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<div dir="ltr">Youry</div>
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<div dir="ltr">Once contamination is detected…. Clean clean clean</div>
<div dir="ltr">All metal covers removed and blasted and ultra sonically cleaned </div>
<div dir="ltr">Plus …. Make sure crucibles are not touched even with gloved hands….. always use tweezers</div>
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<span>James Czwakiel</span></p>
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<span>Semiconductor Equipment Engineer</span></p>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Youry Borisenkov <yb2471@columbia.edu><br>
<b>Sent:</b> Friday, January 31, 2025 11:59:09 AM<br>
<b>To:</b> Fab Network <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [EXTERNAL][labnetwork] Gold e-beam deposition - carbon contamination</font>
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<div>Hi All and happy Friday,</div>
<div>I know it is a topic that has been discussed multiple times, however, I'm still lacking a solution that works and will appreciate you sharing your experience.</div>
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<div>Currently we are using a Fabmate crucible, and getting some carbon contamination . </div>
<div>For clean Gold layers we use thermal evaporation. The films are good but it requires a lot of gold.</div>
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<div>So far we tried using a Molybdenum crucible with and without a spacer. The issue with this approach was that eventually after some time, we get carbon contamination back. I believe it's present in the chamber and eventually a critical mass is built on
top of the gold in the crucible, coming from the chamber.</div>
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<div>Were anyone successful in overcoming carbon contamination in their e-beam deposition overtime? </div>
<div>What are the procedures you are following? Maybe cleaning more frequently?</div>
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<div style="color:rgb(136,136,136)">Thank you,</div>
<div style="color:rgb(136,136,136)">Youry Borisenkov</div>
<div style="color:rgb(136,136,136)"><a href="https://cni.columbia.edu/columbia-university-clean-room" target="_blank">CNI</a></div>
<div style="color:rgb(136,136,136)">Columbia University</div>
<div style="color:rgb(136,136,136)">CEPSR 1017, New York, NY, 10027, United States.</div>
<div style="color:rgb(136,136,136)"><a href="https://sustainable.columbia.edu/crown-commuter" target="_blank" style="color:rgb(17,85,204)"><img src="https://sustainable.columbia.edu/sites/default/files/content/crown%20commuter%20badge_0.png" width="96" height="40"></a></div>
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