<div dir="auto">We get AZ 5214-EIR (I assume the “E” means that’s the new Japanese formulation) from Integrated Micro Materials. Here is the part number:</div><div dir="auto"><div><table cellspacing="0" cellpadding="0" dir="ltr" border="1" style="table-layout:fixed;font-size:10pt;font-family:arial;width:0px;border-collapse:collapse;border:medium"><colgroup style="font-family:arial"><col width="173" style="font-family:arial"><col width="262" style="font-family:arial"></colgroup><tbody style="font-family:arial"><tr style="height:17px;font-family:arial"><td style="padding:0px 3px;vertical-align:bottom;font-size:9pt;text-align:center;font-family:arial">AZ5214EIR-1Q</td><td style="padding:0px 3px;vertical-align:middle;font-size:9pt;text-align:center;font-family:arial">INTEGRATED MICRO MATERIALS</td></tr></tbody></table></div><br clear="all">As far as I know we didn’t see any problem when the formulation changed in ~2021.  </div><div dir="auto">It still works as both positive and negative PR.</div><div dir="auto"><br clear="all"><div dir="auto"><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><font face="georgia, serif" size="4" style="font-family:georgia,serif;color:rgb(0,0,0)">-- Demis </font><font face="georgia, serif" size="1" style="font-family:georgia,serif;color:rgb(0,0,0)">(<a href="https://wiki.nanotech.ucsb.edu/wiki/Demis_D._John" target="_blank" style="font-family:georgia,serif">contact info</a>)</font><div><i style="font-family:"times new roman",serif">Reminder</i><span style="font-family:"times new roman",serif">: The NanoFab has a </span><a href="https://wiki.nanotech.ucsb.edu/wiki/Frequently_Asked_Questions#Publications_acknowledging_the_Nanofab" style="font-family:"times new roman",serif" target="_blank">publications policy</a><font face="georgia, serif" size="4" style="font-family:georgia,serif;color:rgb(0,0,0)"><br></font></div></div></div></div></div><div><br></div><div><br><div class="gmail_quote gmail_quote_container"><div dir="ltr" class="gmail_attr">On Wed, Jan 8, 2025 at 05:46 Garry J. Bordonaro <<a href="mailto:bordonaro@cnf.cornell.edu">bordonaro@cnf.cornell.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left-width:1px;border-left-style:solid;padding-left:1ex;border-left-color:rgb(204,204,204)"><div lang="EN-US" link="blue" vlink="purple"><div class="m_7864866450305507608WordSection1"><p class="MsoNormal">AZ nLOF works very well for us.  Easy to get and use.<u></u><u></u></p></div></div><div lang="EN-US" link="blue" vlink="purple"><div class="m_7864866450305507608WordSection1"><p class="MsoNormal"><u></u> <u></u></p><p class="MsoNormal"><u></u> <u></u></p><div><p class="MsoNormal">Garry J. Bordonaro<u></u><u></u></p><p class="MsoNormal">Microlithographic Engineer<u></u><u></u></p><p class="MsoNormal">Cornell NanoScale Facility<u></u><u></u></p><p class="MsoNormal">250 Duffield Hall<u></u><u></u></p><p class="MsoNormal"><a href="https://www.google.com/maps/search/343+Campus+Road+Ithaca+NY+14853-2700?entry=gmail&source=g">343 Campus Road</a><u></u><u></u></p><p class="MsoNormal"><a href="https://www.google.com/maps/search/343+Campus+Road+Ithaca+NY+14853-2700?entry=gmail&source=g">Ithaca NY 14853-2700</a><u></u><u></u></p><p class="MsoNormal">(607) 254-4936<u></u><u></u></p><p class="MsoNormal"><a href="mailto:bordonaro@cnf.cornell.edu" target="_blank">bordonaro@cnf.cornell.edu</a><u></u><u></u></p><p class="MsoNormal"><a href="http://www.cnf.cornell.edu/" target="_blank">http://www.cnf.cornell.edu/</a><u></u><u></u></p><p class="MsoNormal"><u></u> <u></u></p><p class="MsoNormal">Please acknowledge CNF in your publications:<u></u><u></u></p><p class="MsoNormal">"This work was performed in part at the Cornell NanoScale Science & Technology Facility (CNF), a member of the National Nanotechnology Coordinated Infrastructure (NNCI), which is supported by the National Science Foundation (Grant NNCI-2025233)."