<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=utf-8">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:"Segoe UI Emoji";
panose-1:2 11 5 2 4 2 4 2 2 3;}
@font-face
{font-family:Aptos;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
p.xmsonormal, li.xmsonormal, div.xmsonormal
{mso-style-name:x_msonormal;
margin:0in;
font-size:12.0pt;
font-family:"Aptos",sans-serif;}
span.EmailStyle24
{mso-style-type:personal-reply;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="blue" vlink="purple" style="word-wrap:break-word">
<div class="WordSection1">
<p class="MsoNormal">If your facility has a chilled water loop you have the option of going to water/water chiller vs Air/water. The Water/Water chiller are quiet and efficient.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p class="MsoNormal"><b><span style="color:#002060;text-transform:uppercase">Deon D. Collins<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="color:#002060;text-transform:uppercase"><o:p> </o:p></span></b></p>
<p class="MsoNormal"><span style="color:#002060"><br>
<i>Director of Facilities<o:p></o:p></i></span></p>
<p class="MsoNormal"><i><span style="color:#002060">The Grainger College Of Engineering UIUC</span></i><span style="color:#002060"><br>
</span><span style="color:#002060">Holonyak Micro & Nanotechnology Lab</span><span style="color:#1F497D"><br>
</span><span style="color:#13294B">208 N Wright St Rm. 1114 | MC-249</span><span style="color:#1F497D"><br>
</span><span style="color:#13294B">Urbana, IL 61801</span><span style="color:#1F497D"><br>
</span><span style="color:#13294B">217-300-7531 | </span><span style="color:#1F497D"><a href="mailto:deonc69@illinois.edu"><span style="color:#0563C1">deonc69@illinois.edu</span></a><br>
<br>
<br>
</span><a href="http://illinois.edu/"><span style="color:#1F497D;text-decoration:none"><img border="0" width="119" height="21" style="width:1.2395in;height:.2187in" id="Picture_x0020_1" src="cid:image002.png@01DB68D1.27F569D0"></span></a><span style="color:#1F497D"><br>
<br>
</span><i><span style="color:#666666">Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.
</span></i><span style="color:#002060"><o:p></o:p></span></p>
<p class="MsoNormal"><u><span style="color:#1F497D"><o:p><span style="text-decoration:none"> </span></o:p></span></u></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;color:#A3238B">Life begins at the end of your comfort zone.
<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;color:#A3238B"> Propeck Amanda<o:p></o:p></span></b></p>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Richelson, Tucson<br>
<b>Sent:</b> Friday, January 17, 2025 10:16 AM<br>
<b>To:</b> Nicholas Menounos <menounos@mit.edu>; Samantha Roberts <sroberts@gc.cuny.edu>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Local cooling of large rough pumps<o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Aptos",sans-serif;color:black">Hello Samantha,<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Aptos",sans-serif;color:black"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-size:12.0pt;font-family:"Aptos",sans-serif;color:black">We use local chillers for two of our Oxford PlasmaPro100's (and associate rough pumps). I have a TF7500, and a dinosaur Lyrton RC070.
