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<p class="MsoNormal">This greatly depends on the gas you are working with and the equipment.
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<p class="MsoNormal">We are an H-5 Semiconductor facility. We have several HPM’s when in normal operations. For the Acutely Toxic HMP’s we use hydride tape-based systems. I monitor the gas vaults, gas cabinets, cleanroom space and toxic scrubbers for breakthrough
with a CL-96. This tool can detect PPB for Arsine and Phosphine, etc. The TGM’s are provided to us by DOD.
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<p class="MsoNormal">For oxygen displacement and other gases in the PPM range we use PS-7’s with electrochromic modules for a predetermined gas. We have dozens of these around the facility for H2, O2 and other materials as needed. These are also from DOD.
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<p class="MsoNormal">You local and state regulations should give you a baseline to start with. Also look at the SEMI codes for guidance.
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<p class="MsoNormal"><b><span style="color:#002060;text-transform:uppercase">Deon D. Collins<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="color:#002060;text-transform:uppercase"><o:p> </o:p></span></b></p>
<p class="MsoNormal"><span style="color:#002060"><br>
<i>Director of Facilities<o:p></o:p></i></span></p>
<p class="MsoNormal"><i><span style="color:#002060">The Grainger College Of Engineering UIUC</span></i><span style="color:#002060"><br>
</span><span style="color:#002060">Holonyak Micro & Nanotechnology Lab</span><span style="color:#1F497D"><br>
</span><span style="color:#13294B">208 N Wright St Rm. 1114 | MC-249</span><span style="color:#1F497D"><br>
</span><span style="color:#13294B">Urbana, IL 61801</span><span style="color:#1F497D"><br>
</span><span style="color:#13294B">217-300-7531 | </span><span style="color:#1F497D"><a href="mailto:deonc69@illinois.edu"><span style="color:#0563C1">deonc69@illinois.edu</span></a><br>
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</span><a href="http://illinois.edu/"><span style="color:#1F497D;text-decoration:none"><img border="0" width="119" height="21" style="width:1.2395in;height:.2187in" id="Picture_x0020_1" src="cid:image001.png@01DB730F.AC5FBA20"></span></a><span style="color:#1F497D"><br>
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</span><i><span style="color:#666666">Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.
</span></i><span style="color:#002060"><o:p></o:p></span></p>
<p class="MsoNormal"><u><span style="color:#1F497D"><o:p><span style="text-decoration:none"> </span></o:p></span></u></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;color:#A3238B">Life begins at the end of your comfort zone.
<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;color:#A3238B"> Propeck Amanda<o:p></o:p></span></b></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Malhotra, Sandra Guy<br>
<b>Sent:</b> Tuesday, January 28, 2025 3:11 PM<br>
<b>To:</b> Fab Network <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Question about toxic gas sensors inside fab<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Aptos",sans-serif;color:black">Howdy All,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Aptos",sans-serif;color:black">We would like to understand the types of toxic gas sensors that are used inside academic fabs near tools or gas lines. These would be in addition to those inside
toxic gas cylinder cabinets. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Aptos",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Aptos",sans-serif;color:black">We would appreciate learning which tools/toxic gases are monitored inside your fabs and where the monitors are located. Any assistance would be greatly appreciated!<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Aptos",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Aptos",sans-serif;color:black">Thanks for your time,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Aptos",sans-serif;color:black"><o:p> </o:p></span></p>
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<p style="background:white"><b><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black">Sandra G. Malhotra, Ph.D. </span></b><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black">| Senior Laboratory Manager</span><o:p></o:p></p>
<p style="background:white"><o:p> </o:p></p>
<p style="background:white"><i><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:#0C64C0;background:#FCFBFB">We would greatly appreciate an acknowledgement of your work in AggieFab: </span></i><i><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:#0C64C0">“The
nanofabrication was conducted in the Texas A&M University AggieFab Nanofabrication Facility (RRID:SCR_023639), which is supported by the Texas A&M Engineering Experiment Station and Texas A&M University."</span></i><o:p></o:p></p>
<p style="background:white"><o:p> </o:p></p>
<p style="background:white"><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black">AggieFab Nanofabrication Facility</span><o:p></o:p></p>
<p style="background:white"><u><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:blue"><a href="https://urldefense.com/v3/__https:/aggiefab.tamu.edu/__;!!DZ3fjg!57GVNGyjSXuCMGm_zstfIFnPRKdQ3pQfeUbCrLPnbrAzc_yYcva1Mnuw-kguSHE1IRdyI221TZskmHMuPkjVNdDsCZUrx0U$" target="_blank" title="https://aggiefab.tamu.edu/">https://aggiefab.tamu.edu/</a></span></u><o:p></o:p></p>
<p style="background:white"><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black">Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University</span><o:p></o:p></p>
<p style="background:white"><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black">3253 TAMU | College Station, TX 77843</span><o:p></o:p></p>
<p style="background:white"><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black">ph: 979.845.3199 | </span><u><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:blue"><a href="mailto:sandra.malhotra@tamu.edu">sandra.malhotra@tamu.edu</a></span></u><o:p></o:p></p>
<p style="background:white"><o:p> </o:p></p>
<p style="background:white"><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:black">- - - - - - - - - - - - - - - - - - - - - - - </span><o:p></o:p></p>
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<p style="background:white"><b><span style="font-size:10.0pt;font-family:"Segoe UI",sans-serif;color:#861106;background:white">TEXAS A&M UNIVERSITY | FEARLESS on Every Front</span></b><o:p></o:p></p>
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