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<p class="MsoNormal">Hi,<o:p></o:p></p>
<p class="MsoNormal">I am looking for a (hopefully established) source to deposit ALD copper on Though-Glass Vias.
<o:p></o:p></p>
<p class="MsoNormal">The vias are about 20um in diameter with an aspect ratio of about 10:1.
<o:p></o:p></p>
<p class="MsoNormal">I would also consider Cu electroplating( after an appropriate ALD adhesion/base layer), but I’m not sure how feasible that is given the via diameter and aspect ratio.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks for your help!<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Larry<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="mso-ligatures:none">Larry A. Hess, PhD<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:none">NASA<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:none">Goddard Space Flight Center<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:none">8800 Greenbelt Road<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:none">Code 553, Detector Systems Branch<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:none">Building 11, Room E011<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:none">Greenbelt, MD 20771<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:none">301-286-0259 (P)<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:none">301-286-1672 (F) <o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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