<html>
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
<style type="text/css" style="display:none;"> P {margin-top:0;margin-bottom:0;} </style>
</head>
<body dir="ltr">
<div class="elementToProof" style="text-align: left; text-indent: 0px; margin: 0px; font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
Hi Brian-</div>
<div class="elementToProof" style="text-align: left; text-indent: 0px; margin: 0px; font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<br>
</div>
<div class="elementToProof" style="text-align: left; text-indent: 0px; margin: 0px; font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
Exciting that you are getting a new EBL system! What is it? Although many issues are common to all systems, it will also be helpful for you to connect with other users of the same system for specific tool issues and training procedures.</div>
<div class="elementToProof" style="text-align: left; text-indent: 0px; margin: 0px; font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<br>
</div>
<div class="elementToProof" style="text-align: left; text-indent: 0px; margin: 0px; font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
I am the co-chair of the National Nanotechnology Coordinated Infrastructure (NNCI) EBL Working Group along with Stanley Lin from Stanford. A lot of the members of that group are likely also on this list, but I can forward your questions to that group for responses/input
if you like.</div>
<div class="elementToProof" style="text-align: left; text-indent: 0px; margin: 0px; font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<br>
</div>
<div class="elementToProof" style="text-align: left; text-indent: 0px; margin: 0px; font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
I would say the staff resources you need will highly depend on your anticipated usage. We have a variety of staffing situations across the NNCI EBL sites. Some locations have staff members who primarily only do EBL due to heavy usage. Other sites have lower
EBL usage, and the staff member covers many other tools as well. Additionally, most sites choose to train users to operate the tool independently on their own, but a few sites have chosen to not train users and only the staff member operates the tool and
runs jobs for the users. Also, some sites have only one staff member who handles EBL, and some sites have back up support staff members, or the responsibility is somewhat shared. This will depend on the number of staff you have available and workload. Do
you have a staff member experienced in EBL? An inexperienced staff member will need more time to learn EBL processing and how to help with various user issues.</div>
<div class="elementToProof" style="text-align: left; text-indent: 0px; margin: 0px; font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<br>
</div>
<div class="elementToProof" style="text-align: left; text-indent: 0px; margin: 0px; font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
I assume you will have a maintenance contract with your system. This is usually a must have for EBL systems for handling the emitter replacement and having coverage for any expensive parts that may fail. Typically, facility staff members will focus mostly on
application and operation of the EBL system with most maintenance handled by the vendor. </div>
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<br>
</div>
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
Kind regards-</div>
<div class="elementToProof" style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<br>
</div>
<div id="Signature" class="elementToProof">
<div id="divtagdefaultwrapper" dir="ltr" style="font-size:12pt;color:#000000;background-color:#FFFFFF;font-family:Calibri,Arial,Helvetica,sans-serif">
<p style="margin-top: 0px; margin-bottom: 0px;"><span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt;">Devin K. Brown, Ph.D.</span></p>
<p style="margin-top: 0px; margin-bottom: 0px;"><span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt;">Principal Research Engineer</span></p>
<p style="margin-top: 0px; margin-bottom: 0px;"><span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt;">Institute for Matter and Systems</span></p>
<p style="margin-top: 0px; margin-bottom: 0px;"><span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt;">Georgia Institute of Technology</span></p>
<p style="margin-top: 0px; margin-bottom: 0px;"><span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt;">office location: Marcus 4134</span></p>
<p style="margin-top: 0px; margin-bottom: 0px;"><span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt;">telephone: (404) 385-5370</span></p>
<p style="margin-top: 0px; margin-bottom: 0px;"><span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt;">email: devin.brown@gatech.edu</span></p>
<p style="margin-top: 0px; margin-bottom: 0px;"><span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt;">web: nanolithography.gatech.edu</span></p>
<div style="margin: 0px; font-family: Calibri, Helvetica, sans-serif; font-size: 12pt;">
address:</div>
<div style="margin: 0px; font-family: Calibri, Arial, Helvetica, sans-serif;"><span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt;">Marcus Nanotechnology Building</span><br>
</div>
<div style="margin: 0px;"><span style="font-family: Calibri, Helvetica, sans-serif; font-size: 12pt;">345 Ferst Drive</span><span style="font-family: Calibri, Arial, Helvetica, sans-serif;"><br>
</span></div>