<u></u><u></u></p><p class="MsoNormal"><u></u> <u></u></p><p class="MsoNormal"><u></u> <u></u></p><p class="MsoNormal"><u></u> <u></u></p></div><p class="MsoNormal"><u></u> <u></u></p><div><div style="border-width:1pt medium medium;border-style:solid none none;padding:3pt 0in 0in;border-color:rgb(225,225,225) currentcolor currentcolor"><p class="MsoNormal"><b>From:</b> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>> <b>On Behalf Of </b>Yakimov, Michael<br><b>Sent:</b> Tuesday, January 7, 2025 1:26 PM<br><b>To:</b> Jeff Salzmann <<a href="mailto:jks7@buffalo.edu" target="_blank">jks7@buffalo.edu</a>>; Fab Network <<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a>><br><b>Subject:</b> Re: [labnetwork] Vendors for AZ 5214IR resist?<u></u><u></u></p></div></div><p class="MsoNormal"><u></u> <u></u></p><div><p class="MsoNormal"><span style="font-size:12pt;font-family:Aptos;color:black">Last time I looked at it - <a href="https://www.microchemicals.com/NEWS/" target="_blank" style="font-family:Aptos">https://www.microchemicals.com/NEWS/</a><u style="font-family:Aptos"></u><u style="font-family:Aptos"></u></span></p></div><div><p class="MsoNormal"><span style="font-size:12pt;font-family:Aptos;color:black"><u style="font-family:Aptos"></u> <u style="font-family:Aptos"></u></span></p></div><div><p class="MsoNormal"><i><span style="font-size:12pt;font-family:Aptos;color:black"> >The manufacturer Merck informed us that production of the AZ <b style="font-family:Aptos">® 5214 E will be discontinued by the end of 2021</b><a href="https://www.microchemicals.com/media/08/6c/bb/1710258928/PCN_Letter_AZ_5214E_phase_out_20201209.pdf" target="_blank" style="font-family:Aptos">(PCN</a>). We have also been informed that a <b style="font-family:Aptos">similar (but not identical)</b> product is already on the market: the Japanese version of the AZ <a href="https://www.microchemicals.com/AZ-5214-E-Photoresist-3.785-l/1005214EJP" target="_blank" style="font-family:Aptos">® 5214E</a>.</span></i><span style="font-size:12pt;font-family:Aptos;color:black"><u style="font-family:Aptos"></u><u style="font-family:Aptos"></u></span></p></div><div><p class="MsoNormal"><span style="font-size:12pt;font-family:Aptos;color:black"><u style="font-family:Aptos"></u> <u style="font-family:Aptos"></u></span></p></div><div><p class="MsoNormal"><span style="font-size:12pt;font-family:Aptos;color:black">There is a message in the same communication batch saying Shizuoka (JP) is manufacturing their version, but my impression (would be happy to be proven wrong)  is that they don't really care about US sales.<u style="font-family:Aptos"></u><u style="font-family:Aptos"></u></span></p></div><div><p class="MsoNormal"><span style="font-size:12pt;font-family:Aptos;color:black"><u style="font-family:Aptos"></u> <u style="font-family:Aptos"></u></span></p></div><div><p class="MsoNormal"><span style="font-size:12pt;font-family:Aptos;color:black">Again, I would be happy to hear otherwise - but looks like switching to LOR is the best strategy long term. NH3 image reversal can be an emergency  plan B<u style="font-family:Aptos"></u><u style="font-family:Aptos"></u></span></p></div><div><p class="MsoNormal"><span style="font-size:12pt;font-family:Aptos;color:black"><u style="font-family:Aptos"></u> <u style="font-family:Aptos"></u></span></p></div><div><p class="MsoNormal"><span style="font-size:12pt;font-family:Aptos;color:black"><u style="font-family:Aptos"></u> <u style="font-family:Aptos"></u></span></p></div><div><p class="MsoNormal"><span style="font-size:12pt;font-family:Aptos;color:black">Thanks<u style="font-family:Aptos"></u><u style="font-family:Aptos"></u></span></p></div><div><p class="MsoNormal"><span style="font-size:12pt;font-family:Aptos;color:black"><u style="font-family:Aptos"></u> <u style="font-family:Aptos"></u></span></p></div><div><p class="MsoNormal"><span style="font-size:12pt;font-family:Aptos;color:black">mike<u style="font-family:Aptos"></u><u style="font-family:Aptos"></u></span></p></div><div><p class="MsoNormal"><span style="font-size:12pt;font-family:Aptos;color:black"><u style="font-family:Aptos"></u> <u style="font-family:Aptos"></u></span></p></div><div><p class="MsoNormal"><span style="font-size:12pt;font-family:Aptos;color:black"><u style="font-family:Aptos"></u> <u style="font-family:Aptos"></u></span></p></div><div><p class="MsoNormal"><span style="font-size:12pt;font-family:Aptos;color:black"><u