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Hi Sandra,<br>
<br>
At U Delaware we have 41 sensor monitoring O2 depletion, SiH4, H2,
CH4, Cl2, NH3, BCl3, and F2. They are extractive (sensors sample
the location of interest via a 1/4" plastic tube), electrochemical
type. We monitor both exhausted enclosures and the ambient. The
placement of the sampling tube for the exhausted enclosure is
straightforward, i.e. in the exhaust ductwork. Determining the
placement of the ambient sensors is a bit more challenging; they are
placed in the operator area, typically in close proximity to
loadlocks or the main processing chambers. The oxygen depletion
sensors are placed in the gas room, gas bunker, and the LN2 fill
station.<br>
<br>
Good luck,<br>
<br>
Iulian
<pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
<a class="moz-txt-link-freetext" href="https://udnf.udel.edu">https://udnf.udel.edu</a></pre>
<div class="moz-cite-prefix">On 1/28/2025 4:10 PM, Malhotra, Sandra
Guy wrote:<br>
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Howdy All,</div>
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We would like to understand the types of toxic gas sensors that
are used inside academic fabs near tools or gas lines. These
would be in addition to those inside toxic gas cylinder
cabinets. </div>
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We would appreciate learning which tools/toxic gases are
monitored inside your fabs and where the monitors are located.
Any assistance would be greatly appreciated!</div>
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Thanks for your time,</div>
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<p
style="text-align: left; text-indent: 0px; background-color: white;"><span
style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: black;"><b>Sandra
G. Malhotra, Ph.D. </b>| Senior Laboratory Manager</span></p>
<p
style="text-align: left; text-indent: 0px; background-color: white;"><span
style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: black;"><br>
</span></p>
<p
style="text-align: left; text-indent: 0px; background-color: white;"><span
style="font-family: "Segoe UI", "Segoe UI Web (West European)", -apple-system, BlinkMacSystemFont, Roboto, "Helvetica Neue", sans-serif; font-size: 10pt; color: rgb(12, 100, 192); background-color: rgb(252, 251, 251);"><i>We
would greatly appreciate an acknowledgement of your work
in AggieFab: </i></span><span
style="font-family: "Segoe UI", "Segoe UI Web (West European)", -apple-system, BlinkMacSystemFont, Roboto, "Helvetica Neue", sans-serif; font-size: 10pt; color: rgb(12, 100, 192);"><i>“The
nanofabrication was conducted in the Texas A&M
University AggieFab Nanofabrication Facility
(RRID:SCR_023639), which is supported by the Texas A&M
Engineering Experiment Station and Texas A&M
University."</i></span></p>
<p
style="text-align: left; text-indent: 0px; background-color: white;"><span
style="font-family: "Segoe UI", "Segoe UI Web (West European)", -apple-system, BlinkMacSystemFont, Roboto, "Helvetica Neue", sans-serif; font-size: 10pt; color: rgb(12, 100, 192);"><i><br>
</i></span></p>
<p
style="text-align: left; text-indent: 0px; background-color: white;"><span
style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: black;">AggieFab
Nanofabrication Facility</span></p>
<p
style="text-align: left; text-indent: 0px; background-color: white;"><span
style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: blue;"><u><a
href="https://aggiefab.tamu.edu/" target="_blank"
title="https://aggiefab.tamu.edu/"
rel="noopener noreferrer" data-linkindex="3"
data-auth="NotApplicable"
style="color: blue; margin: 0px;" moz-do-not-send="true"
class="moz-txt-link-freetext">https://aggiefab.tamu.edu/</a></u></span></p>
<p
style="text-align: left; text-indent: 0px; background-color: white;"><span
style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: black;">Department
of Electrical & Computer Engineering, College of
Engineering | Texas A&M University</span></p>
<p
style="text-align: left; text-indent: 0px; background-color: white;"><span
style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: black;">3253
TAMU | College Station, TX 77843</span></p>
<p
style="text-align: left; text-indent: 0px; background-color: white;"><span
style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: black;">ph:
979.845.3199 | </span><span
style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: blue;"><u><a
href="mailto:sandra.malhotra@tamu.edu"
data-linkindex="4" style="color: blue; margin: 0px;"
moz-do-not-send="true" class="moz-txt-link-freetext">sandra.malhotra@tamu.edu</a></u></span></p>
<p
style="text-align: left; text-indent: 0px; background-color: white;"><span
style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: blue;"><br>
</span></p>
<p
style="text-align: left; text-indent: 0px; background-color: white;"><span
style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: black;">-
- - - - - - - - - - - - - - - - - - - - - - </span></p>
<p
style="text-align: left; text-indent: 0px; background-color: white;"><span
style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: black;"><br>
</span></p>
<p
style="text-align: left; text-indent: 0px; background-color: rgb(255, 255, 255);">
<span
style="font-family: "Segoe UI", sans-serif; font-size: 10pt; color: rgb(134, 17, 6); background-color: white;"><b>TEXAS
A&M UNIVERSITY | FEARLESS on Every Front</b></span></p>
<p
style="text-align: left; text-indent: 0px; background-color: rgb(255, 255, 255);">
<span
style="font-family: "Segoe UI", "Segoe UI Web (West European)", -apple-system, BlinkMacSystemFont, Roboto, "Helvetica Neue", sans-serif; font-size: 10pt; color: rgb(36, 36, 36);"> </span></p>
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<br>
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