<div style="margin-right: 0px; margin-left: 0px; font-family: Calibri, Helvetica, sans-serif; font-size: 12pt;">
Atlanta, GA 30332-1000</div>
<br>
</div>
</div>
<div id="appendonsend"></div>
<hr style="display:inline-block;width:98%" tabindex="-1">
<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Brian Baker <bbaker@eng.utah.edu><br>
<b>Sent:</b> Wednesday, March 5, 2025 2:24 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] EBL Staffing and Support</font>
<div> </div>
</div>
<style>
<!--
@font-face
{font-family:Wingdings}
@font-face
{font-family:"Cambria Math"}
@font-face
{font-family:Calibri}
p.x_MsoNormal, li.x_MsoNormal, div.x_MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif}
a:link, span.x_MsoHyperlink
{color:#0563C1;
text-decoration:underline}
a:visited, span.x_MsoHyperlinkFollowed
{color:#954F72;
text-decoration:underline}
p.x_MsoListParagraph, li.x_MsoListParagraph, div.x_MsoListParagraph
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:.5in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif}
span.x_EmailStyle17
{font-family:"Calibri",sans-serif;
color:windowtext}
.x_MsoChpDefault
{font-family:"Calibri",sans-serif}
@page WordSection1
{margin:1.0in 1.0in 1.0in 1.0in}
div.x_WordSection1
{}
ol
{margin-bottom:0in}
ul
{margin-bottom:0in}
-->
</style>
<div lang="EN-US" link="#0563C1" vlink="#954F72">
<table border="0" cellspacing="0" cellpadding="0" width="100%" align="left" style="background:revert!important; border:revert!important; bottom:revert!important; color:revert!important; direction:revert!important; display:revert!important; font-size:revert!important; height:revert!important; letter-spacing:revert!important; line-height:revert!important; margin:revert!important; opacity:revert!important; order:revert!important; outline:revert!important; overflow:revert!important; padding:revert!important; position:revert!important; tab-size:revert!important; table-layout:revert!important; text-align:revert!important; text-indent:revert!important; text-orientation:revert!important; text-overflow:revert!important; text-transform:revert!important; top:revert!important; vertical-align:revert!important; visibility:revert!important; white-space:revert!important; width:revert!important; word-break:revert!important; word-spacing:revert!important; writing-mode:revert!important; zoom:revert!important; border:0!important; display:table!important; width:100%!important; table-layout:fixed!important; border-collapse:seperate!important; float:none!important; border-spacing:0px 0px!important">
<tbody style="background:revert!important; border:revert!important; bottom:revert!important; color:revert!important; direction:revert!important; display:revert!important; font-size:revert!important; height:revert!important; letter-spacing:revert!important; line-height:revert!important; margin:revert!important; opacity:revert!important; order:revert!important; outline:revert!important; overflow:revert!important; padding:revert!important; position:revert!important; tab-size:revert!important; table-layout:revert!important; text-align:revert!important; text-indent:revert!important; text-orientation:revert!important; text-overflow:revert!important; text-transform:revert!important; top:revert!important; vertical-align:revert!important; visibility:revert!important; white-space:revert!important; width:revert!important; word-break:revert!important; word-spacing:revert!important; writing-mode:revert!important; zoom:revert!important; display:block!important">
<tr style="background:revert!important; border:revert!important; bottom:revert!important; color:revert!important; direction:revert!important; display:revert!important; font-size:revert!important; height:revert!important; letter-spacing:revert!important; line-height:revert!important; margin:revert!important; opacity:revert!important; order:revert!important; outline:revert!important; overflow:revert!important; padding:revert!important; position:revert!important; tab-size:revert!important; table-layout:revert!important; text-align:revert!important; text-indent:revert!important; text-orientation:revert!important; text-overflow:revert!important; text-transform:revert!important; top:revert!important; vertical-align:revert!important; visibility:revert!important; white-space:revert!important; width:revert!important; word-break:revert!important; word-spacing:revert!important; writing-mode:revert!important; zoom:revert!important">
<td valign="middle" width="1px" bgcolor="#A6A6A6" cellpadding="7px 2px 7px 2px" style="background:revert!important; border:revert!important; bottom:revert!important; color:revert!important; direction:revert!important; display:revert!important; font-size:revert!important; height:revert!important; letter-spacing:revert!important; line-height:revert!important; margin:revert!important; opacity:revert!important; order:revert!important; outline:revert!important; overflow:revert!important; padding:revert!important; position:revert!important; tab-size:revert!important; table-layout:revert!important; text-align:revert!important; text-indent:revert!important; text-orientation:revert!important; text-overflow:revert!important; text-transform:revert!important; top:revert!important; vertical-align:revert!important; visibility:revert!important; white-space:revert!important; width:revert!important; word-break:revert!important; word-spacing:revert!important; writing-mode:revert!important; zoom:revert!important; padding:7px 2px 7px 2px!important; background-color:#A6A6A6!important; width:0px!important">