style="font-family:Aptos"></u> <u style="font-family:Aptos"></u></span></p></div><div><p class="MsoNormal"><span style="font-size:12pt;font-family:Aptos;color:black"><u style="font-family:Aptos"></u> <u style="font-family:Aptos"></u></span></p></div><div><p class="MsoNormal"><span style="font-size:12pt;font-family:Aptos;color:black"><u style="font-family:Aptos"></u> <u style="font-family:Aptos"></u></span></p></div><div id="m_7864866450305507608Signature"><p><span style="color:black">_______________________________________________</span><u></u><u></u></p><p><span style="color:black">Michael Yakimov</span><u></u><u></u></p><p><span style="color:black">Research scientist</span><u></u><u></u></p><p><span style="color:black">Department  of Nanoscale Science and Engineering</span><u></u><u></u></p><p><span style="color:black">University at Albany - State University of <a href="https://www.google.com/maps/search/NY+253+Fuller+rd.+Albany+NY+12203?entry=gmail&source=g">NY</a></span><u></u><u></u></p><p><span style="color:black"> </span><u></u><u></u></p><p><span style="color:black"><a href="https://www.google.com/maps/search/NY+253+Fuller+rd.+Albany+NY+12203?entry=gmail&source=g">253 Fuller rd.</a></span><u></u><u></u></p><p><span style="color:black"><a href="https://www.google.com/maps/search/NY+253+Fuller+rd.+Albany+NY+12203?entry=gmail&source=g">Albany NY 12203</a></span><u></u><u></u></p><p><span style="color:black"> </span><u></u><u></u></p><p><span style="color:black">Phone: 518-437-8609 lab</span><u></u><u></u></p><p><span style="color:black">e-mail: <a href="mailto:myakimov@albany.edu" target="_blank">myakimov@albany.edu</a></span><u></u><u></u></p><p class="MsoNormal"><u></u> <u></u></p></div><div class="MsoNormal" align="center" style="text-align:center"><hr size="2" width="98%" align="center"></div><div id="m_7864866450305507608divRplyFwdMsg"><p class="MsoNormal"><b><span style="color:black">From:</span></b><span style="color:black"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>> on behalf of Jeff Salzmann <<a href="mailto:jks7@buffalo.edu" target="_blank">jks7@buffalo.edu</a>><br><b>Sent:</b> Tuesday, January 7, 2025 10:34 AM<br><b>To:</b> Fab Network <<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a>><br><b>Subject:</b> [labnetwork] Vendors for AZ 5214IR resist?</span> <u></u><u></u></p><div><p class="MsoNormal"> <u></u><u></u></p></div></div><div><div><p class="m_7864866450305507608xmsonormal">Hope you can save me some frustrations here- I’m looking to source a vendor that sells AZ 5214IR resist. Any recommendations?<u></u><u></u></p><p class="m_7864866450305507608xmsonormal"> <u></u><u></u></p><p class="m_7864866450305507608xmsonormal">Thanks!!!<br><br>Jeff<u></u><u></u></p><p class="m_7864866450305507608xmsonormal"> <u></u><u></u></p><div><div><p class="m_7864866450305507608xmsonormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">Jeff Salzmann</span><u></u><u></u></p><p class="m_7864866450305507608xmsonormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">Assistant Professor of Research</span><u></u><u></u></p><p class="m_7864866450305507608xmsonormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">Cleanroom Manager, Shared Instrumentation Laboratories</span><u></u><u></u></p><p class="m_7864866450305507608xmsonormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">School of Engineering and Applied Sciences</span><u></u><u></u></p><p class="m_7864866450305507608xmsonormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">University at Buffalo</span><u></u><u></u></p><p class="m_7864866450305507608xmsonormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">114A Davis Hall</span><u></u><u></u></p><p class="m_7864866450305507608xmsonormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">Buffalo, NY 14260</span><u></u><u></u></p><p class="m_7864866450305507608xmsonormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:black">Tel: 716.645.2584</span><u></u><u></u></p></div></div><p class="m_7864866450305507608xmsonormal"> <u></u><u></u></p></div></div></div></div>_______________________________________________<br>
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