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<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US">Hi Grant,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US">After consulting with my team cc’d here, there may be two possible reasons that perhaps facilitate this separation:<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
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<span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif;mso-fareast-language:EN-US">Avoiding potential contamination, ease of cleanup etc.<o:p></o:p></span></li><li class="MsoListParagraph" style="color:#0070C0;margin-left:0cm;mso-list:l1 level1 lfo3">
<span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif;mso-fareast-language:EN-US">E-Beam resist is not sensitive to light, thus you’d prefer working under natural lighting conditions (i.e., white light), whereas photoresist (PR) is sensitive
to white light (incl. UV) and this is why yellow lightning is a must. To avoid situations where one may bring PR coated wafer into E-beam spinner that works at the environment of white light, physical separation between the two is necessary.<o:p></o:p></span></li></ol>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US">Best,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US">Golan.
<o:p></o:p></span></p>
<p class="MsoListParagraph"><span lang="EN-US" style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:#1F497D"><img width="81" height="90" style="width:.8437in;height:.9375in" id="Picture_x0020_3" src="cid:image001.jpg@01DB82E8.3CED4D90"></span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-ligatures:standardcontextual"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual">Golan A. Tanami, PhD</span></b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual">
<b>| </b>Head of the Unit for Nanofabrication (UNF)<o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual"><o:p> </o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual">Center for Nanoscience and Nanotechnology<span lang="HE" dir="RTL"><o:p></o:p></span></span></b></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual">Edmond J. Safra Campus<span lang="HE" dir="RTL"><br>
</span>The Hebrew University of Jerusalem<span lang="HE" dir="RTL"><br>
</span>T +972.2.6584179 | M +972.50.9891111</span><span lang="HE" dir="RTL" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#0070C0;mso-ligatures:standardcontextual"><br>
</span><span dir="RTL"><a href="mailto:golant@savion.huji.ac.il"><span lang="EN-US" dir="LTR" style="font-family:"Calibri",sans-serif;mso-ligatures:standardcontextual">golant</span><span lang="EN-US" dir="LTR" style="font-size:10.0pt;font-family:"Arial",sans-serif;mso-ligatures:standardcontextual">@savion.huji.ac.il</span></a></span><span lang="HE" dir="RTL" style="font-family:"Arial",sans-serif;color:#1F497D;mso-ligatures:standardcontextual"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-ligatures:standardcontextual">Website:
</span><a href="https://nano.huji.ac.il/UNF"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:standardcontextual">https://nano.huji.ac.il/UNF</span></a><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-ligatures:standardcontextual"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Grant Shao<br>
<b>Sent:</b> Wednesday, February 19, 2025 4:27 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Photoresist and Ebeam Resist In Same Spinner?<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black">Hello Labnetwork,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black">I'm wondering if there's a chemical reason for having dedicated spinners to keep photoresist and ebeam resist separated. I think quite a few of the university nanofabs do this,
but wondering what the rationale is. Is there some sort of chemical reaction that makes it more likely to contaminate or harder to clean up?<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black">Thanks,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black">Grant<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:#333333">--<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:#333333">Grant Shao<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:#333333">Nanofabrication Operations Manager<o:p></o:p></span></p>
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<p class="MsoNormal"><a href="http://snsf.stanford.edu/"><span style="font-family:"Calibri",sans-serif;color:#333333">Stanford Nano Shared Facilities</span></a><span style="font-family:"Calibri",sans-serif;color:#333333"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:#333333"><o:p> </o:p></span></p>
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<p class="MsoNormal"><a href="mailto:shaog@stanford.edu"><span style="font-family:"Calibri",sans-serif;color:#333333">shaog@stanford.edu</span></a><span style="font-family:"Calibri",sans-serif;color:#333333"> | 650.441.9042<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:#333333">Spilker Building, Room 004<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:#333333">348 Via Pueblo<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:#333333">Stanford, CA 94305-4088<o:p></o:p></span></p>
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