<div dir="ltr"><div><div class="gmail_default" style="font-family:arial,sans-serif">Joe,</div><div class="gmail_default" style="font-family:arial,sans-serif"><br></div><div class="gmail_default" style="font-family:arial,sans-serif">As most others have stated, your question, though simple at first mention, is really made up of a complex set of answers. I've installed and modified hundreds of gas cabinets over the years (at universities and outside companies), everything from simple metal boxes, to completely automated HPM delivery cabinets. If this was my fab, I'd lean towards only installing the cabinets you require now, with the level of complexity you require now. My experience in trying to "future proof" a gas delivery system install is that there'll be enough difference between what you think you need now, and what you need then, that a good portion of the work will need to be done again. Now, that doesn't mean you shouldn't have a long term plan for cabinet placement/support, and gas line routing. You definitely want to consider where you're putting things (or will put), and how you're going to get from point A to B. I second the mention that you want to make sure you hire a contractor that not only understands orbital welding, but that they have some experience with semiconductor gases/tools. Some of these gases only give you one chance to get it correct. I'd also look at trying to standardize with a single vendor for your cabinets. It gives you a great customer relationship, and there is a commonality of parts, and operation, that makes it easier to train on the operation/function of the cabinets.</div><div class="gmail_default" style="font-family:arial,sans-serif"><br></div><div class="gmail_default" style="font-family:arial,sans-serif">As a brand new fab, there is some benefit to having that gas delivery capability (welding, bending, install) in house. Here at UofM we have had that capability for the lifetime of the fab (almost 40 years). Not always the same body, but that capability.</div><div class="gmail_default" style="font-family:arial,sans-serif"><br></div><div class="gmail_default" style="font-family:arial,sans-serif">I'd be happy to answer any additional questions you might have. Feel free to give me a call, or even stop by if you'd like. What we have installed here at UofM won't work for everyone, but we've gone to great lengths to make our facility very safe.</div><div class="gmail_default" style="font-family:arial,sans-serif"><br></div><div class="gmail_default" style="font-family:arial,sans-serif">Good luck with your new fab,</div><br clear="all"></div><div><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div>Dennis<span class="gmail_default" style="font-family:arial,sans-serif"> Schweiger</span></div><div><span class="gmail_default" style="font-family:arial,sans-serif">Facilities Manager</span></div><div><span class="gmail_default" style="font-family:arial,sans-serif">Lurid Nanofabrication Facility</span></div><div><span class="gmail_default" style="font-family:arial,sans-serif">University of Michigan</span></div><div> </div><div>734.647.2055 Ofc</div></div></div></div><br><div class="gmail_quote gmail_quote_container"><div dir="ltr" class="gmail_attr">On Tue, Mar 4, 2025 at 4:22 PM Joseph Losby <<a href="mailto:joseph.losby@ucalgary.ca">joseph.losby@ucalgary.ca</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div class="msg-1019905327129263274">
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Dear Labnetwork, </div>
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We are currently in the design development phase of constructing a cleanroom facility. The intention is to have about 40-50% of the cleanroom unused on opening day that is reserved for future tools. Although we have scoped out what future equipment we wish
to acquire, they are not finalized.</div>
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Our contractors wish to install the gas cabinets (they are included in the project budget) for both the currently scoped and future tools. Because the cabinet configurations are equipment dependent (most will be for RIE and CVD/dep tools), we are trying to
decide if it's worth the contractors installing 'generic' cabinets for future tools that we can configure ourselves (install gas monitoring, safety showers, etc). </div>
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Do you feel this is a feasible approach and if so, what would you install? Or, would you rather install the cabinets yourselves entirely? </div>
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Cheers,</div>
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Joe</div>
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<p style="text-align:left;margin:0px"><span style="font-family:Calibri,Calibri_EmbeddedFont,Calibri_MSFontService,sans-serif;font-size:10pt;color:rgb(214,0,28);line-height:17px"><b>Joseph Losby, PhD</b></span></p>
<p style="text-align:left;margin:0px"><span style="font-family:Calibri,Calibri_EmbeddedFont,Calibri_MSFontService,sans-serif;font-size:13.3333px;color:rgb(0,0,0);background-color:rgb(255,255,255);line-height:17px"><b>Manager, qLab Operations</b></span></p>
<p style="text-align:left;margin:0px"><span style="font-family:Calibri,Calibri_EmbeddedFont,Calibri_MSFontService,sans-serif;font-size:10pt;color:rgb(0,0,0);line-height:17px"><b><a href="mailto:joseph.losby@ucalgary.ca" target="_blank">joseph.losby@ucalgary.ca</a></b></span></p>
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<p style="text-align:left;margin:0px"><span style="font-family:"Segoe UI","Segoe UI Web",Arial,Verdana,sans-serif;font-size:12px;color:rgb(0,0,0)"><a href="https://io.ucalgary.ca/quantum-city" id="m_-1019905327129263274OWAdf405426-399e-33db-7cc5-5481c23abb2e" title="https://io.ucalgary.ca/quantum-city" style="text-decoration:none;margin-top:0px;margin-bottom:0px" target="_blank"><img id="m_-1019905327129263274imageSelected0_0" width="214" height="71" style="width: 214px; height: 71px; margin: 0px;" src="cid:ii_19566f146ebb51216ba1"></a></span><span style="font-family:Calibri,Calibri_EmbeddedFont,Calibri_MSFontService,sans-serif;font-size:12pt;color:rgb(0,0,0);line-height:19px"> </span></p>
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