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--></style></head><body lang=EN-US link=blue vlink=purple style='word-wrap:break-word'><div class=WordSection1><p class=MsoNormal><span style='font-size:11.0pt'>Hi Sandra,<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt'> Henry from Tystar here. Regarding toxic monitoring of the two Tystar LPCVD’s, our electronics features CCINS (Contact Closure Inputs) that can be connected to your toxic monitor systems that would alarm and disable the reactive gases if the sensor detects levels above the sensors programmed upper limits. Your silicon nitride uses NH3 and SiH2Cl2 sensors the LTO use a SiH4 sensor. These sensors are normally mounted in the exhaust duct in the top of the source gas cabinet. Sometimes customers mount sensors near the load station scavenger exhaust where operators load and unload wafers. In addition, most gas bottle delivery cabinet vendors include toxic monitor sensors in their cabinets. Please contact me directly if you need additional information or have any questions or concerns.<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt'><o:p> </o:p></span></p><div><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-ligatures:standardcontextual'>Best Regards,</span><span style='font-size:11.0pt;mso-ligatures:standardcontextual'><o:p></o:p></span></p><p class=MsoNormal><b><span style='font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-ligatures:standardcontextual'>Henry Heidbreder</span></b><span style='font-size:11.0pt;mso-ligatures:standardcontextual'><o:p></o:p></span></p><p class=MsoNormal><b><span style='font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-ligatures:standardcontextual'>Engineering Manager</span></b><span style='font-size:11.0pt;mso-ligatures:standardcontextual'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D'><img width=96 height=29 style='width:1.0in;height:.302in' id="x_Picture_x0020_7" src="cid:image001.gif@01DB7196.E2988100"></span><span style='font-size:11.0pt;mso-ligatures:standardcontextual'><o:p></o:p></span></p><p class=MsoNormal><b><span style='font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-ligatures:standardcontextual'>7050 Lampson Ave., Garden Grove, Ca. 92841</span></b><span style='font-size:11.0pt;mso-ligatures:standardcontextual'><o:p></o:p></span></p><p class=MsoNormal><b><span style='font-size:13.0pt;font-family:Wingdings;color:#1F497D;mso-ligatures:standardcontextual'>(</span></b><b><span style='font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-ligatures:standardcontextual'> Office: 310-781-9219 ext 213 </span></b><span style='font-size:11.0pt;mso-ligatures:standardcontextual'><o:p></o:p></span></p><p class=MsoNormal><b><span style='font-size:13.0pt;font-family:Wingdings;color:#1F497D;mso-ligatures:standardcontextual'>(</span></b><b><span style='font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-ligatures:standardcontextual'> Cell: 310-618-4019</span></b><span style='font-size:11.0pt;mso-ligatures:standardcontextual'><o:p></o:p></span></p><p class=MsoNormal><b><span style='font-size:13.0pt;font-family:Wingdings;color:#1F497D;mso-ligatures:standardcontextual'>(</span></b><b><span style='font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-ligatures:standardcontextual'> Fax: 310-781-9438</span></b><span style='font-size:11.0pt;mso-ligatures:standardcontextual'><o:p></o:p></span></p><p class=MsoNormal><b><span style='font-size:13.0pt;font-family:Wingdings;color:#1F497D;mso-ligatures:standardcontextual'>*</span></b><b><span style='font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-ligatures:standardcontextual'> <a href="mailto:henryh@tystar.com" title="mailto:Ramon@tystar.com"><span style='color:#1F497D'>henryh@tystar.com</span></a></span></b><span style='font-size:11.0pt;mso-ligatures:standardcontextual'><o:p></o:p></span></p><p class=MsoNormal><b><span style='font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-ligatures:standardcontextual'><a href="http://www.tystar.com/" title="http://www.tystar.com/"><span style='color:#1F497D'>http://www.tystar.com</span></a></span></b><span style='font-size:11.0pt;mso-ligatures:standardcontextual'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;mso-ligatures:standardcontextual'><o:p> </o:p></span></p></div><p