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Hi Joe,<br>
<br>
In the two cleanrooms I helped build there was a clear separation
between Base Build and Tool Install (separate projects). For all
four projects we hired design and construction teams. I had it done
both ways; in the first one the gas equipment (gas cabinets and
VMBs) was installed during the Base Build and in the second during
the Tool Install.<br>
<br>
During the design phase of each Base Build I developed a pretty good
idea of what the tool set would be (which helped develop the Utility
Matrix) and where they would be located (which drove the Cleanroom
Layout). Of course, the final set was not exactly what I had
envisioned but it came close.<br>
<br>
If I had to do it again I would probably lean towards installing the
gas equipment during the Tool Install, by professionals. One of the
reasons is that by then the tool set would be better defined. During
the Base Build I would make sure that I would size the support
systems (e.g. exhaust, power, N2, fire suppression) adequately based
on a very educated guess of the tool set. I would also have the
required utility "taps" provided during the Base Build. Also during
Base Build, I would want to put in place a TGMS with a robust
"backbone" to support the needs of the tools and gas equipment.<br>
<br>
Cheers!<br>
<pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
<a class="moz-txt-link-freetext" href="https://udnf.udel.edu">https://udnf.udel.edu</a></pre>
<div class="moz-cite-prefix">On 3/4/2025 12:39 PM, Joseph Losby
wrote:<br>
</div>
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Dear Labnetwork, </div>
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We are currently in the design development phase of constructing
a cleanroom facility. The intention is to have about 40-50% of
the cleanroom unused on opening day that is reserved for future
tools. Although we have scoped out what future equipment we
wish to acquire, they are not finalized.</div>
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<br>
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Our contractors wish to install the gas cabinets (they are
included in the project budget) for both the currently scoped
and future tools. Because the cabinet configurations are
equipment dependent (most will be for RIE and CVD/dep tools), we
are trying to decide if it's worth the contractors installing
'generic' cabinets for future tools that we can configure
ourselves (install gas monitoring, safety showers, etc). </div>
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<br>
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Do you feel this is a feasible approach and if so, what would
you install? Or, would you rather install the cabinets
yourselves entirely? </div>
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Cheers,</div>
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Joe</div>
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<br>
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<br>
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<div id="Signature" style="color: inherit;">
<div style="background-color: rgb(255, 255, 255); margin: 0px;">
<p style="text-align: left; margin: 0px;"><span
style="font-family: Calibri, Calibri_EmbeddedFont, Calibri_MSFontService, sans-serif; font-size: 10pt; color: rgb(214, 0, 28); line-height: 17px;"><b>Joseph
Losby, PhD</b></span></p>
<p style="text-align: left; margin: 0px;"><span
style="font-family: Calibri, Calibri_EmbeddedFont, Calibri_MSFontService, sans-serif; font-size: 13.3333px; color: rgb(0, 0, 0); background-color: rgb(255, 255, 255); line-height: 17px;"><b>Manager,
qLab Operations</b></span></p>
<p style="text-align: left; margin: 0px;"><span
style="font-family: Calibri, Calibri_EmbeddedFont, Calibri_MSFontService, sans-serif; font-size: 10pt; color: rgb(0, 0, 0); line-height: 17px;"><b><a class="moz-txt-link-abbreviated" href="mailto:joseph.losby@ucalgary.ca">joseph.losby@ucalgary.ca</a></b></span></p>
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