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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Hi Philippe,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">My users have not been successful in depositing waveguide-quality nitride at low temperatures. We’re currently fixing some issues with our tool to increase the temperature.
That said, we are also still working through a slew of manufacturing defects on our PlasmaTherm Takachi HDPCVD system that have almost certainly been impacting film quality. The promise of HDPCVD/ICPCVD (same thing, PlasmaTherm’s term versus Oxford’s term)
is that good low-temperature films should be possible, but we’ve not seen this yet. For what it’s worth, Oxford also failed to meet expectations when I requested a trial film.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Are temperatures below 100 C strictly required for your application?<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Best,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Travis Massey<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Center for Micro and Nano Technology (CMNT)<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Lawrence Livermore National Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Philippe Mérel<br>
<b>Sent:</b> Friday, January 17, 2025 12:52 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Low temperature PECVD / ICP-CVD / Remote PECVD<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="color:black">Can you share your experience if you are depositing silicon nitride and / or silicon oxide thin films at low substrate temperature (below 100C) by PECVD or ICP-CVD that have good optical qualities (for waveguide
applications).<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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Which deposition system are you using?<o:p></o:p></li></ol>
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What was the substrate temperature?<o:p></o:p></li></ol>
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<p class="MsoNormal"><span style="color:black">Thank you.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p><b><span style="font-size:14.0pt;font-family:"Calibri",sans-serif;color:#242424">Philippe Mérel
<i>PhD</i></span></b><o:p></o:p></p>
<p style="background:white"><span style="font-family:"Calibri",sans-serif;color:#242424">Coordonnateur Laboratoire Nanotechnologies et Nanosystèmes (LNN)</span><o:p></o:p></p>
<p style="background:white"><span style="font-family:"Calibri",sans-serif;color:#242424">Institut Interdisciplinaire d’Innovation Technologique – 3iT</span><o:p></o:p></p>
<p style="background:white"><b><span style="font-family:"Calibri",sans-serif;color:#242424">Université de Sherbrooke</span></b><o:p></o:p></p>
<p style="background:white"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#242424">(819) 821-8000 x63706</span><o:p></o:p></p>
<p style="background:white"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#242424"><br>
<a href="https://urldefense.us/v3/__https:/www.usherbrooke.ca/3it/__;!!G2kpM7uM-TzIFchu!wm_s02v-xmJIGmDgCyRb3yVy0IJFNbH2QErCbEhoKlVcZqgCZAVhl-f0u6XNmNcsjm3ZY6SFS8L8B28_L7Ok8efGRVTsCMA11w$" target="_blank" title="URL d'origine : https://www.usherbrooke.ca/3it/. Cliquez ou appuyez si vous faites confiance à ce lien.">https://www.usherbrooke.ca/3it/</a></span><o:p></o:p></p>
<p style="background:white"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#242424"><img border="0" width="198" height="68" style="width:2.0625in;height:.7083in" id="Picture_x0020_1" src="cid:image001.png@01DB6904.2A7E5670"></span><o:p></o:p></p>
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