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</o:shapelayout></xml><![endif]--></head><body lang=EN-US link="#467886" vlink="#96607D"><div class=WordSection1><p class=MsoNormal>The manufacturer claims lifetime over 10K hours. Considering that the LEDs are on for <10 sec. per exposure, I should be retired long before that happens.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>The reality is that these systems are too new to have any statistics. They will certainly last long enough to pay back the cost vs. Hg.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><o:p> </o:p></p><div><p class=MsoNormal>Garry J. Bordonaro<o:p></o:p></p><p class=MsoNormal>Microlithographic Engineer<o:p></o:p></p><p class=MsoNormal>Cornell NanoScale Facility<o:p></o:p></p><p class=MsoNormal>250 Duffield Hall<o:p></o:p></p><p class=MsoNormal>343 Campus Road<o:p></o:p></p><p class=MsoNormal>Ithaca NY 14853-2700<o:p></o:p></p><p class=MsoNormal>(607) 254-4936<o:p></o:p></p><p class=MsoNormal><a href="mailto:bordonaro@cnf.cornell.edu"><span style='color:blue'>bordonaro@cnf.cornell.edu</span></a><o:p></o:p></p><p class=MsoNormal><a href="http://www.cnf.cornell.edu/"><span style='color:blue'>http://www.cnf.cornell.edu/</span></a><o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Please acknowledge CNF in your publications:<o:p></o:p></p><p class=MsoNormal>"This work was performed in part at the Cornell NanoScale Science & Technology Facility (CNF), a member of the National Nanotechnology Coordinated Infrastructure (NNCI), which is supported by the National Science Foundation (Grant NNCI-2025233)."<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><o:p> </o:p></p></div><p class=MsoNormal><o:p> </o:p></p><div><div style='border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b>From:</b> Ryan R Anderson <rrand@ucdavis.edu> <br><b>Sent:</b> Wednesday, February 12, 2025 9:23 AM<br><b>To:</b> 'Nathan Aultman' <naultman@creol.ucf.edu>; labnetwork@mtl.mit.edu; bordonaro@cnf.cornell.edu<br><b>Subject:</b> Re: [labnetwork] Suss MJB4 mask aligner light source<o:p></o:p></p></div></div><p class=MsoNormal><o:p> </o:p></p><div><p class=MsoNormal><span style='font-size:12.0pt;font-family:Aptos;color:black'>Hi Garry,<o:p></o:p></span></p></div><div><p class=MsoNormal><span style='font-size:12.0pt;font-family:Aptos;color:black'><br>Do you (or anyone else out there) know what is the expected lifetime of these LED UV light sources?<o:p></o:p></span></p></div><div><p class=MsoNormal><span style='font-size:12.0pt;font-family:Aptos;color:black'><br>Thank you<o:p></o:p></span></p></div><div><p class=MsoNormal><span style='font-size:12.0pt;font-family:Aptos;color:black'><o:p> </o:p></span></p></div><div><p class=MsoNormal><span style='font-size:12.0pt;font-family:Aptos;color:black'><o:p> </o:p></span></p></div><div id=Signature><p style='background:white'><span style='color:#201F1E'>Ryan Anderson</span><o:p></o:p></p><p style='background:white'><span style='color:#201F1E'>Manager, Center for Nano-Micro Manufacturing</span><o:p></o:p></p><p style='background:white'><span style='color:black'>1209 Kemper Hall<br>University of California Davis<br>One Shields Avenue<br>Davis, CA 95616</span><o:p></o:p></p><p style='background:white'><span style='color:black'> </span><o:p></o:p></p><p style='background:white'><span style='color:black'>Phone: 530-601-3943</span><o:p></o:p></p><p style='background:white'><span style='color:black'>Email: </span><span style='color:#954F72'><a href="mailto:rrand@ucdavis.edu" target="_blank"><span style='color:#954F72'>rrand@ucdavis.edu</span></a></span><o:p></o:p></p><p style='background:white'><span style='color:#954F72'><a href="https://cnm2.ucdavis.edu/" target="_blank"><span style='color:#954F72'>https://cnm2.ucdavis.edu/</span></a></span><o:p></o:p></p><p> <o:p></o:p></p><p> <o:p></o:p></p></div><div class=MsoNormal align=center style='text-align:center'><hr size=2 width="98%" align=center></div><div id=divRplyFwdMsg><p class=MsoNormal><b><span style='color:black'>From:</span></b><span style='color:black'> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>> on behalf of Garry J. Bordonaro <<a href="mailto:bordonaro@cnf.cornell.edu">bordonaro@cnf.cornell.edu</a>><br><b>Sent:</b> Tuesday, February 11, 2025 6:47 AM<br><b>To:</b> 'Nathan Aultman' <<a