I look at the gpm and everything else usually scales with it. The chillers are noisy and it's a little messy with the additional hoses and pipes, but it's worth it.<o:p></o:p></span></p>
</div>
<div class="MsoNormal" align="center" style="text-align:center">
<hr size="2" width="98%" align="center">
</div>
<div id="divRplyFwdMsg">
<p class="MsoNormal"><b><span style="color:black">From:</span></b><span style="color:black"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>> on behalf of Nicholas Menounos <<a href="mailto:menounos@mit.edu">menounos@mit.edu</a>><br>
<b>Sent:</b> Sunday, December 29, 2024 08:47<br>
<b>To:</b> Samantha Roberts <<a href="mailto:sroberts@gc.cuny.edu">sroberts@gc.cuny.edu</a>>;
<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a> <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br>
<b>Subject:</b> Re: [labnetwork] Local cooling of large rough pumps</span> <o:p></o:p></p>
<div>
<p class="MsoNormal"> <o:p></o:p></p>
</div>
</div>
<div>
<div>
<p class="xmsonormal"><span style="font-size:11.0pt">Early days of MIT.nano, while the central PCW distribution was being replaced, we installed a half dozen air cooled Thermo TF7500 chillers up on the fan deck to serve groups of tools (essentially a mini chiller
system). They can cool up to 7.5kW @ 20GPM/~60F supply…We filled with RO water, and it worked well for us > 2 years.</span><o:p></o:p></p>
<p class="xmsonormal"><span style="font-size:11.0pt"> </span><o:p></o:p></p>
<p class="xmsonormal"><span style="font-size:11.0pt">Happy to discuss in detail if you have questions email/call me.</span><o:p></o:p></p>
<p class="xmsonormal"><span style="font-size:11.0pt"> </span><o:p></o:p></p>
<div>
<p class="xmsonormal" style="background:white"><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Nicholas Menounos, </span></b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">PE, LEED AP</span><o:p></o:p></p>
<p class="xmsonormal" style="background:white"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">Associate Director of Infrastructure</span><o:p></o:p></p>
<p class="xmsonormal" style="background:white"><b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#212121"> </span></b><o:p></o:p></p>
<p class="xmsonormal" style="background:white"><b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#212121">MIT.nano</span></b><o:p></o:p></p>
<p class="xmsonormal" style="background:white"><b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">Massachusetts Institute of Technology</span></b><o:p></o:p></p>
<p class="xmsonormal" style="background:white"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">77 Massachusetts Ave, Bldg 12-5007</span><o:p></o:p></p>
<p class="xmsonormal" style="background:white"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">Cambridge, MA 02139</span><o:p></o:p></p>
<p class="xmsonormal" style="background:white"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">Cell: </span><span style="color:black"><a href="tel:+15089320938"><span style="font-size:9.0pt;font-family:"Arial",sans-serif">(508) 932-0938</span></a></span><o:p></o:p></p>
<p class="xmsonormal" style="background:white"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">Office: </span><span style="color:black"><a href="tel:+16172537234"><span style="font-size:9.0pt;font-family:"Arial",sans-serif">(617) 253-7234</span></a></span><o:p></o:p></p>
<p class="xmsonormal"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">Email: </span><a href="mailto:Menounos@mit.edu"><span style="font-size:9.0pt;font-family:"Arial",sans-serif">Menounos@mit.edu</span></a><o:p></o:p></p>
</div>
<p class="xmsonormal"><span style="font-size:11.0pt"> </span><o:p></o:p></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="xmsonormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Samantha Roberts<br>
<b>Sent:</b> Thursday, December 26, 2024 1:15 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Local cooling of large rough pumps</span><o:p></o:p></p>
</div>
</div>
<p class="xmsonormal"> <o:p></o:p></p>
<div>
<p class="xmsonormal"><span style="font-size:11.0pt;color:black"> </span><o:p></o:p></p>
</div>
<div>
<p class="xmsonormal"><span style="font-size:11.0pt;color:black">Hello Labnetwork --</span><o:p></o:p></p>
</div>
<div>
<p class="xmsonormal"><span style="font-size:11.0pt;color:black"><br>
I hope you have had been having a good holiday! </span><o:p></o:p></p>
</div>
<div>
<p class="xmsonormal"><span style="font-size:11.0pt;color:black"> <br>
