormal"><u></u> <u></u></p><p class="MsoNormal">Thanks!!!<br><br>Jeff<u></u><u></u></p><p class="MsoNormal"><u></u> <u></u></p><div><div><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">Jeff Salzmann</span><span style="font-size:11pt;color:black"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">Assistant Professor of Research</span><span style="font-size:11pt;color:black"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">Cleanroom Manager, Shared Instrumentation Laboratories</span><span style="font-size:11pt;color:black"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">School of Engineering and Applied Sciences</span><span style="font-size:11pt;color:black"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">University at Buffalo</span><span style="font-size:11pt;color:black"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">114A Davis Hall</span><span style="font-size:11pt;color:black"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">Buffalo, NY 14260</span><span style="font-size:11pt;color:black"><u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">Tel: 716.645.2584</span><span style="font-size:11pt;color:black"><u></u><u></u></span></p></div></div><p class="MsoNormal"><u></u> <u></u></p></div></div>_______________________________________________<br>
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</div></blockquote></div><div><br clear="all"></div><div><br></div><span class="gmail_signature_prefix">-- </span><br><div dir="ltr" class="gmail_signature"><div dir="ltr"><div>Greg Allion</div><div>NC State University Nanofabrication Facility (NNF)</div><div dir="ltr"><div>Process Integration Engineering Manager</div><div><br></div><div>Monteith Research Center</div><div>2410 Campus Shore Drive rm.243C</div><div>Raleigh, NC 27606</div></div></div></div>