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<p>Dear Nicki,</p>
<p><br>
</p>
<p>We had a similar issue with an old Zeiss 982 a while ago. Besides
the strange rotation, we also observed a substantial difference in
actual focus vs. shown WD.<br>
</p>
<p><br>
</p>
<p>A few things that you can do before you replace the 8kV power
supply:</p>
<p><br>
</p>
<p>In case of our DSM 982 Gemini column, the liner tube can slide
down and can create a short to ground with the end cap of the
objective lense. You can carefully remove the end cap and check,
wether or not the liner tube is sticking out a little bit,
touching the cap. This can happen over time, or if the system was
moved recently.<br>
</p>
<p><br>
</p>
<p>Also, if there are other devices using 8kV, e.g. a beam blanking
unit, you might want to unplug them (including the inlense) and
test without them being connected.</p>
<p><br>
</p>
<p>We found that a high voltage relais didn't work properly.</p>
<p><br>
</p>
<p>I hope this helps.</p>
<p><br>
</p>
<p>Philipp<br>
</p>
<p><br>
</p>
<p><br>
</p>
<p><br>
</p>
<p><br>
</p>
<p><br>
</p>
<div class="moz-cite-prefix">Am 03.03.2025 um 23:08 schrieb Nicki
Shaw:<br>
</div>
<blockquote type="cite"
cite="mid:YT2PR01MB8853847CB13A5B223161942BB8C92@YT2PR01MB8853.CANPRD01.PROD.OUTLOOK.COM">
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Hello,</div>
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We are troubleshooting a SEM column issue on our FIB-SEM
following a planned power interruption. In short, any advice
regarding the disassembly of a
<b>Gemini SEM column </b>or liner tube
troubleshooting/maintenance would be greatly appreciated.</div>
<div class="elementToProof"
style="text-align: left; text-indent: 0px; background-color: rgb(255, 255, 255); margin: 1em 0px; font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: black;">
The tool in question is a ZEISS Auriga 40, and we have observed
the following:</div>
<ul
style="text-align: left; background-color: rgb(255, 255, 255);">
<li
style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: black;">
<div style="margin: 0px;">The SEM image is significantly
rotated relative to the expected alignment, despite the scan
rotation being off.</div>
</li>
<li
style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: black;">
<div style="margin: 0px;">The Inlens detector does not get a
signal, but the SESI detector gets a signal with some
apertures. The emission view shows that the apertures are
significantly misaligned, despite no manual changes being
performed.</div>
</li>
<li
style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: black;">
<div style="margin: 0px;">The image rotation improves as SEM
voltage is increased, becoming nearly correct at 21 kV—at
which point the liner tube shuts off.</div>
</li>
</ul>
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During troubleshooting, we measured the liner tube voltage:</div>
<ul
style="text-align: left; background-color: rgb(255, 255, 255);">
<li
style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: black;">
When running the liner without connecting it to the column
(with a resistor in place to draw current), the voltage ramps
normally.</li>
<li
style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: black;">
When the liner is connected to the column, the voltage
plateaus at 600–700 V instead of reaching the expected 8000 V.</li>
</ul>
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We have checked:</div>
<ul
style="text-align: left; background-color: rgb(255, 255, 255);">
<li
style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: black;">
The liner tube cable and relay box connections.</li>
<li
style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: black;">
The power module and associated lens control boards.</li>
</ul>
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Given these observations, it seems likely that there is a
voltage leak inside the column affecting the liner tube voltage.
Has anyone encountered a similar issue, or can provide insight
into further troubleshooting steps? We are considering opening
the column to check for a short but have not attempted any
disassembly other than replacing the filament.</div>
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Any advice would be greatly appreciated!</div>
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All the best,<br>
Nicki</div>
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