<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
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<style><!--
/* Font Definitions */
@font-face
{font-family:Helvetica;
panose-1:2 11 6 4 2 2 2 2 2 4;}
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0cm;
font-size:11.0pt;
font-family:"Calibri",sans-serif;
mso-fareast-language:EN-US;}
span.EmailStyle17
{mso-style-type:personal-compose;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-family:"Calibri",sans-serif;
mso-fareast-language:EN-US;}
@page WordSection1
{size:612.0pt 792.0pt;
margin:72.0pt 72.0pt 72.0pt 72.0pt;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-CA" link="#0563C1" vlink="#954F72" style="word-wrap:break-word">
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<p class="MsoNormal">Hello colleagues.<o:p></o:p></p>
<p class="MsoNormal">We have a researcher inquiring about BST sputter deposition. Their reference process requires deposition @ 400 deg C 20mtorr Ar/O2 gas pressure.<o:p></o:p></p>
<p class="MsoNormal">Our sputter system does not have heating above ~ 150 deg C at
<u><</u> 15mtorr. Just wondering if anyone out there has a Low temperature/pressure BST sputtering or evaporation process.<o:p></o:p></p>
<p class="MsoNormal">Alternatively I would be curious to know if anyone can run BST depositions as a fee for service.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks <o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Helvetica",sans-serif;mso-fareast-language:EN-CA">Robert Vandusen<br>
Microfabrication Cleanlab Facility Manager<br>
Electronics Department<br>
Carleton University<br>
room: 4184 Mackenzie Building<br>
613-520-2600 ext 5761 Cell 613-791-5761<br>
<a href="mailto:Robert_vandusen@cunet.carleton.ca"><span style="color:purple">Robert_vandusen@cunet.carleton.ca</span></a></span><span style="mso-fareast-language:EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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