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<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Hello Sandra, <o:p>
</o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">At DTU Nanolab we use two types of gas sensors, both containing an electrochemical cartridge: Honeywell MST and Honeywell Midas. The sensors are typically placed in the tool exhaust
– usually in the cabinet containing MFCs for the toxic gases. The rationale behind this placement is that gas leaks in the vicinity of this enclosure will eventually end up being sucked into the exhaust where it will be detected.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">At very critical positions, we have installed additional room sensors that can detect gas leaks when opening a vacuum chamber – we e.g. have a diborane sensor sitting close to our PECVD
chamber. <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">We have approximately 60 sensors. Below is a list of gas sensor types.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">AsH3, arsine<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">B2H6, diborane<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">C4H10. butane<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">CH4, methane<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">Cl2, chlorine<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">CO, carbon monoxide<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">F2, fluorine<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">GeH4, germane<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">H2, hydrogen<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">HBr, hydrogen bromide<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">HCl, hydrogen chloride<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">HF, hydrogen fluoride<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">NH3, ammonia<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">O3, ozone<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">PH3, phosphine<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">SiH4, silane<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">Best regards,
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">Leif<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="line-height:120%"><b><span style="font-family:"Arial",sans-serif;color:black">Leif Steen Johansen<span style="mso-ligatures:standardcontextual"><o:p></o:p></span></span></b></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span lang="EN-US" style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black">Head of Operations, Ph.D.<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span lang="EN-US" style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black"> <o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black">Dir. +45 45 25 57 13<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black">Mob. +45 25 34 89 92<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black"><a href="mailto:lesjo@dtu.dk"><span style="color:black">lesjo@dtu.dk</span></a>
<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black">Ørsteds Plads, Byg. 347<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black">Building 347<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black">2800 Lyngby<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;color:black"><a href="https://www.dtu.dk/english"><span style="color:black">www.dtu.dk/english</span></a>
<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Malhotra, Sandra Guy<br>
<b>Sent:</b> 28. januar 2025 22:11<br>
<b>To:</b> Fab Network <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Question about toxic gas sensors inside fab<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Howdy All,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">We would like to understand the types of toxic gas sensors that are used inside academic fabs near tools or gas lines. These would be in addition to those inside toxic gas cylinder cabinets. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">We would appreciate learning which tools/toxic gases are monitored inside your fabs and where the monitors are located. Any assistance would be greatly appreciated!<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Thanks for your time,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p style="background:white"><b><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black">Sandra G. Malhotra, Ph.D. </span></b><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black">| Senior Laboratory Manager</span><o:p></o:p></p>
<p style="background:white"><o:p> </o:p></p>
<p style="background:white"><i><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:#0C64C0;background:#FCFBFB">We would greatly appreciate an acknowledgement of your work in AggieFab: </span></i><i><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:#0C64C0">“The
nanofabrication was conducted in the Texas A&M University AggieFab Nanofabrication Facility (RRID:SCR_023639), which is supported by the Texas A&M Engineering Experiment Station and Texas A&M University."</span></i><o:p></o:p></p>
<p style="background:white"><o:p> </o:p></p>
<p style="background:white"><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black">AggieFab Nanofabrication Facility</span><o:p></o:p></p>
<p style="background:white"><u><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:blue"><a href="https://aggiefab.tamu.edu/" target="_blank" title="https://aggiefab.tamu.edu/">https://aggiefab.tamu.edu/</a></span></u><o:p></o:p></p>
<p style="background:white"><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black">Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University</span><o:p></o:p></p>
<p style="background:white"><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black">3253 TAMU | College Station, TX 77843</span><o:p></o:p></p>
<p style="background:white"><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black">ph: 979.845.3199 | </span><u><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:blue"><a href="mailto:sandra.malhotra@tamu.edu">sandra.malhotra@tamu.edu</a></span></u><o:p></o:p></p>
<p style="background:white"><o:p> </o:p></p>
<p style="background:white"><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black">- - - - - - - - - - - - - - - - - - - - - - - </span><o:p></o:p></p>
<p style="background:white"><o:p> </o:p></p>
<p style="background:white"><b><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:#861106;background:white">TEXAS A&M UNIVERSITY | FEARLESS on Every Front</span></b><o:p></o:p></p>
<p style="background:white"><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:#242424"> </span><o:p></o:p></p>
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