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Dear Labnetwork Hivemind,</div>
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I am looking to assemble what we know collectively about dry plasma etch cleaning recipes so that I can summarize, compare, and ultimately experimentally evaluate them. </div>
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I am interested in:</div>
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-Do your facility's etchers (ICP/ RIE) have custom clean recipes specific to certain etch recipes or materials? If so, what are they and what are both the recipe and clean parameters?</div>
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-Do you use an emission spectrometer (or any other method) to develop or evaluate these cleans?</div>
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-How did you come up with these cleans in the first place?</div>
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-Have you seen any good talks, literature, or other resources relevant to this subject?</div>
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Anything you can share is appreciated and (I hope) will be worth your efforts to provide, as I am seeking to compile this for public benefit. </div>
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Thanks!</div>
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Emma</div>
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<b>_____________________________________________</b></div>
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<b>Emma Anquillare, PhD</b></div>
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Research Scientist</div>
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<span style="font-size: 12pt;">ASRC </span><span style="font-size: 16px; background-color: rgb(255, 255, 255);">Nanofabrication Facility</span></div>
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<span style="background-color: rgb(255, 255, 255);">City University of New York</span></div>
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<i>Catalyzing Change, Celebrating Gains: </i></div>
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<i>A decade of visionary science for the public good.</i></div>
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