<div dir="ltr"><div><div class="gmail_default" style="font-family:arial,sans-serif">Sandra,</div><div class="gmail_default" style="font-family:arial,sans-serif"><br></div><div class="gmail_default" style="font-family:arial,sans-serif">Good morning. Here at the University of Michigan LNF facility we're using extractive units for all our gas detection needs. Either a chemical tape (creating an optical stain), or electrochemical cell. We have about 165 points of gas detection ranging from Hydrides, NF3, Ammonia, Oxygen deprivation, to Hydrogen and Methane. We have several locations where we're sampling in breathing air (outside of the clean envelope) so that we can "see" if a gas leak within the envelope will contaminate the larger building. Within the clean envelope, we have very little breathing air detection (our earlier studies show that we have too much air movement for it to be effective). The points we do have in breathing air within the envelope are at the scavenger exhausts at the entry/load stations of our tube furnaces. In addition, within our subfab area, we have some breathing air detection in close proximity to our vacuum pumping stations that support the process tools within the fab.</div><div class="gmail_default" style="font-family:arial,sans-serif"><br></div><div class="gmail_default" style="font-family:arial,sans-serif">Now for the O2 deprivation sensors, those are located primarily outside of the envelope where we have LN2 delivery stations, or usage points (MBE tools). Spots where it would be possible to have an unlimited amount of N2 released.</div><div class="gmail_default" style="font-family:arial,sans-serif"><br></div><div class="gmail_default" style="font-family:arial,sans-serif">Thanks,</div><br clear="all"></div><div><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div>Dennis<span class="gmail_default" style="font-family:arial,sans-serif"> Schweiger</span></div><div><span class="gmail_default" style="font-family:arial,sans-serif">Facilities Manager</span></div><div><span class="gmail_default" style="font-family:arial,sans-serif">Lurie Nanofabrication Facility</span></div><div><span class="gmail_default" style="font-family:arial,sans-serif">University of Michigan</span></div><div> </div><div>734.647.2055 Ofc</div><div> </div><div>"People can be divided into 3 groups - those that make things happen, those that watch things happen, and those that wonder what happened." Within which group do you belong?</div></div></div><br></div><br><div class="gmail_quote gmail_quote_container"><div dir="ltr" class="gmail_attr">On Tue, Jan 28, 2025 at 5:32 PM Malhotra, Sandra Guy <<a href="mailto:sandra.malhotra@tamu.edu">sandra.malhotra@tamu.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div class="msg9218933802851222475">
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Howdy All,</div>
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We would like to understand the types of toxic gas sensors that are used inside academic fabs near tools or gas lines. These would be in addition to those inside toxic gas cylinder cabinets. </div>
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We would appreciate learning which tools/toxic gases are monitored inside your fabs and where the monitors are located. Any assistance would be greatly appreciated!</div>
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Thanks for your time,</div>
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<p style="text-align:left;text-indent:0px;background-color:white"><span style="font-family:"Segoe UI",sans-serif;font-size:10pt;color:black"><b>Sandra G. Malhotra, Ph.D. </b>| Senior Laboratory Manager</span></p>
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<p style="text-align:left;text-indent:0px;background-color:white"><span style="font-size:10pt;color:rgb(12,100,192);background-color:rgb(252,251,251)"><i>We
would greatly appreciate an acknowledgement of your work in AggieFab: </i></span><span style="font-size:10pt;color:rgb(12,100,192)"><i>“The
nanofabrication was conducted in the Texas A&M University AggieFab Nanofabrication Facility (RRID:SCR_023639), which is supported by the Texas A&M Engineering Experiment Station and Texas A&M University."</i></span></p>
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<p style="text-align:left;text-indent:0px;background-color:white"><span style="font-family:"Segoe UI",sans-serif;font-size:10pt;color:black">AggieFab Nanofabrication Facility</span></p>
<p style="text-align:left;text-indent:0px;background-color:white"><span style="font-family:"Segoe UI",sans-serif;font-size:10pt;color:blue"><u><a href="https://aggiefab.tamu.edu/" title="https://aggiefab.tamu.edu/" rel="noopener noreferrer" style="color:blue;margin:0px" target="_blank">https://aggiefab.tamu.edu/</a></u></span></p>
<p style="text-align:left;text-indent:0px;background-color:white"><span style="font-family:"Segoe UI",sans-serif;font-size:10pt;color:black">Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University</span></p>
<p style="text-align:left;text-indent:0px;background-color:white"><span style="font-family:"Segoe UI",sans-serif;font-size:10pt;color:black">3253 TAMU | College Station, TX 77843</span></p>
<p style="text-align:left;text-indent:0px;background-color:white"><span style="font-family:"Segoe UI",sans-serif;font-size:10pt;color:black">ph: 979.845.3199 | </span><span style="font-family:"Segoe UI",sans-serif;font-size:10pt;color:blue"><u><a href="mailto:sandra.malhotra@tamu.edu" style="color:blue;margin:0px" target="_blank">sandra.malhotra@tamu.edu</a></u></span></p>
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<span style="font-family:"Segoe UI",sans-serif;font-size:10pt;color:rgb(134,17,6);background-color:white"><b>TEXAS A&M UNIVERSITY | FEARLESS on Every Front</b></span></p>
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