<html><head><meta http-equiv="content-type" content="text/html; charset=utf-8"></head><body style="overflow-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;">Hi Brian,<div><br></div><div>Congrats to your new EBL system!</div><div><br></div><div>We only have one dedicated EBL system (Elionix ESL-G100) since 2018. We purchased the system with 3 year warranty and 4 more years service contracts. I am the major scientist in charge of the system. At the same time I am also in charge of all lithography systems and some other instruments in our cleanroom. Most time I train users to use the EBL independently. Each training takes 6-7 hours total. It will need another session (1-1.5hrs) for alignment training for experienced users. We welcome process/fabrication discussions any time from our users. </div><div><br></div><div>The service contract covers an annual PM (e-gun exchange every year). Usually PM takes about 2 weeks. Those two weeks were almost all the down time for our system for the last 6 years. When beam memory drifts a lot. Elionix service engineer will remotely calibrate all memories. </div><div><br></div><div>This type of the system must be in charged by a staff so that all the operation procedure is set up correctly and can be kept consistent. I learned that some institute who has the same system had experienced several major failures in the first 6 months after installation which were caused by user errors. </div><div><br></div><div>Let me know if you need more information. </div><div><br></div><div><br></div><div><br></div><div>Best,</div><div>Jing </div><div><br id="lineBreakAtBeginningOfMessage"><div>
<meta charset="UTF-8"><div>---------------------------------------<br>Jing Guo Ph.D.<br>Cleanroom Manager/Research Scientist<br>SEA Cleanroom (SST 017)<br>Rice University<br>Houston, TX <br>jeanne.guo@rice.edu<br>713-348-8227</div>
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<div><br><blockquote type="cite"><div>On Mar 5, 2025, at 1:24 PM, Brian Baker <bbaker@eng.utah.edu> wrote:</div><br class="Apple-interchange-newline"><div><meta charset="UTF-8"><div class="WordSection1" style="page: WordSection1; caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"><div style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;">Dear Lab Network,<o:p></o:p></div><div style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><o:p> </o:p></div><div style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;">We are in the process of purchasing our first electron beam lithography (EBL) system, and we are reaching out to understand how different facilities staff and support their EBL tools.<o:p></o:p></div><div style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><o:p> </o:p></div><div style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;">For those of you who have an EBL system, we would appreciate any insights you can share regarding staffing:<o:p></o:p></div><ul type="disc" style="margin-bottom: 0in; margin-top: 0in;"><li class="MsoListParagraph" style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;">Do you have a dedicated staff member for EBL operations?<o:p></o:p></li><li class="MsoListParagraph" style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;">If not, what percentage FTE is typically required to maintain the tool, develop processes, train users, and run jobs?<o:p></o:p></li><li class="MsoListParagraph" style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;">Any additional insights on challenges or best practices for supporting an EBL system?<o:p></o:p></li></ul><div style="margin: 0in 0in 0.0001pt 0.5in; font-size: 11pt; font-family: Calibri, sans-serif;"><o:p> </o:p></div><div style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;">Your feedback would be incredibly valuable as we establish a sustainable support model for our system.<span class="Apple-converted-space"> </span><o:p></o:p></div><div style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><o:p> </o:p></div><div style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;">Thank you for your time and insights,<o:p></o:p></div><div style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><o:p> </o:p></div><div style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;">Brian Baker<o:p></o:p></div><div style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;">University of Utah Nanofab Cleanroom Manager<o:p></o:p></div><div style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><o:p> </o:p></div><div style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><o:p> </o:p></div></div><span style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; float: none; display: inline !important;">_______________________________________________</span><br style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"><span style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; 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