href="mailto:naultman@creol.ucf.edu">naultman@creol.ucf.edu</a>>; <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a> <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br><b>Subject:</b> Re: [labnetwork] Suss MJB4 mask aligner light source</span> <o:p></o:p></p><div><p class=MsoNormal> <o:p></o:p></p></div></div><div><div><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'>Nathan,</span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'> </span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'>We replaced out Hg lamp in our MA6 with a LED unit from Idonus. We have 3 wavelengths, each individually adjustable in intensity. We have had no issues other than it gets confused by a power outage requiring a manual restart (press button) and the actual exposure time seems offset by one second. We have been very happy that we made the switch. The swap can be done in-house in a day, but we had an experienced tech do it for us.</span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'> </span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'> </span><o:p></o:p></p><div><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'>Garry J. Bordonaro</span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'>Microlithographic Engineer</span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'>Cornell NanoScale Facility</span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'>250 Duffield Hall</span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'>343 Campus Road</span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'>Ithaca NY 14853-2700</span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'>(607) 254-4936</span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'><a href="mailto:bordonaro@cnf.cornell.edu"><span style='color:blue'>bordonaro@cnf.cornell.edu</span></a></span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'><a href="http://www.cnf.cornell.edu/"><span style='color:blue'>http://www.cnf.cornell.edu/</span></a></span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'> </span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'>Please acknowledge CNF in your publications:</span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'>"This work was performed in part at the Cornell NanoScale Science & Technology Facility (CNF), a member of the National Nanotechnology Coordinated Infrastructure (NNCI), which is supported by the National Science Foundation (Grant NNCI-2025233)."</span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'> </span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'> </span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'> </span><o:p></o:p></p></div><p class=xmsonormal><span style='font-family:"Calibri",sans-serif'> </span><o:p></o:p></p><div><div style='border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in'><p class=xmsonormal><b><span style='font-family:"Calibri",sans-serif'>From:</span></b><span style='font-family:"Calibri",sans-serif'> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>> <b>On Behalf Of </b>Nathan Aultman<br><b>Sent:</b> Monday, February 10, 2025 4:21 PM<br><b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br><b>Subject:</b> [labnetwork] Suss MJB4 mask aligner light source</span><o:p></o:p></p></div></div><p class=xmsonormal> <o:p></o:p></p><p class=xmsonormal>Hello Labnetwork,<o:p></o:p></p><p class=xmsonormal> <o:p></o:p></p><p class=xmsonormal>We have a Suss Microtec MJB4 contact mask aligner at one of our labs. We have been told that there is a Suss LED upgrade available. Have any of your labs purchased such an upgrade either from Suss or from a second source supplier to replace your mercury arc lamps? <o:p></o:p></p><p class=xmsonormal> <o:p></o:p></p><p class=xmsonormal>Greatly appreciate any thoughts or suggestions…<o:p></o:p></p><p class=xmsonormal> <o:p></o:p></p><p class=xmsonormal><span style='font-family:"Times New Roman",serif'>Nathan C. Aultman</span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Times New Roman",serif'>University of Central Florida</span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Times New Roman",serif'>407-823-6852</span><o:p></o:p></p><p class=xmsonormal><span style='font-family:"Times New Roman",serif'><a href="mailto:naultman@creol.ucf.edu"><span style='color:#0563C1'>naultman@creol.ucf.edu</span></a></span><o:p></o:p></p><p class=xmsonormal> <o:p></o:p></p></div></div></div></body></html>