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<p class="MsoNormal"><span style="font-size:11.0pt">The other consideration is your bowl cleaning protocols after each spin. Some resists will precipitate when mixed with common cleaning solvents like acetone or PGMEA / ethyl lactate, which can make cleaning
harder or if your bowl has a drain, can lead to a clogged line. So even typical “photoresist-like” materials such as PGMI based LOR, which is in a different solvent than most photoresists, can be an issue to mix. At Cornell we developed solvent “classes” based
on this sensitivity to precipitate and grouped spinners to avoid clogged drain lines. A lot of grad students will assume acetone will dissolve everything…<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Now if you don’t rinse your bowls with solvent to clean the spun off resist down a drain, that mixing may not be an issue.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual">Dan<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual">Daniel Woodie<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual">Director, Micro/Nano Fabrication Center, Princeton Materials Institute<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Golan Tanami<br>
<b>Sent:</b> Wednesday, February 19, 2025 9:25 AM<br>
<b>To:</b> Grant Shao <shaog@stanford.edu>; labnetwork@mtl.mit.edu<br>
<b>Cc:</b> Galina Chechelnitsky <galinac@savion.huji.ac.il>; yuval.yanushpolsk@mail.huji.ac.il; itzhak.shweky@mail.huji.ac.il<br>
<b>Subject:</b> Re: [labnetwork] Photoresist and Ebeam Resist In Same Spinner?<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0">Hi Grant,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0">After consulting with my team cc’d here, there may be two possible reasons that perhaps facilitate this separation:<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0"><o:p> </o:p></span></p>
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<span style="font-size:11.0pt;font-family:"Arial",sans-serif">Avoiding potential contamination, ease of cleanup etc.<o:p></o:p></span></li><li class="MsoListParagraph" style="color:#0070C0;margin-left:0in;mso-list:l1 level1 lfo3">
<span style="font-size:11.0pt;font-family:"Arial",sans-serif">E-Beam resist is not sensitive to light, thus you’d prefer working under natural lighting conditions (i.e., white light), whereas photoresist (PR) is sensitive to white light (incl. UV) and this
is why yellow lightning is a must. To avoid situations where one may bring PR coated wafer into E-beam spinner that works at the environment of white light, physical separation between the two is necessary.<o:p></o:p></span></li></ol>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0">Best,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0">Golan.
<o:p></o:p></span></p>
<p class="MsoListParagraph"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:#1F497D"><img width="81" height="90" style="width:.8437in;height:.9375in" id="Picture_x0020_3" src="cid:image001.jpg@01DB82C8.F057D640"></span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-ligatures:standardcontextual"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual">Golan A. Tanami, PhD</span></b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual">
<b>| </b>Head of the Unit for Nanofabrication (UNF)<o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual"><o:p> </o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual">Center for Nanoscience and Nanotechnology</span></b><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual"><o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual">Edmond J. Safra Campus</span><span lang="HE" dir="RTL" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual"><br>
</span><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual">The Hebrew University of Jerusalem</span><span lang="HE" dir="RTL" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual"><br>
</span><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual">T +972.2.6584179 | M +972.50.9891111</span><span lang="HE" dir="RTL" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#0070C0;mso-ligatures:standardcontextual"><br>
</span><span lang="AR-SA" dir="RTL"><a href="mailto:golant@savion.huji.ac.il"><span lang="EN-US" dir="LTR" style="font-family:"Calibri",sans-serif;mso-ligatures:standardcontextual">golant</span><span lang="EN-US" dir="LTR" style="font-size:10.0pt;font-family:"Arial",sans-serif;mso-ligatures:standardcontextual">@savion.huji.ac.il</span></a></span><span lang="HE" dir="RTL" style="font-family:"Arial",sans-serif;color:#1F497D;mso-ligatures:standardcontextual"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-ligatures:standardcontextual">Website:
</span><a href="https://nano.huji.ac.il/UNF"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:standardcontextual">https://nano.huji.ac.il/UNF</span></a><span lang="AR-SA" dir="RTL" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-ligatures:standardcontextual"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Grant Shao<br>
<b>Sent:</b> Wednesday, February 19, 2025 4:27 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Photoresist and Ebeam Resist In Same Spinner?<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black">Hello Labnetwork,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black">I'm wondering if there's a chemical reason for having dedicated spinners to keep photoresist and ebeam resist separated. I think quite a few of the university nanofabs do this,
but wondering what the rationale is. Is there some sort of chemical reaction that makes it more likely to contaminate or harder to clean up?<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black">Thanks,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black">Grant<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:#333333">--<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:#333333">Grant Shao<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:#333333">Nanofabrication Operations Manager<o:p></o:p></span></p>
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<p class="MsoNormal"><a href="http://snsf.stanford.edu/"><span style="font-family:"Calibri",sans-serif;color:#333333">Stanford Nano Shared Facilities</span></a><span style="font-family:"Calibri",sans-serif;color:#333333"><o:p></o:p></span></p>
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<p class="MsoNormal"><a href="mailto:shaog@stanford.edu"><span style="font-family:"Calibri",sans-serif;color:#333333">shaog@stanford.edu</span></a><span style="font-family:"Calibri",sans-serif;color:#333333"> | 650.441.9042<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:#333333">Spilker Building, Room 004<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:#333333">348 Via Pueblo<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:#333333">Stanford, CA 94305-4088<o:p></o:p></span></p>
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