I have a situation where our main facility chiller is offline and for reason beyond our control may be offline for some time. We do not have a facility-scale backup chiller
</span><span style="font-size:11.0pt;font-family:"Segoe UI Emoji",sans-serif;color:black">🙁</span><span style="font-size:11.0pt;color:black">. <br>
<br>
Has anyone implemented local cooling solutions for their plasma tool rough pumps? </span><o:p></o:p></p>
</div>
<div>
<p class="xmsonormal"><span style="font-size:11.0pt;color:black">One idea might be to have several individual smaller air cooled<a href="https://urldefense.com/v3/__https:/www.smcelectric.com/products/smc-spnhrs050an20/?srsltid=AfmBOooeEziJMZnHJXZuusTW5CAROr0mVf6TMwfapY0K72tJPtqaUb_o__;!!DZ3fjg!7-b6vN-wvHznfwGYzYfmvQ6CO6zD3rhN8uTxJbiwX7sHM5ZKwNn0hmlCKtMd_y7ebf1p7pG3EJTX5--uC7w$" title="https://www.smcelectric.com/products/smc-spnhrs050an20/?srsltid=AfmBOooeEziJMZnHJXZuusTW5CAROr0mVf6TMwfapY0K72tJPtqaUb_o"> SMC-HRS-050
type chillers</a> (or the like) each cooling a single Pfeiffer pump (Such as is used for ICPs and PECVD pumps). </span><o:p></o:p></p>
</div>
<div>
<p class="xmsonormal"><span style="font-size:11.0pt;color:black"><br>
However, I am not certain of what the critical values are to be satisfied, and how to determine if this is even feasible. I am currently looking at the water temperature and flow requirements for the pump at the moment, but do not know if these are the only
considerations. <br>
<br>
If anyone has implemented individual cooling solution for pumps the size of <a href="https://urldefense.com/v3/__https:/www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7__;!!DZ3fjg!7-b6vN-wvHznfwGYzYfmvQ6CO6zD3rhN8uTxJbiwX7sHM5ZKwNn0hmlCKtMd_y7ebf1p7pG3EJTXanMidzA$" title="https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7">
Pfeiffer pumps A604</a><a href="https://urldefense.com/v3/__https:/www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7__;!!DZ3fjg!7-b6vN-wvHznfwGYzYfmvQ6CO6zD3rhN8uTxJbiwX7sHM5ZKwNn0hmlCKtMd_y7ebf1p7pG3EJTXanMidzA$" title="https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7"><span style="text-decoration:none">
</span></a>or <a href="https://urldefense.com/v3/__https:/www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je__;!!DZ3fjg!7-b6vN-wvHznfwGYzYfmvQ6CO6zD3rhN8uTxJbiwX7sHM5ZKwNn0hmlCKtMd_y7ebf1p7pG3EJTX2KvhcyQ$" title="https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je">
A124</a><a href="https://urldefense.com/v3/__https:/www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je__;!!DZ3fjg!7-b6vN-wvHznfwGYzYfmvQ6CO6zD3rhN8uTxJbiwX7sHM5ZKwNn0hmlCKtMd_y7ebf1p7pG3EJTX2KvhcyQ$" title="https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je"><span style="text-decoration:none">
</span></a>I would love to hear what specific chillers you have used and what your experience of this has been. <br>
<br>
Thanks – and happy new year! <br>
<br>
Best<br>
Sam</span><o:p></o:p></p>
</div>
<div>
<p class="xmsonormal"><span style="font-size:11.0pt;color:black"> </span><o:p></o:p></p>
</div>
<div id="x_Signature">
<div>
<p class="xmsonormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:#666666">____________________________________</span><o:p></o:p></p>
</div>
<div>
<p class="xmsonormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:#666666">Samantha Roberts PhD</span><o:p></o:p></p>
</div>
<div>
<p class="xmsonormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:#666666">ASRC Nanofabrication Facility Director</span><o:p></o:p></p>
</div>
<div>
<p class="xmsonormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:#666666">City University of New York</span><o:p></o:p></p>
</div>
<div>
<p class="xmsonormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:#666666"> </span><o:p></o:p></p>
</div>
<div>
<p class="xmsonormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:#666666"><img border="0" width="293" height="67" style="width:3.052in;height:.6979in" id="x_image_0" src="cid:image003.png@01DB68D1.27F569D0"></span><o:p></o:p></p>
</div>
<div>
<p class="xmsonormal" style="background:white"><i><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black;background:white">Catalyzing Change, Celebrating Gains: </span></i><o:p></o:p></p>
</div>
<div>
<p class="xmsonormal" style="background:white"><i><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black;background:white">A decade of visionary science for the public good.</span></i><o:p></o:p></p>
</div>
<div>
<p class="xmsonormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:black"> </span><o:p></o:p></p>
</div>
</div>
</div>
</div>
</div>
</body>
</html>