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<p class="MsoNormal"><span style="font-size:11.0pt">Good morning Joe,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">We use a Plasma-therm AV system using 2% silane and ammonia.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Times New Roman",serif">Nathan C. Aultman<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Times New Roman",serif">University of Central Florida<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Times New Roman",serif">407-823-6852<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Times New Roman",serif"><a href="mailto:naultman@creol.ucf.edu"><span style="color:#0563C1">naultman@creol.ucf.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Joseph Losby<br>
<b>Sent:</b> Monday, January 6, 2025 1:32 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] NH3 for silicon nitride deposition in ICP-CVD systems<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;color:black">Hello, <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;color:black">For those of you that operate a ICP chemical vapor deposition system for silicon nitride, do you use NH3 as one of your process gases or is N2 sufficient? My understanding is that the disassociation
efficiency of N2 is much higher in ICP systems, so NH3 may not be necessary. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;color:black">Cheers,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;color:black">Joe<o:p></o:p></span></p>
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<p style="background:white"><b><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#D6001C">Joseph Losby, PhD</span></b><o:p></o:p></p>
<p style="background:white"><b><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:black;background:white">Manager, qLab Operations</span></b><o:p></o:p></p>
<p style="background:white"><b><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:black"><a href="mailto:joseph.losby@ucalgary.ca">joseph.losby@ucalgary.ca</a></span></b><o:p></o:p></p>
<p style="background:white"><o:p> </o:p></p>
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<p style="background:white"><span style="color:black"><a href="https://io.ucalgary.ca/quantum-city" title=""https://io.ucalgary.ca/quantum-city""><span style="font-size:9.0pt;font-family:"Segoe UI",sans-serif;text-decoration:none"><img border="0" width="214" height="71" style="width:2.2291in;height:.7395in" id="imageSelected0_0" src="cid:image001.jpg@01DB60DF.6B6E5D10"></span></a></span><span style="font-family:"Calibri",sans-serif;color:black"> </span><o:p></o:p></p>
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