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Hello Samantha,</div>
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We use local chillers for two of our Oxford PlasmaPro100's (and associate rough pumps). I have a TF7500, and a dinosaur Lyrton RC070. I look at the gpm and everything else usually scales with it. The chillers are noisy and it's a little messy with the additional
hoses and pipes, but it's worth it.<br>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Nicholas Menounos <menounos@mit.edu><br>
<b>Sent:</b> Sunday, December 29, 2024 08:47<br>
<b>To:</b> Samantha Roberts <sroberts@gc.cuny.edu>; labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Local cooling of large rough pumps</font>
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<p class="x_MsoNormal"><span style="font-size:11.0pt">Early days of MIT.nano, while the central PCW distribution was being replaced, we installed a half dozen air cooled Thermo TF7500 chillers up on the fan deck to serve groups of tools (essentially a mini
chiller system). They can cool up to 7.5kW @ 20GPM/~60F supply…We filled with RO water, and it worked well for us > 2 years.</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt"> </span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt">Happy to discuss in detail if you have questions email/call me.</span></p>
<p class="x_MsoNormal"><span style="font-size:11.0pt"> </span></p>
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<p class="x_MsoNormal" style="background:white"><b><span style="font-size:10.0pt; font-family:"Arial",sans-serif; color:black">Nicholas Menounos, </span></b><span style="font-size:10.0pt; font-family:"Arial",sans-serif; color:black">PE, LEED AP</span><span style="font-size:11.0pt; font-family:"Calibri",sans-serif"></span></p>
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<p class="x_MsoNormal" style="background:white"><b><span style="font-size:9.0pt; font-family:"Arial",sans-serif; color:#212121">MIT.nano</span></b><span style="font-family:"Calibri",sans-serif"></span></p>
<p class="x_MsoNormal" style="background:white"><b><span style="font-size:9.0pt; font-family:"Arial",sans-serif; color:black">Massachusetts Institute of Technology</span></b><span style="font-family:"Calibri",sans-serif"></span></p>
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<p class="x_MsoNormal"><b><span style="font-size:11.0pt; font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt; font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Samantha Roberts<br>
<b>Sent:</b> Thursday, December 26, 2024 1:15 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Local cooling of large rough pumps</span></p>
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<p class="x_MsoNormal"><span style="font-size:11.0pt; color:black">Hello Labnetwork --</span></p>
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<p class="x_MsoNormal"><span style="font-size:11.0pt; color:black"><br>
I hope you have had been having a good holiday! </span></p>
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<p class="x_MsoNormal"><span style="font-size:11.0pt; color:black"> <br>
I have a situation where our main facility chiller is offline and for reason beyond our control may be offline for some time. We do not have a facility-scale backup chiller
</span><span style="font-size:11.0pt; font-family:"Segoe UI Emoji",sans-serif; color:black">🙁</span><span style="font-size:11.0pt; color:black">. <br>
<br>
Has anyone implemented local cooling solutions for their plasma tool rough pumps? </span></p>
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<p class="x_MsoNormal"><span style="font-size:11.0pt; color:black">One idea might be to have several individual smaller air cooled<a href="https://urldefense.com/v3/__https://www.smcelectric.com/products/smc-spnhrs050an20/?srsltid=AfmBOooeEziJMZnHJXZuusTW5CAROr0mVf6TMwfapY0K72tJPtqaUb_o__;!!DZ3fjg!7-b6vN-wvHznfwGYzYfmvQ6CO6zD3rhN8uTxJbiwX7sHM5ZKwNn0hmlCKtMd_y7ebf1p7pG3EJTX5--uC7w$" title="https://www.smcelectric.com/products/smc-spnhrs050an20/?srsltid=AfmBOooeEziJMZnHJXZuusTW5CAROr0mVf6TMwfapY0K72tJPtqaUb_o"> SMC-HRS-050
type chillers</a> (or the like) each cooling a single Pfeiffer pump (Such as is used for ICPs and PECVD pumps). </span></p>
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However, I am not certain of what the critical values are to be satisfied, and how to determine if this is even feasible. I am currently looking at the water temperature and flow requirements for the pump at the moment, but do not know if these are the only
considerations. <br>
<br>
If anyone has implemented individual cooling solution for pumps the size of <a href="https://urldefense.com/v3/__https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7__;!!DZ3fjg!7-b6vN-wvHznfwGYzYfmvQ6CO6zD3rhN8uTxJbiwX7sHM5ZKwNn0hmlCKtMd_y7ebf1p7pG3EJTXanMidzA$" title="https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7">
Pfeiffer pumps A604</a><a href="https://urldefense.com/v3/__https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7__;!!DZ3fjg!7-b6vN-wvHznfwGYzYfmvQ6CO6zD3rhN8uTxJbiwX7sHM5ZKwNn0hmlCKtMd_y7ebf1p7pG3EJTXanMidzA$" title="https://www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7"><span style="text-decoration:none">
</span></a>or <a href="https://urldefense.com/v3/__https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je__;!!DZ3fjg!7-b6vN-wvHznfwGYzYfmvQ6CO6zD3rhN8uTxJbiwX7sHM5ZKwNn0hmlCKtMd_y7ebf1p7pG3EJTX2KvhcyQ$" title="https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je">
A124</a><a href="https://urldefense.com/v3/__https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je__;!!DZ3fjg!7-b6vN-wvHznfwGYzYfmvQ6CO6zD3rhN8uTxJbiwX7sHM5ZKwNn0hmlCKtMd_y7ebf1p7pG3EJTX2KvhcyQ$" title="https://www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je"><span style="text-decoration:none">
</span></a>I would love to hear what specific chillers you have used and what your experience of this has been. <br>
<br>
Thanks – and happy new year! <br>
<br>
Best<br>
Sam</span></p>
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<p class="x_MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif; color:#666666">Samantha Roberts PhD</span></p>
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<p class="x_MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif; color:#666666">ASRC Nanofabrication Facility Director</span></p>
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<p class="x_MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif; color:#666666">City University of New York</span></p>
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