</td>
<td valign="middle" width="100%" bgcolor="#EAEAEA" cellpadding="7px 5px 7px 15px" color="#212121" style="background:revert!important; border:revert!important; bottom:revert!important; color:revert!important; direction:revert!important; display:revert!important; font-size:revert!important; height:revert!important; letter-spacing:revert!important; line-height:revert!important; margin:revert!important; opacity:revert!important; order:revert!important; outline:revert!important; overflow:revert!important; padding:revert!important; position:revert!important; tab-size:revert!important; table-layout:revert!important; text-align:revert!important; text-indent:revert!important; text-orientation:revert!important; text-overflow:revert!important; text-transform:revert!important; top:revert!important; vertical-align:revert!important; visibility:revert!important; white-space:revert!important; width:revert!important; word-break:revert!important; word-spacing:revert!important; writing-mode:revert!important; zoom:revert!important; width:100%!important; background-color:#EAEAEA!important; padding:7px 5px 7px 15px!important; font-family:wf_segoe-ui_normal,Segoe UI,Segoe WP,Tahoma,Arial,sans-serif!important; font-size:12px!important; font-weight:normal!important; color:#212121!important; text-align:left!important; word-wrap:break-word!important">
<div style="background:revert!important; border:revert!important; bottom:revert!important; color:revert!important; direction:revert!important; display:revert!important; font-size:revert!important; height:revert!important; letter-spacing:revert!important; line-height:revert!important; margin:revert!important; opacity:revert!important; order:revert!important; outline:revert!important; overflow:revert!important; padding:revert!important; position:revert!important; tab-size:revert!important; table-layout:revert!important; text-align:revert!important; text-indent:revert!important; text-orientation:revert!important; text-overflow:revert!important; text-transform:revert!important; top:revert!important; vertical-align:revert!important; visibility:revert!important; white-space:revert!important; width:revert!important; word-break:revert!important; word-spacing:revert!important; writing-mode:revert!important; zoom:revert!important">
You don't often get email from bbaker@eng.utah.edu. <a href="https://aka.ms/LearnAboutSenderIdentification" style="background:revert!important; color:revert!important; direction:revert!important; display:revert!important; font-size:revert!important; opacity:revert!important; visibility:revert!important">
Learn why this is important</a> </div>
</td>
<td valign="middle" align="left" width="75px" bgcolor="#EAEAEA" cellpadding="7px 5px 7px 5px" color="#212121" style="background:revert!important; border:revert!important; bottom:revert!important; color:revert!important; direction:revert!important; display:revert!important; font-size:revert!important; height:revert!important; letter-spacing:revert!important; line-height:revert!important; margin:revert!important; opacity:revert!important; order:revert!important; outline:revert!important; overflow:revert!important; padding:revert!important; position:revert!important; tab-size:revert!important; table-layout:revert!important; text-align:revert!important; text-indent:revert!important; text-orientation:revert!important; text-overflow:revert!important; text-transform:revert!important; top:revert!important; vertical-align:revert!important; visibility:revert!important; white-space:revert!important; width:revert!important; word-break:revert!important; word-spacing:revert!important; writing-mode:revert!important; zoom:revert!important; width:75px!important; background-color:#EAEAEA!important; padding:7px 5px 7px 5px!important; font-family:wf_segoe-ui_normal,Segoe UI,Segoe WP,Tahoma,Arial,sans-serif!important; font-size:12px!important; font-weight:normal!important; color:#212121!important; text-align:left!important; word-wrap:break-word!important">
</td>
</tr>
</tbody>
</table>
<div>
<div class="x_WordSection1">
<p class="x_MsoNormal">Dear Lab Network,</p>
<p class="x_MsoNormal"> </p>
<p class="x_MsoNormal">We are in the process of purchasing our first electron beam lithography (EBL) system, and we are reaching out to understand how different facilities staff and support their EBL tools.</p>
<p class="x_MsoNormal"> </p>
<p class="x_MsoNormal">For those of you who have an EBL system, we would appreciate any insights you can share regarding staffing:</p>
<ul type="disc" style="margin-top:0in">
<li class="x_MsoListParagraph" style="margin-left:0in">Do you have a dedicated staff member for EBL operations?</li><li class="x_MsoListParagraph" style="margin-left:0in">If not, what percentage FTE is typically required to maintain the tool, develop processes, train users, and run jobs?</li><li class="x_MsoListParagraph" style="margin-left:0in">Any additional insights on challenges or best practices for supporting an EBL system?</li></ul>
<p class="x_MsoListParagraph"> </p>
<p class="x_MsoNormal">Your feedback would be incredibly valuable as we establish a sustainable support model for our system.
</p>
<p class="x_MsoNormal"> </p>
<p class="x_MsoNormal">Thank you for your time and insights,</p>
<p class="x_MsoNormal"> </p>
<p class="x_MsoNormal">Brian Baker</p>
<p class="x_MsoNormal">University of Utah Nanofab Cleanroom Manager</p>
<p class="x_MsoNormal"> </p>
<p class="x_MsoNormal"> </p>
</div>
</div>
</div>
</body>
</html>