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Brian:</div>
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When MIT had 1 ebeam tool I spent from 60-90% of my time managing it. When we got a second tool I did not have enough time to manage both, so we hired a second person who also spends 60-90% of their time managing the new tool. We also train users to independently
use the tool. We spend 4-6 hours in 2 sessions to train users, with another 2 hours needed for training on alignment procedures.</div>
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To use all the capabilities of an ebeam tool I think you need at least 50% FTE. Of course these opinions come from use at MIT where we have >60 active users currently.</div>
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Regards,</div>
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Mark K Mondol </div>
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Mark K Mondol</div>
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Domain Expert - e-Beam Lithography</div>
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mondol@mit.edu</div>
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cell - 617-224-8756</div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Jing Guo <jg78@rice.edu><br>
<b>Sent:</b> Thursday, March 6, 2025 3:25 PM<br>
<b>To:</b> Brian Baker <bbaker@eng.utah.edu><br>
<b>Cc:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] EBL Staffing and Support</font>
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<div style="line-break:after-white-space">Hi Brian,
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</div>
<div>Congrats to your new EBL system!</div>
<div><br>
</div>
<div>We only have one dedicated EBL system (Elionix ESL-G100) since 2018. We purchased the system with 3 year warranty and 4 more years service contracts. I am the major scientist in charge of the system. At the same time I am also in charge of all lithography
systems and some other instruments in our cleanroom. Most time I train users to use the EBL independently. Each training takes 6-7 hours total. It will need another session (1-1.5hrs) for alignment training for experienced users. We welcome process/fabrication
discussions any time from our users. </div>
<div><br>
</div>
<div>The service contract covers an annual PM (e-gun exchange every year). Usually PM takes about 2 weeks. Those two weeks were almost all the down time for our system for the last 6 years. When beam memory drifts a lot. Elionix service engineer will remotely
calibrate all memories. </div>
<div><br>
</div>
<div>This type of the system must be in charged by a staff so that all the operation procedure is set up correctly and can be kept consistent. I learned that some institute who has the same system had experienced several major failures in the first 6 months
after installation which were caused by user errors. </div>
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<div>Let me know if you need more information. </div>
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<div>Best,</div>
<div>Jing </div>
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<div>---------------------------------------<br>
Jing Guo Ph.D.<br>
Cleanroom Manager/Research Scientist<br>
SEA Cleanroom (SST 017)<br>
Rice University<br>
Houston, TX <br>
jeanne.guo@rice.edu<br>
713-348-8227</div>
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<div><br>
<blockquote type="cite">
<div>On Mar 5, 2025, at 1:24 PM, Brian Baker <bbaker@eng.utah.edu> wrote:</div>
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Dear Lab Network,</div>
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We are in the process of purchasing our first electron beam lithography (EBL) system, and we are reaching out to understand how different facilities staff and support their EBL tools.</div>
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For those of you who have an EBL system, we would appreciate any insights you can share regarding staffing:</div>
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Do you have a dedicated staff member for EBL operations?</li><li class="x_MsoListParagraph" style="margin:0in 0in 0.0001pt; font-size:11pt; font-family:Calibri,sans-serif">
If not, what percentage FTE is typically required to maintain the tool, develop processes, train users, and run jobs?</li><li class="x_MsoListParagraph" style="margin:0in 0in 0.0001pt; font-size:11pt; font-family:Calibri,sans-serif">
Any additional insights on challenges or best practices for supporting an EBL system?</li></ul>
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Your feedback would be incredibly valuable as we establish a sustainable support model for our system.<span class="x_Apple-converted-space"> </span></div>
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Thank you for your time and insights,</div>
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Brian Baker</div>
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University of Utah Nanofab Cleanroom Manager</div>
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