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Hi Travis,<br>
<br>
In the two cleanrooms I helped build I had a number of exhaust
systems:<br>
-Two for the cleanroom itself<br>
-One for the gas room<br>
-One for the gas bunker.<br>
<br>
Each exhaust system has at least two fans for capacity and n+1
redundancy.<br>
<br>
Folks use different names for the two exhaust systems typically used
for the tools and hoods in cleanroom but a simple way to look at it
is by focusing on the fume hoods:<br>
-One is for corrosives; typically teflon-coated SS but I have
plastic too (not my favorite)<br>
-One is for solvents; typically SS but I have seen galvanized steel
too (not my favorite)<br>
<br>
When hooking up tools to the exhaust system you decide based on what
kind of gases those tools will process; e.g. an evaporator ties to
the solvent exhaust and a PECVD to the corrosive exhaust.<br>
<br>
You have to keep in mind your local codes and the input of the
authority having jurisdiction. EHS may be a good resource to support
your efforts to perhaps go above the minimum requirements; when
designing/building those labs my mindset was that I was going to
live with them until I retired. We all know that it's easier/cheaper
to put things in place when you build new rather than adding them
later.<br>
<br>
Good luck!<br>
<br>
<br>
<pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
<a class="moz-txt-link-freetext" href="https://udnf.udel.edu">https://udnf.udel.edu</a></pre>
<div class="moz-cite-prefix">On 2/24/2025 9:23 PM, Massey, Travis
wrote:<br>
</div>
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<p class="MsoNormal"><span
style="font-family:"Calibri",sans-serif">Hi all,<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span
style="font-family:"Calibri",sans-serif">LLNL is
planning a significant cleanroom expansion, and the question
arose whether we
<i>need</i> separate exhaust for hoods and tools/gases, or
if they can be combined into a single shared exhaust. Or do
you have a single exhaust with 2+ exhaust fans pulling
simultaneously, so there’s always
<i>some </i>exhaust air moving if one fan is down? The
conventional wisdom around here has its share of holes, so
I’m out to learn from the broader nanofab cleanroom
community. How are your cleanrooms’ exhaust systems are
configured, especially if you’ve had to go down this
cleanroom design rabbit hole?<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span
style="font-family:"Calibri",sans-serif">I’m also
broadly open
<i>any</i> other lessons learned regarding provisioning
exhaust or other utilities – whatever you feel like
sharing. Too much information during the design phase is
far better than too little.<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-family:"Calibri",sans-serif"><br>
Thanks,<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-family:"Calibri",sans-serif">Travis
Massey<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-family:"Calibri",sans-serif">Center
for Micro and Nano Technology (CMNT)<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-family:"Calibri",sans-serif">Lawrence
Livermore National Laboratory (LLNL)<o:p></o:p></span></p>
</div>
<br>
<fieldset class="moz-mime-attachment-header"></fieldset>
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</pre>
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