<div dir="auto">Our AJA Sputter tool produced SiN waveguide cores back in 2012 that achieved 3.0dB/m losses. However those were annealed at 1050°C as well - I never tried it without annealing though, could be low enough loss. </div><div dir="auto"><br></div><div dir="auto">Also our Deuterated Silane ICP-PECVD tool produces good films at 100°C (since it has high density plasma), but nobody has tried using anything but the standard 250°C films for waveguides. I suspect the 100°C films will operate similarly. </div><div dir="auto">Here two a papers on the standard films from this tool:</div><div dir="auto">250°C process for un-annealed waveguides:</div><div dir="auto"><div><a href="https://wiki.nanofab.ucsb.edu/wiki/Template:Publications#250C_Process_for_%3C_2dB/m_Ultra-Low_Loss_Silicon_Nitride_Integrated_Photonic_Waveguides">https://wiki.nanofab.ucsb.edu/wiki/Template:Publications#250C_Process_for_%3C_2dB/m_Ultra-Low_Loss_Silicon_Nitride_Integrated_Photonic_Waveguides</a></div></div><div dir="auto"><br></div><div dir="auto">SiD4 waveguides paper: <div><a href="https://wiki.nanofab.ucsb.edu/wiki/Template:Publications#Deuterated_silicon_dioxide_for_heterogeneous_integration_of_ultra-low-loss_waveguides">https://wiki.nanofab.ucsb.edu/wiki/Template:Publications#Deuterated_silicon_dioxide_for_heterogeneous_integration_of_ultra-low-loss_waveguides</a></div><br clear="all"><div dir="auto"><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><font face="georgia, serif" size="4" style="font-family:georgia,serif;color:rgb(0,0,0)">-- Demis </font><font face="georgia, serif" size="1" style="font-family:georgia,serif;color:rgb(0,0,0)">(<a href="https://wiki.nanotech.ucsb.edu/wiki/Demis_D._John" target="_blank" style="font-family:georgia,serif">contact info</a>)</font><div><i style="font-family:"times new roman",serif">Reminder</i><span style="font-family:"times new roman",serif">: The NanoFab has a </span><a href="https://wiki.nanotech.ucsb.edu/wiki/Frequently_Asked_Questions#Publications_acknowledging_the_Nanofab" style="font-family:"times new roman",serif" target="_blank">publications policy</a><font face="georgia, serif" size="4" style="font-family:georgia,serif;color:rgb(0,0,0)"><br></font></div></div></div></div></div><div><br></div><div><br><div class="gmail_quote gmail_quote_container"><div dir="ltr" class="gmail_attr">On Fri, Jan 17, 2025 at 16:43 Philippe Mérel <<a href="mailto:Philippe.Merel@usherbrooke.ca">Philippe.Merel@usherbrooke.ca</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left-width:1px;border-left-style:solid;padding-left:1ex;border-left-color:rgb(204,204,204)">
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Can you share your experience if you are depositing silicon nitride and / or silicon oxide thin films at low substrate temperature (below 100C) by PECVD or ICP-CVD that have good optical qualities (for waveguide applications).</div>
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<div style="font-family:Aptos,Aptos_EmbeddedFont,Aptos_MSFontService,Calibri,Helvetica,sans-serif">Which deposition system are you using?</div>
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<div style="font-family:Aptos,Aptos_EmbeddedFont,Aptos_MSFontService,Calibri,Helvetica,sans-serif">What was the substrate temperature?</div>
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Thank you.</div>
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<p style="margin-top:0px;margin-bottom:0px"><span style="font-family:Calibri,sans-serif;font-size:14pt;color:rgb(36,36,36)"><b style="font-family:Calibri,sans-serif">Philippe Mérel
<i style="font-family:Calibri,sans-serif">PhD</i></b></span></p>
<p style="text-align:left;margin:0px"><span style="font-family:Calibri,sans-serif;font-size:12pt;color:rgb(36,36,36)">Coordonnateur Laboratoire Nanotechnologies et Nanosystèmes (LNN)</span></p>
<p style="text-align:left;margin:0px"><span style="font-family:Calibri,sans-serif;font-size:12pt;color:rgb(36,36,36)">Institut Interdisciplinaire d’Innovation Technologique – 3iT</span></p>
<p style="text-align:left;margin:0px"><span style="font-family:Calibri,sans-serif;font-size:12pt;color:rgb(36,36,36)"><b style="font-family:Calibri,sans-serif">Université de Sherbrooke</b></span></p>
<p style="text-align:left;margin:0px"><span style="font-family:Calibri,sans-serif;font-size:11pt;color:rgb(36,36,36)">(819) 821-8000 x63706</span></p>
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