class=MsoNormal><span style='font-size:11.0pt'><o:p> </o:p></span></p><div><div style='border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b><span style='font-size:11.0pt;font-family:"Calibri",sans-serif'>From:</span></b><span style='font-size:11.0pt;font-family:"Calibri",sans-serif'> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>On Behalf Of </b>Malhotra, Sandra Guy<br><b>Sent:</b> Tuesday, January 28, 2025 1:11 PM<br><b>To:</b> Fab Network <labnetwork@mtl.mit.edu><br><b>Subject:</b> [labnetwork] Question about toxic gas sensors inside fab<o:p></o:p></span></p></div></div><p class=MsoNormal><o:p> </o:p></p><div><p class=MsoNormal><span style='color:black'>Howdy All,<o:p></o:p></span></p></div><div><p class=MsoNormal><span style='color:black'>We would like to understand the types of toxic gas sensors that are used inside academic fabs near tools or gas lines. These would be in addition to those inside toxic gas cylinder cabinets. <o:p></o:p></span></p></div><div><p class=MsoNormal><span style='color:black'><o:p> </o:p></span></p></div><div><p class=MsoNormal><span style='color:black'>We would appreciate learning which tools/toxic gases are monitored inside your fabs and where the monitors are located. Any assistance would be greatly appreciated!<o:p></o:p></span></p></div><div><p class=MsoNormal><span style='color:black'><o:p> </o:p></span></p></div><div><p class=MsoNormal><span style='color:black'>Thanks for your time,<o:p></o:p></span></p></div><div id=Signature><div><p class=MsoNormal><span style='color:black'><o:p> </o:p></span></p></div><p style='background:white'><b><span style='font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black'>Sandra G. Malhotra, Ph.D. </span></b><span style='font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black'>| Senior Laboratory Manager</span><o:p></o:p></p><p style='background:white'><o:p> </o:p></p><p style='background:white'><i><span style='font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:#0C64C0;background:#FCFBFB'>We would greatly appreciate an acknowledgement of your work in AggieFab: </span></i><i><span style='font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:#0C64C0'>“The nanofabrication was conducted in the Texas A&M University AggieFab Nanofabrication Facility (RRID:SCR_023639), which is supported by the Texas A&M Engineering Experiment Station and Texas A&M University."</span></i><o:p></o:p></p><p style='background:white'><o:p> </o:p></p><p style='background:white'><span style='font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black'>AggieFab Nanofabrication Facility</span><o:p></o:p></p><p style='background:white'><u><span style='font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:blue'><a href="https://aggiefab.tamu.edu/" target="_blank" title="https://aggiefab.tamu.edu/">https://aggiefab.tamu.edu/</a></span></u><o:p></o:p></p><p style='background:white'><span style='font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black'>Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University</span><o:p></o:p></p><p style='background:white'><span style='font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black'>3253 TAMU | College Station, TX 77843</span><o:p></o:p></p><p style='background:white'><span style='font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black'>ph: 979.845.3199 | </span><u><span style='font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:blue'><a href="mailto:sandra.malhotra@tamu.edu">sandra.malhotra@tamu.edu</a></span></u><o:p></o:p></p><p style='background:white'><o:p> </o:p></p><p style='background:white'><span style='font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black'>- - - - - - - - - - - - - - - - - - - - - - - </span><o:p></o:p></p><p style='background:white'><o:p> </o:p></p><p style='background:white'><b><span style='font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:#861106;background:white'>TEXAS A&M UNIVERSITY | FEARLESS on Every Front</span></b><o:p></o:p></p><p style='background:white'><span style='font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:#242424'> </span><o:p></o:p></p><div><p class=MsoNormal><span style='color:black'><o:p> </o:p></span></p></div></div></div></body></html>