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Hi Brian,<br>
<br>
We focus on training the users to be independent on the e-beam
writer and assist them when they run into issues. The staff run jobs
for infrequent users but that is a tiny fraction of the tool's
usage. We have one person in charge of the entire litho section;
e-beam writer, laser writer, mask aligner and an assortment of
support equipment. My guess is that about 25% of the time is
dedicated to the e-beam writer.<br>
<br>
Cheers!
<pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
<a class="moz-txt-link-freetext" href="https://udnf.udel.edu">https://udnf.udel.edu</a></pre>
<div class="moz-cite-prefix">On 3/5/2025 2:24 PM, Brian Baker wrote:<br>
</div>
<blockquote type="cite"
cite="mid:05e901db8e04$2c9dbcf0$85d936d0$@eng.utah.edu">
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<p class="MsoNormal">Dear Lab Network,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We are in the process of purchasing our
first electron beam lithography (EBL) system, and we are
reaching out to understand how different facilities staff and
support their EBL tools.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">For those of you who have an EBL system, we
would appreciate any insights you can share regarding
staffing:<o:p></o:p></p>
<ul style="margin-top:0in" type="disc">
<li class="MsoListParagraph"
style="margin-left:0in;mso-list:l0 level1 lfo1">Do you have
a dedicated staff member for EBL operations?<o:p></o:p></li>
<li class="MsoListParagraph"
style="margin-left:0in;mso-list:l0 level1 lfo1">If not, what
percentage FTE is typically required to maintain the tool,
develop processes, train users, and run jobs?<o:p></o:p></li>
<li class="MsoListParagraph"
style="margin-left:0in;mso-list:l0 level1 lfo1">Any
additional insights on challenges or best practices for
supporting an EBL system?<o:p></o:p></li>
</ul>
<p class="MsoListParagraph"><o:p> </o:p></p>
<p class="MsoNormal">Your feedback would be incredibly valuable
as we establish a sustainable support model for our system. <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thank you for your time and insights,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Brian Baker<o:p></o:p></p>
<p class="MsoNormal">University of Utah Nanofab Cleanroom
Manager<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<br>
<fieldset class="moz-mime-attachment-header"></fieldset>
<pre wrap="" class="moz-quote-pre">_______________________________________________
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</pre>
</blockquote>
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